Reticle chuck cleaner
View Patent ↗According to one embodiment, a reticle chuck cleaner for cleaning a reticle chuck of an EUV exposure apparatus includes a substrate having a shape to be carried to the reticle chuck of the EUV exposure apparatus, and an adhesive formed on one of the main surfaces of the substrate.
1. A reticle chuck cleaner comprising:
a substrate having a shape to be carried to a reticle chuck of an EUV exposure apparatus,
an adhesive formed on one of main surfaces of the substrate, and
an alignment mark used at the carriage time of a reticle of the EUV exposure apparatus is formed on a surface of the substrate that is opposite to the surface on which the adhesive is formed,
wherein a multi-layered film functioning as a reflection layer, a capping layer for surface protection and a pattern of an optical absorption member are formed on the surface of the substrate that is opposite to the surface on which the adhesive is formed, and the alignment mark is formed of the pattern of the optical absorption member.
2. The cleaner according to claim 1 , wherein a region in which the adhesive is formed is not smaller than a chucking region of the reticle chuck of the EUV exposure apparatus.
3. The cleaner according to claim 1 , wherein the adhesive is not formed in a portion that is held by a carriage mechanism at the carriage time.
4. The cleaner according to claim 1 , wherein the adhesive is one of acrylic, urethane and silicone.
5. The cleaner according to claim 1 , wherein a metal film is formed as an electrode of an electrostatic chuck on one surface of the substrate and the adhesive is formed on the metal film.