Thin film charged body sensor
View Patent ↗A thin film charged body sensor for sensing a contact and/or non-contact movement of a charged body based on an electric field of the charged body. The thin film charged body sensor may include a substrate, a first thin film transistor unit on the substrate, and including a gate layer, an active layer insulated from the gate layer, and source/drain layers insulated from the gate layer and connected to the active layer; and a thin film antenna unit on the substrate, and including a first film including a conductive material electrically connected to the gate layer, the thin film antenna unit adapted to generate an input current in response to an electric field of a charged body.
1. A thin film charged body sensor, comprising:
a substrate;
a first thin film transistor unit on the substrate, the first thin film transistor including a gate layer, an active layer insulated from the gate layer, and source/drain layers insulated from the gate layer and connected to the active layer; and
a thin film antenna unit on the substrate, the thin film antenna unit including a first film including a conductive material electrically connected to the gate layer, the thin film antenna unit adapted to generate an input current in response to an electric field of a charged body.
2. The thin film charged body sensor as claimed in claim 1 , wherein the first film and the gate layer include a same material.
3. The thin film charged body sensor as claimed in claim 2 , wherein the first film is integrally connected to the gate layer.
4. The thin film charged body sensor as claimed in claim 1 , wherein the first film extends from the gate layer.
5. The thin film charged body sensor as claimed in claim 1 , wherein the first film and the source/drain layers include a same material.
6. The thin film charged body sensor as claimed in claim 1 , further including a second thin film transistor unit,
wherein the first film is electrically connected to a gate layer of the second thin film transistor unit.
7. The thin film charged body sensor as claimed in claim 1 , wherein the thin film antenna unit further includes a second film including a conductive material, the second film being insulated from the first film.
8. The thin film charged body sensor as claimed in claim 7 , further including a second thin film transistor unit,
wherein the second film is electrically connected to a gate layer of the second thin film transistor unit.
9. The thin film charged body sensor as claimed in claim 7 , further including a second thin film transistor unit,
wherein the second film is electrically connected to source/drain layers of the second thin film transistor unit.
10. The thin film charged body sensor as claimed in claim 7 , wherein the thin film antenna unit further includes a third film including a conductive material insulated from the first film.
11. The thin film charged body sensor as claimed in claim 10 , wherein the second film and the third film are electrically connected to each other.
12. The thin film charged body sensor as claimed in claim 1 , wherein a plurality of the thin film antenna units are provided, and a plurality of the thin film transistor units are respectively connected to the plurality of thin film antenna units.
13. The thin film charged body sensor as claimed in claim 12 , wherein the plurality of thin film antenna units extend in different directions on a panel on which a sensing operation is performed.
14. The thin film charged body sensor as claimed in claim 1 , further including an insulating layer covering the thin film antenna unit.
15. The thin film charged body sensor as claimed in claim 1 , wherein the active layer includes an oxide semiconductor.
16. The thin film charged body sensor as claimed in claim 1 , wherein the gate layer is under the active layer.
17. The thin film charged body sensor as claimed in claim 1 , wherein the gate layer is above the active layer.
18. A display device, comprising
a display panel; and
a thin film charged body sensor, the thin film charged body sensor including:
a substrate,
a first thin film transistor unit on the substrate,
a gate layer,
an active layer insulated from the gate layer,
source/drain layers insulated from the gate layer and connected to the active layer, and
a thin film antenna unit on the substrate, the thin film antenna unit including a first film including a conductive material electrically connected to the gate layer, the thin film antenna unit being adapted to generate an input current in response to an electric field of a charged body.
19. The display device as claimed in claim 18 , wherein the first film is integrally connected to the gate layer.
20. The display device as claimed in claim 18 , wherein the first film extends from the gate layer.