Methods of fabricating devices including source/drain region with abrupt junction profile
Provided are methods of fabricating a semiconductor device including a metal oxide semiconductor (MOS) transistor. The methods include forming a gate pattern on a semiconductor substrate. The semiconductor substrate is etched using the gate pattern as an etching mask to form a pair of active trenches spaced apart from each other in the semiconductor substrate. Epitaxial layers are formed in the active trenches, respectively. The respective epitaxial layers are formed by sequentially stacking first and second layers. The first and second layers are formed of a semiconductor layer having a lattice constant greater than the semiconductor substrate, and a composition ratio of the second layer is different from that of the first layer. Semiconductor devices having the first and second layers are also provided.
1. A method of fabricating a semiconductor device, the method comprising:
forming a gate pattern on a semiconductor substrate;
etching the semiconductor substrate using the gate pattern as an etching mask to form a pair of active trenches that are spaced apart from each other in the semiconductor substrate; and
forming epitaxial layers in each of the pair of active trenches,
wherein the epitaxial layers include sequentially stacked first and second layers that include semiconductor layers having a lattice constant greater than the semiconductor substrate,
wherein a composition ratio of the second layers is different from that of the first layers, and
wherein the first layers are formed to cover inner walls of the pair of active trenches, and the second layers are formed to substantially fill the active trenches on the first layers.
2. The method of claim 1 , wherein the first layers are formed of a first silicon germanium layer having a first germanium content, and the second layers are formed of a second silicon germanium layer having a second germanium content higher than the first germanium content.
3. The method of claim 1 , wherein the first layers are formed to have a first P-type impurity concentration, and the second layers are formed to have a second P-type impurity concentration higher than the first P-type impurity concentration.
4. The method of claim 3 , further comprising forming source/drain regions by diffusing the P-type impurities in the epitaxial layers into the semiconductor substrate after the forming of the epitaxial layers,
wherein the epitaxial layers are formed using an in-situ doping.
5. The method of claim 1 , further comprising forming third layers on the second layers,
wherein the respective epitaxial layers comprise the first, second, and third layers which are sequentially stacked, wherein the third layer is formed of a same material layer as the semiconductor substrate.
6. The method of claim 5 , further comprising forming a metal silicide layer on the third layer.
7. A method of fabricating a semiconductor device, the method comprising:
forming a first gate pattern on a first active region of a substrate and a second gate pattern on a second active region of the substrate, the first and second active regions being defined by a device isolation layer;
etching the first active region to form a pair of first active trenches;
etching the second active region to form a pair of second active trenches;
forming a plurality of first epitaxial layers in the first and second active trenches;
exposing inner walls of the first active trenches by selectively removing the first epitaxial layers in the first active trenches; and
forming second epitaxial layers in the first active trenches after the removing of the first epitaxial layers in the first active trenches,
wherein at least one of the plurality of first epitaxial layers includes a first conductivity type impurity, and
wherein at least one of the plurality of second epitaxial layers includes a second conductivity type impurity that is different that the first conductivity type impurity.
8. The method according to claim 7 ,
wherein forming the plurality of first epitaxial layers comprises:
forming a first silicon germanium layer on inner walls of the first and second active trenches and that includes a first germanium content; and
forming a second silicon germanium layer on the first layer and that fills the first and second active trenches, the second silicon germanium layer including a second germanium content that is greater than the first germanium content.
9. A method of fabricating a semiconductor device, the method comprising:
forming a first gate pattern on a first active region of a substrate and a second gate pattern on a second active region of the substrate, the first and second active regions being defined by a device isolation layer;
etching the first active region to form a pair of first active trenches;
etching the second active region to form a pair of second active trenches;
forming a plurality of first epitaxial layers in the first and second active trenches;
exposing inner walls of the first active trenches by selectively removing the first epitaxial layers in the first active trenches; and
forming second epitaxial layers in the first active trenches after the removing of the first epitaxial layers in the first active trenches,
wherein forming the plurality of first epitaxial layers comprises:
funning a first silicon germanium layer on inner walls of the first and second active trenches and that includes a first germanium content; and
forming a second silicon germanium layer on the first layer and that fills the first and second active trenches, the second silicon germanium layer including a second germanium content that is greater than the first germanium content,
wherein forming the plurality of first epitaxial layers further comprises:
forming a third silicon layer that covers the second silicon germanium layer and that includes substantially no germanium content.
10. The method according to claim 7 , further comprising applying a heat treatment process to form first and second impurity regions by diffusing impurities from the plurality of first epitaxial layers and the plurality of second epitaxial layers into the semiconductor substrate.
11. The method according to claim 10 , wherein the first and second impurity regions include abrupt junction profiles and are substantially free of crystal defects.
12. The method according to claim 10 , wherein the first impurity region is a source/drain region of an N-channel metal oxide semiconductor transistor region, and
wherein the second impurity region is a source/drain region of a P-channel metal oxide semiconductor transistor region.
13. A method of fabricating a semiconductor device, the method comprising:
forming a device isolation layer in a predetermined region of a semiconductor substrate comprising first and second regions to define first and second active regions in the first and second regions, respectively;
forming first and second gate patterns on the first and second active regions, respectively;
etching the first and second active regions using the gate patterns and the device isolation layer as etching masks to form a pair of first active trenches in the first active region and a pair of second active trenches in the second active region;
forming first epitaxial layers in the first and second active trenches;
exposing inner walls of the first active trenches by selectively removing the first epitaxial layers in the first active trenches; and
forming second epitaxial layers in the first active trenches after the removing of the first epitaxial layers in the first active trenches,
wherein forming the first epitaxial layers comprises:
forming a first layer on inner walls of the active trenches; and
forming a second layer on the first layer and filling the active trench on the first layer,
wherein a composition ratio of the first layer is different from that of the second layer.
14. The method of claim 13 , wherein the first and second regions are N-channel and P-channel metal oxide semiconductor (MOS) transistor regions, respectively.
15. The method of claim 13 , wherein the first layer and the second layer are each formed of a semiconductor layer having a lattice constant greater than the semiconductor substrate.
16. The method of claim 13 , wherein the second epitaxial layers are formed of a silicon layer doped with N-type impurities or a silicon carbide layer doped with N-type impurities, when the semiconductor substrate is a silicon substrate.
17. The method of claim 13 , further comprising forming source/drain regions by diffusing impurities in the first and second epitaxial layers into the semiconductor substrate, after the forming of the second epitaxial layers.
18. The method according to claim 13 , wherein the first and second epitaxial layers are doped in situ.
19. The method of claim 1 , wherein the first layers are formed to have a first germanium content in a range of about 20 atomic percent to about 30 atomic percent and the second layers are formed to have a second germanium content in a range of about 35 atomic percent to about 50 atomic percent.