Acoustic wave device
View Patent ↗An acoustic wave device includes a piezoelectric substrate, an interdigital transducer (IDT) electrode, a reflector electrode, and a dummy electrode. The IDT electrode includes electrode fingers extending in a predetermined direction. The reflector electrode faces the IDT electrode across a gap. The dummy electrode is situated on a straight line extending in the predetermined direction through the gap. At least one of the distance between the dummy electrode and the IDT electrode and the distance between the dummy electrode and the reflector electrode is larger than the distance between the IDT electrode and the reflector electrode. This acoustic wave device prevents a short circuit between the IDT electrode and the reflector electrode, thereby avoiding a decrease in its yield.
1. An acoustic wave device comprising:
a piezoelectric substrate;
an interdigital transducer (IDT) electrode provided on an upper surface of the piezoelectric substrate, the IDT electrode including a plurality of electrode fingers extending in a predetermined direction;
a reflector electrode provided on the upper surface of the piezoelectric substrate, the reflector electrode facing the IDT electrode across a gap; and
a dummy electrode provided on the upper surface of the piezoelectric substrate, the dummy electrode being situated on a straight line extending in the predetermined direction through the gap, the dummy electrode being spaced from the reflector electrode and the IDT electrode,
wherein at least one of a first predetermined distance between the dummy electrode and the IDT electrode and a second predetermined distance between the dummy electrode and the reflector electrode is larger than a third predetermined distance between the IDT electrode and the reflector electrode.
2. The acoustic wave device of claim 1 , wherein both of the first predetermined distance and the second predetermined distance are larger than the third predetermined distance.
3. The acoustic wave device of claim 2 , wherein the first predetermined distance and the second predetermined distance are smaller than a wavelength of a main acoustic wave excited by the IDT electrode.
4. The acoustic wave device of claim 1 , wherein the first predetermined distance and the second predetermined distance are smaller than a wavelength of a main acoustic wave excited by the IDT electrode.
5. The acoustic wave device of claim 1 , further comprising a dielectric layer covering the reflector electrode and the IDT electrode.
6. The acoustic wave device of claim 1 ,
wherein the dummy electrode has a first portion and a second portion which is farther from the gap than the first portion is, and
wherein, in a direction of propagation of a main acoustic wave excited by the IDT electrode, the first portion has a width smaller than a width of the second portion.
7. The acoustic wave device of claim 1 , wherein the dummy electrode has a protruding portion with a tip tapered toward the gap.
8. An acoustic wave device comprising:
a piezoelectric substrate;
a first interdigital transducer (IDT) electrode provided on an upper surface of the piezoelectric substrate, the first IDT electrode having a plurality of first electrode fingers extending in a predetermined direction;
a second IDT electrode provided on the upper surface of the piezoelectric substrate, the second IDT electrode facing the first IDT electrode across a gap, the second IDT electrode including a plurality of second electrode fingers extending in the predetermined direction; and
a dummy electrode provided on the upper surface of the substrate, the dummy electrode being situated on a straight line extending in the predetermined direction through the gap, the dummy electrode being spaced from the first IDT electrode and the second IDT electrode,
wherein at least one of a first predetermined distance between the dummy electrode and the first IDT electrode and a second predetermined distance between the dummy electrode and the second IDT electrode is larger than a third predetermined distance between the first IDT electrode and the second IDT electrode.
9. The acoustic wave device of claim 8 , wherein both of the first predetermined distance and the second predetermined distance are larger than the third predetermined distance.
10. The acoustic wave device of claim 9 , wherein the first predetermined distance and the second predetermined distance are smaller than a wavelength of a main acoustic wave excited by the first IDT electrode.
11. The acoustic wave device of claim 8 , wherein the first predetermined distance and the second predetermined distance are smaller than a wavelength of a main acoustic wave excited by the first IDT electrode.
12. The acoustic wave device of claim 8 ,
wherein the dummy electrode has a first portion and a second portion which is farther from the gap than the first portion is, and
wherein, in a direction of propagation of a main acoustic wave excited by the first IDT electrode, the first portion has a width smaller than a width of the second portion.
13. The acoustic wave device of claim 8 , wherein the dummy electrode has a protruding portion with a tip tapered toward the gap.