Display substrate and method of manufacturing the same
View Patent ↗A display substrate includes a gate wire formed on an insulating substrate, a semiconductor pattern formed on the gate wire and containing a metal oxynitride compound, and a data wire formed on the semiconductor pattern to cross the gate wire. The semiconductor pattern has a carrier number density ranging from 10 16 /cm 3 to 10 19 /cm 3 .
1. A display substrate, comprising:
a gate wire disposed on a substrate;
a semiconductor pattern disposed on the gate wire and comprising a metal oxynitride semiconductor that is plasma treated in a hydrogen (H 2 ) gas atmosphere, so as to have a sheet resistance ranging from 10 5 Ω/sq to 10 7 Ω/sq; and
a data wire disposed on the semiconductor pattern and crossing the gate wire.
2. The display substrate of claim 1 , wherein the semiconductor pattern has a carrier number density ranging from 10 16 /cm 3 to 10 19 /cm 3 .
3. The display substrate of claim 2 , wherein the metal oxynitride comprises at least one metal of gallium (Ga), indium (In), zinc (Zn), tin (Sn), hafnium (Hf), and tantalum (Ta).
4. The display substrate of claim 3 , wherein the metal oxynitride is GaInZnON or HfInZnON.
5. The display substrate of claim 2 , wherein a band gap of the semiconductor pattern is greater than or equal to 3.0 eV.
6. The display substrate of claim 2 , wherein the gate wire comprises a gate electrode;
wherein a thin film transistor of the display substrate comprises a portion of each of the data wire, the semiconductor pattern, and the gate electrode; and
the thin film transistor turns on when a voltage applied to the gate electrode is greater than or equal to 0 V.
7. The display substrate of claim 2 , wherein the gate wire comprises a gate electrode;
wherein a thin film transistor of the display substrate comprises a portion of each of the data wire, the semiconductor pattern, and the gate electrode;
the thin film transistor has a first turn on voltage corresponding to a first voltage applied to the gate electrode and has a subsequent turn on voltage corresponding to a second voltage applied to the gate electrode; and
the absolute value of the difference between the first voltage and the second voltage is less than or equal to 3 V.
8. The display substrate of claim 2 , wherein the semiconductor pattern has an electron mobility greater than or equal to 10 cm 2 /V·s.
9. The method of claim 8 , wherein the plasma treatment is performed using a radio frequency (RF) power ranging from 0 mW/cm 2 ·s to 600 mW/cm 2 ·s.
10. A method of manufacturing a display substrate, the method comprising:
forming a gate wire on a substrate;
forming a semiconductor comprising a metal oxynitride on the gate wire;
performing a plasma treatment on the semiconductor and in a hydrogen (H 2 ) gas atmosphere; and
forming a data wire on the semiconductor, the date wire crossing the gate wire.
11. The method of claim 10 , wherein the plasma treatment is performed on the semiconductor before forming the date wire.
12. The method of claim 10 , wherein forming the semiconductor comprises:
depositing a semiconductor layer; and
patterning the semiconductor layer before the plasma treatment is performed.
13. The method of claim 10 , wherein forming the semiconductor comprises:
forming a semiconductor layer; and
patterning the treated semiconductor layer after the plasma treatment is performed.
14. The method of claim 10 , wherein forming the semiconductor comprises sputtering in the presence of a gas mixture comprising argon (Ar), nitrogen (N 2 ), and oxygen (O 2 ).
15. The method of claim 14 , wherein the amount of Ar ranges from 90% to 93% of the gas mixture.
16. The method of claim 15 , wherein the amount of N 2 ranges from 5% to 6.5% of the gas mixture.
17. The method of claim 10 , wherein the plasma treatment is performed at a pressure ranging from 1000 mTorr to 3000 mTorr.
18. A microelectronic switch, comprising:
a gate electrode;
a drain electrode and a source electrode disposed corresponding to the gate electrode;
a semiconductor disposed between the gate electrode and the drain electrode and the source electrode,
wherein the semiconductor comprises a metal oxynitride that is plasma treated in a hydrogen (H 2 ) gas atmosphere and has a carrier number density such that the semiconductor has a sheet resistance ranging from 10 5 Ω/sq to 10 7 Ω/sq and an electron mobility greater than or equal to 10cm 2 /V·s.
19. The microelectronic switch of claim 18 , wherein the carrier number density ranges from 10 16 /cm 3 to 10 19 /cm 3 .
20. The microelectronic switch of claim 18 , wherein the metal oxynitride comprises at least one metal of gallium (Ga), indium (In), zinc (Zn), tin (Sn), hafnium (Hf), and tantalum (Ta).
21. The microelectronic switch of claim 20 , wherein the metal oxynitride is GaInZnON or HfInZnON.
22. The microelectronic switch of claim 18 , wherein the band gap of the semiconductor is greater than or equal to 3.0 eV.