DISTRIBUTOR HEATER

1 . A vapor distributor assembly comprising:

a heating element configured to provide a temperature sufficient to vaporize at least a portion of a solid material to form a vapor, the heating element comprising a carbon-based structure.

2 . The vapor distributor assembly of claim 1 , wherein the carbon-based structure comprises carbon fiber.

3 . The vapor distributor assembly of claim 1 , wherein the carbon-based structure comprises carbon nanotubes.

4 . The vapor distributor assembly of claim 1 , wherein the heating element is configured to be resistively heated through application of a current.

5 . The vapor distributor assembly of claim 1 , wherein the heating element is housed within a first chamber.

6 . The vapor distributor assembly of claim 5 , wherein the heating element is configured to maintain the first chamber at a temperature of about 400 degrees C. or more.

7 . The vapor distributor assembly of claim 5 , wherein the heating element is configured to maintain the first chamber at a temperature of about 800 degrees C. or less.

8 . The vapor distributor assembly of claim 5 , wherein the first chamber is configured to receive a solid material and a carrier gas.

9 . The vapor distributor assembly of claim 5 , wherein the first chamber comprises one or more distribution holes.

10 . The vapor distributor assembly of claim 5 , further comprising a second chamber substantially proximate to the first chamber, and configured to provide a material flow sufficiently indirect to mix the vapor and the carrier gas into a substantially uniform gas composition.

11 . The vapor distributor assembly of claim 10 , wherein the first and second chambers are substantially tubular, and the first chamber is disposed within the second chamber such that the second chamber sheaths the first chamber.

12 . The vapor distributor assembly of claim 10 , wherein the second chamber comprises one or more distribution holes.

13 . The vapor distributor assembly of claim 10 , wherein the first chamber is configured such that substantially no solid material can be directed into the second chamber.

14 . A method for depositing material on a substrate, the method comprising:

introducing a solid material and a carrier gas into a first chamber, the first chamber comprising a heating element; and

resistively heating the heating element to vaporize the solid material into a vapor, wherein the heating element comprises a carbon-based structure selected from the group consisting of carbon nanotubes and carbon fiber.

15 . The method of claim 14 , further comprising directing a mixture of the vapor and carrier gas through a second chamber.

16 . The method of claim 15 , wherein directing the mixture of vapor and carrier gas forms a substantially uniform gas composition.

17 . The method of claim 14 , further comprising directing the substantially uniform gas composition toward a surface of a substrate having a temperature lower than the vapor.

18 . A system for depositing a film on a substrate comprising:

a material source connected to a distributor assembly such that a solid material and carrier gas supplied by the material source are introduced into the distributor assembly, wherein the distributor assembly includes:

a first chamber, such that the solid material and carrier gas introduced into the distributor assembly are directed into the first chamber;

a heating element positioned within the first chamber and providing a temperature high enough that at least a portion of the solid material vaporizes into a vapor, wherein the heating element comprises a plurality of carbon-based structures selected from the group consisting of carbon fibers and carbon nanotubes;

a second chamber proximate to the first chamber and providing a material flow sufficiently indirect to mix the vapor and the carrier gas into a substantially uniform vaporlcarrier gas composition; and

an outlet proximate to the second chamber and positioned in a manner that the uniform vaporlcarrier gas composition toward a surface of a proximate substrate; and

a conveyor for transporting the substrate sufficiently proximate to the distributor assembly such that the vapor may be deposited on the substrate as a film.

19 . A method of manufacturing a photovoltaic module comprising:

positioning a substrate at a substrate position within a process chamber;

introducing a solid material and a carrier gas into a first chamber, the first chamber comprising a heating element and positioned adjacent to the process chamber;

heating the heating element to vaporize the solid material into a vapor, wherein the heating element comprises a plurality of carbon-based structures selected from the group consisting of carbon nanotubes and carbon fibers;

directing a mixture of the vapor and carrier gas through a second chamber;

forming a substantially uniform gas composition from the vapor and carrier gas; and

directing the substantially uniform gas composition into the process chamber and toward a surface of the substrate, wherein the substrate has a temperature lower than the vapor, to deposit a film comprising the solid material on the substrate.

20 . The method of claim 19 , wherein the solid material comprises cadmium telluride.

21 . The method of claim 19 , further comprising depositing one or more additional layers adjacent to the layer of solid material deposited on the substrate.

22 . The method of claim 19 , further comprising forming a back contact layer adjacent to the layer of solid material deposited on the substrate.

23 . The method of claim 22 , further comprising positioning at least one common conductor adjacent to the back contact layer.

24 . The method of claim 23 , further comprising positioning a back cover adjacent to the back contact layer.

25 . The method of claim 24 , further comprising accessing the at least one common conductor through an opening on the back cover.

26 . The method of claim 25 , further comprising positioning a junction box adjacent to the back cover.

27 . A method of manufacturing a vapor distributor assembly comprising positioning a heating element comprising a carbon-based structure adjacent to a first chamber.

28 . The method of claim 27 , wherein positioning the heating element adjacent to a first chamber comprises positioning the heating element at least partially within the interior of the first chamber.

29 . The method of claim 27 , further comprising positioning a second heating element adjacent to a second chamber.

30 . The method of claim 27 , further comprising positioning a material source adjacent to the first chamber to create a material flow path between the material source and the first chamber.

31 . The method of claim 27 , further comprising positioning the first chamber adjacent to a substrate process chamber configured to accept a substrate to accept material from the first chamber.

32 . The method of claim 31 , wherein the step of positioning the first chamber adjacent to the substrate process chamber comprises positioning the first chamber at least partially within the interior of the process chamber.

33 . A method of creating a heating element comprising arranging one or more carbon-based structures into the form of a heating element, wherein the one or more carbon-based structures are selected from the group consisting of carbon nanotubes and carbon fibers.

34 . The method of claim 33 , further comprising the step of forming the carbon-based structures before creating the heating element.

35 . The method of claim 34 , wherein the step of forming the carbon-based structures comprises arranging a plurality of carbon atoms into the carbon-based structures.

36 . The method of claim 22 , further comprising fixing the carbon atoms into carbon-based structures after arranging the carbon atoms.

37 . A vapor distributor assembly comprising:

a heating element configured to provide a temperature sufficient to vaporize at least a portion of a solid material to form a vapor, the heating element comprising a fiber.

38 . The vapor distributor assembly of claim 37 , wherein the fiber comprises a carbon fiber.

39 . The vapor distributor assembly of claim 37 , wherein the fiber comprises a glass fiber.

40 . The vapor distributor assembly of claim 37 , further comprising at least one chamber adjacent to the heating element, wherein the at least one chamber is configured to direct a vaporized solid material and carrier gas toward a substrate.