Removal of a sheet from a production apparatus
View Patent ↗A melt of a material is cooled and a sheet of the material is formed in the melt. This sheet is transported, cut into at least one segment, and cooled in a cooling chamber. The material may be Si, Si and Ge, Ga, or GaN. The cooling is configured to prevent stress or strain to the segment. In one instance, the cooling chamber has gas cooling.
1. An apparatus comprising:
a vessel defining a channel configured to hold a melt of a material;
a cooling plate disposed proximate said melt, said cooling plate configured to form a sheet of said material on said melt with radiation cooling;
a cutting apparatus configured to cut said sheet into at least one segment; and
a cooling chamber configured to hold said segment, wherein said cooling chamber and said segment are configured to be at an approximately uniform lateral temperature across a surface of said segment.
2. The apparatus of claim 1 , wherein said material is selected from the group consisting of Si, Si and Ge, Ga, and GaN.
3. The apparatus of claim 1 , wherein said cooling chamber comprises a cooling mechanism.
4. The apparatus of claim 3 , wherein said cooling mechanism comprises a plurality of conduits and a gas source.
5. The apparatus of claim 3 , wherein said cooling chamber comprises at least one porous material.
6. The apparatus of claim 5 , further comprising a plurality of conduits and a gas source in fluid communication with said porous material.
7. The apparatus of claim 1 , wherein said cooling chamber is configured to change said approximately uniform lateral temperature over a period of time.
8. The apparatus of claim 7 , wherein said approximately uniform lateral temperature is lowered to room temperature.
9. The apparatus of claim 7 , wherein said cooling chamber and said segment are cooled without producing a lateral thermal gradient across said surface of said segment.
10. The apparatus of claim 1 , wherein said cooling chamber has a plurality of walls disposed above and below said segment, said walls having anisotropic thermal conductivity that is approximately greater laterally across said surface of said segment than transversely across a thickness of said segment.
11. The apparatus of claim 10 , wherein said cooling chamber is composed of pyrolytic graphite.