Semiconductor device manufacturing method
View Patent ↗A transparent board is positioned on a support board provided with a positioning mark, and a release material is provided. A semiconductor element is then positioned so that the electrode element faces upward, and the support board is then removed. An insulating resin is then formed on the release material so as to cover the semiconductor element; and a via, a wiring layer, an insulation layer, an external terminal, and a solder resist are then formed. The transparent board is then peeled from the semiconductor device through the use of the release material. A chip can thereby be mounted with high precision, there is no need to provide a positioning mark during mounting of the chip on the substrate in the manufacturing process, and the substrate can easily be removed. As a result, a semiconductor device having high density and a thin profile can be manufactured at low cost.
1. A method for manufacturing a semiconductor device, comprising the steps of:
positioning a transparent board flat-side-up on a support board provided with a positioning mark for mounting a semiconductor element;
mounting said semiconductor element on said transparent board using said positioning mark on said support board as a reference so that a surface provided with an electrode terminal faces upward;
removing said support board with said positioning mark after said semiconductor element is mounted;
forming an insulation layer on said transparent board so as to seal a side surface and the surface provided with said electrode terminal of said semiconductor element;
forming one or more wiring layers electrically connected to said electrode terminal of said semiconductor element; and
peeling off said transparent board.
2. A method for manufacturing a semiconductor device, comprising the steps of:
providing a support board that has a surface with a positioning mark;
positioning a transparent board that includes a first main surface and a second main surface opposite said first main surface, said second main surface facing said surface of said support board;
mounting a semiconductor element on said first main surface of said transparent board using said positioning mark on said support board, seen through said transparent board, as a reference so that a surface provided with an electrode terminal faces upward;
removing said support board with said positioning mark after said semiconductor element is mounted;
forming an insulation layer on said transparent board so as to seal a side surface and the surface provided with said electrode terminal of said semiconductor element; and
forming one or more wiring layers electrically connected to said electrode terminal of said semiconductor element.
3. The semiconductor device manufacturing method according to claim 1 , wherein said transparent board is a glass board.
4. The semiconductor device manufacturing method according to claim 2 , wherein said transparent board is a glass board.
5. The semiconductor device manufacturing method according to claim 2 , further comprising providing a metal via that passes through said transparent board.
6. The semiconductor device manufacturing method according to claim 1 , further comprising providing a release material on said transparent board.
7. The semiconductor device manufacturing method according to claim 2 , further comprising providing a release material on said transparent board.
8. The semiconductor device manufacturing method according to claim 6 , wherein said release material is a photo-curable material.
9. The semiconductor device manufacturing method according to claim 7 , wherein said release material is a photo-curable material.
10. The semiconductor device manufacturing method according to claim 1 , wherein said semiconductor element is mounted via an adhesion layer in the step of mounting said semiconductor element.
11. The semiconductor device manufacturing method according to claim 2 , wherein said semiconductor element is mounted via an adhesion layer in the step of mounting said semiconductor element.
12. The semiconductor device manufacturing method according to claim 1 , wherein a heat sink is mounted on a side that is opposite from the surface provided with said electrode terminal of said semiconductor element.
13. The semiconductor device manufacturing method according to claim 2 , wherein a heat sink is mounted on a side that is opposite from the surface provided with said electrode terminal of said semiconductor element.