Photoactive compound gradient photoresist
View Patent ↗A system and method for forming photoresists over semiconductor substrates is provided. An embodiment comprises a photoresist with a concentration gradient. The concentration gradient may be formed by using a series of dry film photoresists, wherein each separate dry film photoresist has a different concentration. The separate dry film photoresists may be formed separately and then placed onto the semiconductor substrate before being patterned. Once patterned, openings through the photoresist may have a tapered sidewall, allowing for a better coverage of the seed layer and a more uniform process to form conductive materials through the photoresist.
1. A semiconductor device comprising:
a substrate; and
a photoresist over the substrate, the photoresist comprising photoactive compounds, the photoactive compounds having a concentration gradient, wherein the concentration of the photoactive compounds is different at different distances from the substrate.
2. The semiconductor device of claim 1 , wherein the substrate further comprises:
a first semiconductor substrate; and
a die over the first semiconductor substrate.
3. The semiconductor device of claim 1 , wherein the photoresist further comprises:
a first layer of photoresist with a first concentration of photoactive compounds; and
a second layer of photoresist with a second concentration of photoactive compounds, the second concentration being less than the first concentration.
4. The semiconductor device of claim 3 , wherein the first concentration is a concentration to reach a desired critical dimension.
5. The semiconductor device of claim 3 , wherein the photoresist further comprises:
a third layer of photoresist with a third concentration of photoactive compounds, the third concentration being less than the second concentration; and
a fourth layer of photoresist with a fourth concentration of photoactive compounds, the fourth concentration being less than the third concentration.
6. The semiconductor device of claim 1 , wherein the concentration gradient has a reduction in concentration as the photoresist extends away from the substrate.
7. The semiconductor device of claim 1 , further comprising an opening through the photoresist, the opening having a tapered sidewall.
8. The semiconductor device of claim 1 , wherein the concentration gradient has a step profile.
9. A semiconductor device comprising:
a first layer of photoresist over a substrate; and
a second layer of photoresist over the first layer of photoresist, the first layer of photoresist and the second layer of photoresist having a concentration gradient of photoactive compounds, wherein the first layer of photoresist has a first concentration of photoactive compounds and the second layer of photoresist has a second concentration of photoactive compounds different from the first concentration of photoactive compounds.
10. The semiconductor device of claim 9 , wherein the second layer of photoresist has a lower concentration of photoactive compounds than the first layer of photoresist.
11. The semiconductor device of claim 9 , wherein the substrate further comprises:
a first semiconductor substrate; and
a die over the first semiconductor substrate.
12. The semiconductor device of claim 9 , further comprising a third layer of photoresist over the second layer of photoresist, the third layer of photoresist having a lower concentration of photoactive compounds than the second layer of photoresist.
13. The semiconductor device of claim 9 , wherein the concentration of photoactive compounds between the first layer of photoresist and the second layer of photoresist has a step profile.
14. The semiconductor device of claim 9 , further comprising an opening through the second layer of photoresist, the opening having a tapered sidewall.
15. A semiconductor device comprising:
a substrate;
a first layer over the substrate, the first layer comprising a first concentration of photoactive compounds; and
a second layer over and in physical contact with the first layer, the second layer comprising a second concentration of photoactive compounds, wherein the first concentration and the second concentration are part of a concentration gradient.
16. The semiconductor device of claim 15 , wherein the substrate further comprises:
a first semiconductor substrate; and
a die over the first semiconductor substrate.
17. The semiconductor device of claim 15 , further comprising a third layer over and in physical contact with the second layer, the third layer having a third concentration of photoactive compounds, the third concentration being less than the second concentration.
18. The semiconductor device of claim 17 , further comprising a fourth layer over and in physical contact with the third layer, the fourth layer having a fourth concentration of photoactive compounds, the fourth concentration being less than the third concentration.
19. The semiconductor device of claim 15 , further comprising an opening through the second layer, the opening having a tapered sidewall.
20. The semiconductor device of claim 15 , wherein the first layer is a dry film photoresist.