An optical sensor preventing damage to a semiconductor layer, and preventing a disconnection and a short circuit of a source electrode and a drain electrode, and a manufacturing method of the optical sensor is provided. The optical sensor includes: a substrate; an infrared ray sensing thin film transistor including a first semiconductor layer disposed on the substrate; a visible ray sensing thin film transistor including a second semiconductor layer disposed on the substrate; a switching thin film transistor including a third semiconductor layer disposed on the substrate; and a semiconductor passivation layer enclosing an upper surface and a side surface of an end portion of at least one of the first semiconductor layer, the second semiconductor layer, and the third semiconductor layer.
1. An optical sensor, comprising:
a substrate;
an infrared ray sensing thin film transistor comprising a first semiconductor layer disposed on the substrate;
a visible ray sensing thin film transistor comprising a second semiconductor layer disposed on the substrate;
a switching thin film transistor comprising a third semiconductor layer disposed on the substrate; and
a passivation layer disposed directly on an upper surface and a side surface of an end portion of at least one of the first semiconductor layer, the second semiconductor layer, and the third semiconductor layer.
2. The optical sensor of claim 1 , wherein
the passivation layer is disposed on the upper surface and the side surface of the end portions of the second semiconductor layer and the third semiconductor layer.
3. The optical sensor of claim 2 , wherein
the passivation layer comprises silicon oxide.
4. The optical sensor of claim 3 , wherein
the second semiconductor layer comprises amorphous silicon, and
the third semiconductor layer comprises amorphous silicon.
5. The optical sensor of claim 4 , wherein
the passivation layer comprises a plasma oxidation treated portion of the second semiconductor layer and the third semiconductor layer.
6. The optical sensor of claim 5 , wherein
the first semiconductor layer comprises amorphous silicon germanium.
7. The optical sensor of claim 2 , further comprising:
an insulating layer disposed on the substrate; and
the first semiconductor layer being disposed on the insulating layer.
8. The optical sensor of claim 7 , wherein
the insulating layer comprises silicon nitride.
9. The optical sensor of claim 2 , wherein
the infrared ray sensing thin film transistor further comprises:
a first insulating layer and a light blocking member disposed on the substrate;
a lower gate electrode disposed on the light blocking member;
a second insulating layer disposed on the light blocking member and the lower gate electrode;
an ohmic contact layer disposed on the first semiconductor layer;
a source electrode and a drain electrode disposed on the ohmic contact layer;
a third insulating layer disposed on the source electrode and the drain electrode;
a contact hole in the second insulating layer and the third insulating layer and exposing the lower gate electrode; and
an upper gate electrode disposed on the third insulating layer and connected to the lower gate electrode through the contact hole,
wherein the first semiconductor layer is disposed on the second insulating layer.
10. The optical sensor of claim 2 , wherein
the visible ray sensing thin film transistor further comprises:
an ohmic contact layer disposed on the second semiconductor layer;
a source electrode and a drain electrode disposed on the ohmic contact layer;
an insulating layer disposed on the source electrode and the drain electrode; and
a second gate electrode disposed on the insulating layer.
11. The optical sensor of claim 1 , wherein
the passivation layer is disposed on the upper surface and the side surface of the end portion of the first semiconductor layer.
12. An optical sensor, comprising:
a substrate;
an infrared ray sensing thin film transistor comprising a first semiconductor layer disposed on the substrate;
a visible ray sensing thin film transistor comprising a second semiconductor layer disposed on the substrate;
a switching thin film transistor comprising a third semiconductor layer disposed on the substrate; and
a passivation layer disposed on an upper surface and a side surface of an end portion of the first semiconductor layer,
wherein the passivation layer comprises silicon germanium oxide.
13. The optical sensor of claim 12 , wherein
the first semiconductor layer comprises amorphous silicon germanium.
14. The optical sensor of claim 13 , wherein
the passivation layer comprises a plasma oxidation treated portion of the first semiconductor layer.
15. The optical sensor of claim 14 , wherein
the second semiconductor layer comprises amorphous silicon germanium, and the third semiconductor layer comprises amorphous silicon germanium.
16. The optical sensor of claim 11 , further comprising:
an insulating layer disposed on the substrate; and
the second semiconductor layer and the third semiconductor layer being disposed on the insulating layer.
17. The optical sensor of claim 16 , wherein
the insulating layer comprises silicon nitride.
18. The optical sensor of claim 11 , wherein
the infrared ray sensing thin film transistor further comprises:
a first insulating layer and light blocking member disposed on the substrate;
a lower gate electrode disposed on the light blocking member;
a second insulating layer disposed on the light blocking member and the lower gate electrode;
an ohmic contact layer disposed on the first semiconductor layer;
a source electrode and a drain electrode disposed on the ohmic contact layer;
a third insulating layer disposed on the source electrode and the drain electrode;
a contact hole in the second insulating layer and the third insulating layer and exposing the lower gate electrode; and
an upper gate electrode disposed on the third insulating layer and connected to the lower gate electrode through the contact hole,
wherein the first semiconductor layer is disposed on the second insulating layer.
19. The optical sensor of claim 11 , wherein
the visible ray sensing thin film transistor further comprises:
an ohmic contact layer disposed on the second semiconductor layer;
a source electrode and a drain electrode disposed on the ohmic contact layer;
an insulating layer disposed on the source electrode and the drain electrode; and
a gate electrode disposed on the insulating layer.
20. An optical sensor, comprising:
a substrate;
a first sensing thin film transistor comprising a first semiconductor layer disposed on the substrate;
a second sensing thin film transistor comprising a second semiconductor layer disposed on the substrate;
a switching thin film transistor comprising a third semiconductor layer disposed on the substrate; and
a passivation layer disposed directly on at least one of an upper surface and a side surface of a portion of at least one of the first semiconductor layer, the second semiconductor layer, and the third semiconductor layer.