Organic light emitting display device and method for manufacturing the same
View Patent ↗An exemplary embodiment may include a substrate, an insulating layer on the substrate, and a pixel electrode including a transparent conductive layer on the insulating layer. A portion of a surface of the insulating layer contacting the transparent conductive layer has a plurality of recessed holes formed by etching with an etchant into an interface between the transparent conductive layer of the pixel electrode and the insulating layer.
1. An organic light emitting diode (OLED) display, comprising:
a substrate;
an insulating layer on the substrate;
a pixel electrode including a transparent conductive layer on the insulating layer,
wherein a portion of a surface of the insulating layer contacting the transparent conductive layer has a plurality of recessed holes at an interface between the transparent conductive layer of the pixel electrode and the insulating layer; and
an organic emission layer on the pixel electrode and overlapping the plurality of recessed holes.
2. The organic light emitting diode (OLED) display as claimed in claim 1 , wherein the plurality of recessed holes act like lenses.
3. The organic light emitting diode (OLED) display as claimed in claim 1 , wherein the transparent conductive layer includes at least one of indium tin oxide (ITO), indium zinc oxide (IZO), zinc oxide (ZnO), indium oxide (In 2 O 3 ), indium gallium oxide (IGO), and aluminum zinc oxide (AZO).
4. The organic light emitting diode (OLED) display as claimed in claim 1 , wherein the insulating layer includes silicon nitride (SiNx).
5. The organic light emitting diode (OLED) display as claimed in claim 1 , further comprising:
an active layer formed with a semiconductor material between the substrate and the insulating layer;
a gate electrode disposed on the same layer as the pixel electrode on the insulating layer and including the transparent conductive layer and a metal layer on the transparent conductive layer;
an added insulating layer having an insulating layer opening exposing the pixel electrode and formed on the insulating layer to cover the gate electrode;
a source electrode and a drain electrode on the added insulating layer and respectively electrically connected to the active layer;
and
a common electrode on the organic emission layer.
6. The organic light emitting diode (OLED) display as claimed in claim 5 , wherein the pixel electrode further includes a metal layer, the metal layer being on a portion of the transparent conductive layer.
7. The organic light emitting diode (OLED) display of claim 5 , wherein
the metal layer includes at least one of a metal of aluminum (Al), platinum (Pt), palladium (Pd), silver (Ag), magnesium (Mg), gold (Au), nickel (Ni), neodymium (Nd), iridium (Ir), chromium (Cr), nickel (Li), calcium (Ca), molybdenum (Mo), titanium (Ti), tungsten (W), and copper (Cu).
8. The organic light emitting diode (OLED) display of claim 5 , further comprising
a first capacitor electrode made of the semiconductor material with a same layer as the active layer and a second capacitor electrode formed with a same layer and a same material as the gate electrode, the second capacitor electrode overlapping the first capacitor electrode.
9. A method of manufacturing an organic light emitting diode (OLED) display, comprising:
forming an insulating layer on a substrate;
forming a pixel electrode including a transparent conductive layer on the insulating layer;
forming a plurality of recessed holes in a surface of the insulating layer; and
forming an organic emission layer on the transparent conductive layer and overlapping the plurality of recessed holes.
10. The method as claimed in claim 9 , wherein forming the plurality of recessed holes includes etching a portion of the surface of the insulating layer using an etchant, wherein the etchant penetrates into an interface between the transparent conductive layer of the pixel electrode and the insulating layer.
11. The method as claimed in claim 9 , wherein
the plurality of recessed holes act like lenses.
12. The method as claimed in claim 9 , wherein
the transparent conductive layer includes at least one of indium tin oxide (ITO), indium zinc oxide (IZO), zinc oxide (ZnO), indium oxide (In 2 O 3 ), indium gallium oxide (IGO), and aluminum zinc oxide (AZO).
13. The method of claim 9 , wherein forming the plurality of recessed holes includes etching a portion of the surface of the insulating layer suing an etchant, wherein the etchant includes fluoric acid (HF) and ammonium fluoride (NH 4 F).
14. The method as claimed in claim 13 , wherein
the fluoric acid is included in the etchant at less than 1.5 wt %, and the ammonium fluoride is included in the etchant at less than 35 wt %.
15. The method as claimed in claim 9 , wherein
the insulating layer includes silicon nitride (SiNx).
16. The method as claimed in claim 9 , further comprising:
forming an active layer made of a semiconductor material on the substrate before forming the insulating layer;
depositing the transparent conductive layer and a metal layer on the same layer as the pixel electrode on the insulating layer to form a gate electrode;
forming an added insulating layer having an insulating layer opening exposing the pixel electrode, the added insulating layer covering the gate electrode on the insulating layer;
forming a source electrode and a drain electrode respectively electrically connected to the active layer on the added insulating layer;
and
forming a common electrode on the organic emission layer.
17. The method as claimed in claim 16 , wherein
the metal layer includes at least one of a metal of aluminum (Al), platinum (Pt), palladium (Pd), silver (Ag), magnesium (Mg), gold (Au), nickel (Ni), neodymium (Nd), iridium (Ir), chromium (Cr), nickel (Li), calcium (Ca), molybdenum (Mo), titanium (Ti), tungsten (W), and copper (Cu).
18. The method as claimed in claim 16 , further comprising
a first capacitor electrode made of the semiconductor material with a same layer as the active layer and a second capacitor electrode formed with a same layer and a same material as the gate electrode, the second capacitor electrode overlapping the first capacitor electrode.
19. A method of manufacturing a device, comprising:
foaming an insulating layer on a substrate;
forming a pixel electrode including a transparent conductive layer on the insulating layer; and
etching a portion of a surface of the insulating layer contacting the transparent conductive layer of the pixel electrode using fluoric acid (HF) and ammonium fluoride (NH 4 F) to form a plurality of recessed holes.
20. The method as claimed in claim 19 , wherein
the fluoric acid is included in the etchant at less than 1.5 wt %, and the ammonium fluoride is included in the etchant at less than 35 wt %.