Semiconductor manufacture component
View Patent ↗Disclosed herein are processes for making a consolidated or densified composite article comprising polymer, particularly fluoropolymer, and oriented carbon fiber, which provides suitability for use in chemical-mechanical applications.
1. An article, wherein said article is a spin disk comprising:
(a) about 70 wt % to about 90 wt % of a thermoplastic polymer;
(b) about 10 to about 30 wt % of chopped carbon fiber;
(c) 0.001 to about 10% of a sizing agent selected from the group consisting of polyvinylpyrrolidone, polyvinyl alcohol, copolyvinyl alcohol, copolyvinly acetate, copolyvinly alcohol-acetate and sodium carboxymethyl cellulose, optionally further comprising (d) less than 2,000 nanomoles, per gram of carbon fiber, of sodium, potassium, calcium, and aluminum, combined; wherein the wt % in each of (a), (b) and (c) is based on the total weight of the component; wherein said thermoplastic polymer (a), said chopped carbon fiber (b) and said sizing agent (c) are a mixture present in the form of a densified matte; and wherein said spin disk has a coefficient of thermal expansion in the XY direction of about 10 ppm/K and a coefficient of thermal expansion in the Z direction which can be greater or less than in the XY direction.
2. The article of claim 1 , wherein the thermoplastic polymer comprises copoly(tetrafluoroethylene-perfluoro[propylvinyl ether]).