Thin film transistor, method for manufacturing the same, and display device using the same
View Patent ↗A thin film transistor includes a substrate, a semiconductor layer provided on the substrate and crystallized by using a metal catalyst, a gate electrode insulated from and disposed on the semiconductor layer, and a getter layer disposed between the semiconductor layer and the gate electrode and formed with a metal oxide having a diffusion coefficient that is less than that of the metal catalyst in the semiconductor layer.
1. A thin film transistor comprising:
a substrate;
a semiconductor layer provided on the substrate and crystallized by using a metal catalyst;
a gate electrode insulated from and disposed on the semiconductor layer; and
a getter layer disposed between the semiconductor layer and the gate electrode, and formed with a metal oxide having a diffusion coefficient that is less than a diffusion coefficient of the metal catalyst in the semiconductor layer.
2. The thin film transistor as claimed in claim 1 , wherein
the diffusion coefficient of the getter layer is greater than 0 less than 1/100 of the diffusion coefficient of the metal catalyst.
3. The thin film transistor as claimed in claim 1 , further including
a buffer layer disposed between the substrate and the semiconductor layer, wherein
the metal catalyst is scattered between the buffer layer and the semiconductor layer with a surface density in a range from 1.0e12 atoms/cm 2 to 1.0e15 atoms/cm 2 .
4. The thin film transistor as claimed in claim 1 , wherein
the metal catalyst is scattered on the semiconductor layer with a surface density in a range from 1.0e12 atoms/cm 2 to 1.0e15 atoms/cm 2 .
5. The thin film transistor as claimed in claim 1 , wherein
the metal catalyst includes at least one of nickel (Ni), palladium (Pd), titanium (Ti), silver (Ag), gold (Au), tin (Sn), antimony (Sb), copper (Cu), cobalt (Co), molybdenum (Mo), terbium (Tb), ruthenium (Ru), cadmium (Cd), and platinum (Pt).
6. The thin film transistor as claimed in claim 1 , wherein
the getter layer includes at least one of scandium (Sc), titanium (Ti), zirconium (Zr), hafnium (Hf), vanadium (V), niobium (Nb), tantalum (Ta), chromium (Cr), molybdenum (Mo), tungsten (W), manganese (Mn), rhenium (Re), ruthenium (Ru), osmium (Os), cobalt (Co), rhodium (Rh), iridium (Ir), platinum (Pt), yttrium (Y), lanthanum (La), germanium (Ge), praseodymium (Pr), neodymium (Nd), dysprosium (Dy), holmium (Ho), aluminum (Al), titanium nitride (TiN), and tantalum nitride (TaN), alloys thereof, or silicides thereof.
7. The thin film transistor as claimed in claim 1 , further including
a gate insulating layer disposed between the getter layer and the semiconductor layer.
8. The thin film transistor as claimed in claim 7 , further including
an interlayer insulating layer that covers the gate electrode, a source electrode formed on the interlayer insulating layer, and a drain electrode formed on the interlayer insulating layer and spaced apart from the source electrode.
9. The thin film transistor as claimed in claim 8 , wherein
a plurality of contact holes extend through the interlayer insulating layer, the getter layer, and the gate insulating layer to expose respective portions of the semiconductor layer, and
the source electrode and the drain electrode contact the respective portions of the semiconductor layer through respective contact holes.
10. The thin film transistor as claimed in claim 1 , further including
a gate insulating layer disposed between the getter layer and the semiconductor layer, the gate insulating layer being patterned with the semiconductor layer, and
wherein the getter layer contacts a side of the semiconductor layer.
11. The thin film transistor as claimed in claim 1 , further including
a gate insulating layer disposed between the getter layer and the gate electrode, and
wherein the getter layer contacts the semiconductor layer and the getter layer and the semiconductor layer have a same pattern.
12. A display device comprising:
a substrate;
a semiconductor layer provided on the substrate and crystallized by using a metal catalyst;
a gate electrode insulated from and disposed on the semiconductor layer;
a getter layer disposed between the semiconductor layer and the gate electrode and formed with a metal oxide having a diffusion coefficient that is less than a diffusion coefficient of the metal catalyst in the semiconductor layer;
a source electrode contacting a source region of the semiconductor layer and spaced apart from the gate electrode; and
a drain electrode contacting a drain region of the semiconductor layer and spaced apart from the gate electrode and the source electrode.
13. The display device as claimed in claim 12 , further including a gate insulating layer disposed between the getter layer and the semiconductor layer.
14. The display device as claimed in claim 13 , further including
an interlayer insulating layer that covers the gate electrode, wherein the source electrode is formed on the interlayer insulating layer, and the drain electrode is formed on the interlayer insulating layer and spaced apart from the source electrode.
15. The display device as claimed in claim 14 , wherein
a plurality of contact holes extend through the interlayer insulating layer, the getter layer, and the gate insulating layer to expose portions of the semiconductor layer, and
the source electrode and the drain electrode contact the portions of the semiconductor layer through respective contact holes.
16. The display device as claimed in claim 12 , further including
a gate insulating layer disposed between the getter layer and the semiconductor layer, the gate insulating layer being patterned in a same pattern as the semiconductor layer,
wherein the getter layer contacts a side of the semiconductor layer.
17. The display device as claimed in claim 12 , further including
a gate insulating layer disposed between the getter layer and the gate electrode,
wherein the getter layer contacts the semiconductor layer and the getter layer and the semiconductor layer have a same pattern.
18. The display device as claimed in claim 12 , further including
an organic light emitting diode connected to the drain electrode.
19. The display device as claimed in claim 12 , further including
a pixel electrode connected to the drain electrode, a liquid crystal layer formed on the pixel electrode, and a common electrode formed on the liquid crystal layer.
20. A method for manufacturing a thin film transistor comprising:
providing a substrate;
forming an amorphous silicon layer on the substrate;
forming a polysilicon layer by crystallizing the amorphous silicon layer by use of a metal catalyst;
forming a semiconductor layer by patterning the polysilicon layer;
forming a gate insulating layer on the semiconductor layer;
forming a plurality of gettering holes on the gate insulating layer;
forming a gettering metal layer on the gate insulating layer to contact the semiconductor layer through the plurality of gettering holes; and
forming a getter layer while oxidizing the gettering metal layer through a heat treatment process, such that the getter layer is formed with a metal oxide having a diffusion coefficient that is less than a diffusion coefficient of the metal catalyst included in the semiconductor layer, and reducing a density of metal catalyst included in the semiconductor layer.
21. The method as claimed in claim 20 , further including:
forming a gate electrode on the getter layer so as to overlap a region of the semiconductor layer;
forming an interlayer insulating layer that covers the gate electrode;
forming a plurality of contact holes penetrating the interlayer insulating layer, the getter layer, and the gate insulating layer and exposing source and drain portions of the semiconductor layer; and
forming a source electrode and a drain electrode on the interlayer insulating layer to contact the semiconductor layer through respective ones of the plurality of contact holes.
22. The method as claimed in claim 21 , wherein the plurality of contact holes overlap the plurality of gettering holes.
23. The method as claimed in claim 22 , wherein
when the plurality of contact holes are formed, portions of the getter layer contacting the semiconductor layer through the plurality of gettering holes are eliminated.
24. A method for manufacturing a thin film transistor comprising:
providing a substrate;
forming an amorphous silicon layer on the substrate;
forming a polysilicon layer by crystallizing the amorphous silicon layer by use of a metal catalyst;
coating an insulation material on the polysilicon layer;
forming a semiconductor layer and a gate insulating layer in the same pattern by patterning the polysilicon layer and the insulation material;
forming a gettering metal layer on the gate insulating layer to contact a side of the semiconductor layer; and
forming a getter layer by oxidizing the gettering metal layer through a heat treatment process such that the getter layer is formed with a metal oxide having a diffusion coefficient that is less than a diffusion coefficient of the metal catalyst included in the semiconductor layer, and reducing a density of metal catalyst included in the semiconductor layer.
25. A method for manufacturing a thin film transistor comprising:
providing a substrate;
forming an amorphous silicon layer on the substrate;
forming a polysilicon layer by crystallizing the amorphous silicon layer by use of a metal catalyst, the polysilicon layer including a residual amount of the metal catalyst;
forming a gettering metal layer on the polysilicon layer;
oxidizing the gettering metal layer through a heat treatment process, and reducing a density of the metal catalyst included in the polysilicon layer;
forming a semiconductor layer and a getter layer in the same pattern by patterning the polysilicon layer and the oxidized gettering metal layer; and
forming a gate insulating layer on the getter layer, wherein
the getter layer is formed with a metal oxide having a diffusion coefficient that is less than a diffusion coefficient of the metal catalyst in the semiconductor layer.
26. The method as claimed in claim 25 , wherein the diffusion coefficient of the getter layer is greater than 0 and less than 1/100 of the diffusion coefficient of the metal catalyst.
27. The method as claimed in claim 25 , further including
forming a buffer layer between the substrate and the amorphous silicon layer, wherein
the metal catalyst is scattered between the buffer layer and the amorphous silicon layer with a surface density in a range from 1.0e12 atoms/cm 2 to 1.0e15 atoms/cm 2 .
28. The method as claimed in claim 25 , wherein
the metal catalyst is scattered on the amorphous silicon layer with a surface density in a range from 1.0e12 atoms/cm 2 to 1.0e15 atoms/cm 2 .
29. The method as claimed in claim 25 , wherein
the metal catalyst includes at least one of nickel (Ni), palladium (Pd), titanium (Ti), silver (Ag), gold (Au), tin (Sn), antimony (Sb), copper (Cu), cobalt (Co), molybdenum (Mo), terbium (Tb), ruthenium (Ru), cadmium (Cd), and platinum (Pt).
30. The method as claimed in claim 25 , wherein
the getter layer includes at least one of scandium (Sc), titanium (Ti), zirconium (Zr), hafnium (Hf), vanadium (V), niobium (Nb), tantalum (Ta), chromium (Cr), molybdenum (Mo), tungsten (W), manganese (Mn), rhenium (Re), ruthenium (Ru), osmium (Os), cobalt (Co), rhodium (Rh), iridium (Ir), platinum (Pt), yttrium (Y), lanthanum (La), germanium (Ge), praseodymium (Pr), neodymium (Nd), dysprosium (Dy), holmium (Ho), aluminum (Al), titanium nitride (TiN), and tantalum nitride (TaN), alloys thereof, or silicides thereof.
31. The method as claimed in claim 26 , wherein
the heat treatment process is performed at a temperature from 400 to 993 degrees Celsius.