DISPLAY APPARATUS AND METHODS FOR MANUFACTURE THEREOF
Display devices incorporating shutter-based light modulators are disclosed along with methods of manufacturing such devices. The methods are compatible with thin-film manufacturing processes known in the art and result in displays having lower power-consumption.
1 . A MEMS-based assembly for a spatial light modulator comprising:
a substrate;
a light-modulating portion supported over the substrate, wherein the light-modulating portion comprises:
a first portion, which, in all light-modulating portion positions, is oriented substantially horizontally with respect to the substrate; and
at least one second portion, which in all light-modulating portion positions, is at least partially transverse to first portion; and
an actuator for moving the light-modulating portion to selectively modulate light.
2 . The MEMS-based assembly of claim 1 , wherein the at least second portion provides the light-modulating portion with an effective thickness with respect to bending normal to the first portion that is greater than the thickness of the first portion.
3 . The MEMS-based assembly of claim 1 , wherein a front surface of the substrate defines a plane, and the at least second portion provides the light-modulating portion with an effective thickness with respect to bending out of the defined plane that is greater than the thickness of the first portion.
4 . The MEMS-based assembly of claim 1 , wherein the at least one second portion extends along substantial portions of the periphery of the light-modulating portion.
5 . The MEMS-based assembly of claim 1 , wherein the at least one second portion extends from the interior of the light-modulating portion.
6 . The MEMS-based assembly of claim 1 , wherein the at least one second portion comprises a sidewall structure.
7 . The MEMS-based assembly of claim 6 , wherein the sidewall structure comprises a first material and the first portion comprises a second, different material.
8 . The MEMS-based assembly of claim 6 , wherein the sidewall structure comprises a first material and the first portion comprises the same first material.
9 . The MEMS-based assembly of claim 6 , wherein the first and second portions of the light-modulating portion provide the light-modulating portion a three-dimensional aspect.
10 . The MEMS-based assembly of claim 9 , wherein the three-dimensional aspect comprises a corrugation.
11 . The MEMS-based assembly of claim 1 , wherein one of the first and second portions is less than 2 microns in thickness.
12 . The MEMS-based assembly of claim 1 , wherein one of the first and second portions comprises an electrically conducting material.
13 . The MEMS-based assembly of claim 12 , wherein the electrically conducting material comprises one of a metal or a semiconducting material.
14 . The MEMS-based assembly of claim 12 , wherein the electrically conducting material comprises one of Al, Cu, Ag, Ni, Cr, Mo, W, Ti, Ta, Nb, Nd, Si, and Zr, or any combination thereof.
15 . The MEMS-based assembly of claim 1 , wherein one of the first and second portions comprises a composite material.
16 . The MEMS-based assembly of claim 1 , wherein one of the first and second portions comprises a multi-layer material.
17 . The MEMS-based assembly of claim 16 , wherein the multi-layer material comprises one of Al 2 O 3 , Cr 2 O 3 , TiO 2 , HfO 2 , V 2 O 5 , Nb 2 O 5 , Ta 2 O 5 , SiO 2 , and Si 3 N 4 .
18 . The MEMS-based assembly of claim 16 , wherein the multilayer material comprises a dielectric and the thickness of the dielectric at least partially inhibits light reflection by destructive interference.
19 . The MEMS-based assembly of claim 1 , wherein one of the first and second portions comprises one of Titanium, Molydenum, Aluminum and Silicon or any combination thereof.
20 . The MEMS-based assembly of claim 1 , wherein one of the first and second portions comprises a light blocking material.
21 . The MEMS-based assembly of claim 1 , wherein one of the first and second portions comprises a light reflective material.
22 . The MEMS-based assembly of claim 1 , wherein one of the first and second portions comprises a light absorbing material.
23 . The MEMS-based assembly of claim 22 , wherein the light absorbing material comprises one of MoCr, MoW, MoTi, MoTa, TiW, and TiCr
24 . The MEMS-based assembly of claim 22 , wherein the light absorbing material comprises a cermet, the cermet including a mixtures, wherein the mixture is one of Cr—Cr 2 O 3 , Cr—SiO 2 and Ti—TiN.
25 . The MEMS-based assembly of claim 22 , wherein the light absorbing material comprises a semiconducting material, the semiconducting material including amorphous silicon or silicon-germanium alloys.
26 . The MEMS-based assembly of claim 22 , wherein the light absorbing material comprises one of Ti and TiN.
27 . The MEMS-based assembly of claim 1 , wherein one of the first and second portions comprises an encapsulating dielectric.
28 . The MEMS-based assembly of claim 1 , wherein at least one second portion, in all light-modulating portion positions, is substantially normal the first portion.
29 . The MEMS-based assembly of claim 1 , wherein the light-modulating portion is a shutter.
30 . The MEMS-based assembly of claim 1 , wherein the light-modulating portion is backlit.
31 . A method of operating a MEMS-based assembly for a spatial light modulator, the MEMS-based assembly comprising a light-modulating portion supported over a substrate, wherein the light-modulating portion comprises a first portion and at least one second portion, the method comprising:
moving the light-modulating portion to a position for which light is not substantially transmitted, and for which the at least one second portion is at least partially transverse to the first portion.
32 . A display comprising:
a substrate;
a light-modulating portion supported over the substrate, wherein the light-modulating portion comprises
a first portion, which, in all light-modulating portion positions, is oriented substantially horizontally with respect to the substrate, and
at least one second portion, which in all light-modulating portion positions, is at least partially transverse to first portion;
an actuator for moving the light-modulating portion to selectively modulate light; and
at least one light source generating the light.
33 . The display of claim 32 , wherein the display is backlit with the at least one light source.