Method of fabricating a thin film transistor array substrate
View Patent ↗A method of fabricating a thin film transistor array substrate is presented. The method entails forming a gate interconnection line on an insulating substrate, forming a gate insulating layer on the gate interconnection line, forming a semiconductor layer and a data interconnection line on the semiconductor layer, sequentially forming multiple passivation layers, etching the passivation layers down to a drain electrode that is an extension of the data interconnection line. The portion of the drain electrode that is exposed at this stage is a part of the drain electrode-pixel electrode contact portion. A pixel electrode is formed connected to the drain electrode. Two of the passivation layers have the same composition but are processed at different temperatures. A thin film transistor prepared in the above manner is also presented.
1. A thin film transistor (TFT) array substrate, comprising;
a gate interconnection line comprising a gate line, a gate electrode, and a gate pad arranged on an insulating substrate;
a gate insulating layer arranged on the gate interconnection line;
a semiconductor layer arranged on the gate insulating layer;
a data interconnection line comprising a data line, a source electrode, and a drain electrode arranged on the semiconductor layer;
a first passivation layer arranged on the data interconnection line and having a first contact hole exposing a portion of the drain electrode and comprising silicon oxide or silicon oxy-nitride;
a second passivation layer arranged on the first passivation layer and comprising silicon nitride;
a third passivation layer arranged on the second passivation layer and comprising silicon nitride; and
a pixel electrode electrically connected to the drain electrode through the first contact hole, and formed on the first passivation layer; and
wherein the pixel electrode is formed at least partially by removing the second passivation layer and the third passivation layer from the insulating substrate, and
wherein the second passivation layer is formed at a first temperature and comprises an undercut, and the third passivation layer is formed at a second temperature that is higher than the first temperature.
2. The TFT array substrate of claim 1 , wherein the semiconductor layer includes an oxide semiconductor including at least one of Hafnium, Zinc, Indium, Gallium, and Tin.
3. The TFT array substrate of claim 1 , wherein the gate insulating layer is patterned exposing a portion of a pad and does not contact the pixel electrode in a transmissive area of the array substrate.
4. The TFT array substrate of claim 1 , wherein the first temperature is about 150° C.
5. The TFT array substrate of claim 1 , wherein the second temperature is about 280° C.
6. The TFT array substrate of claim 1 , wherein the second passivation layer has a thickness of about 2000 Å.
7. The TFT array substrate of claim 1 , wherein the third passivation layer has a thickness of about 2000 Å.