Thin-film transistor array substrate and method of fabricating the same
View Patent ↗A thin-film transistor (TFT) array substrate comprises: a substrate; an active layer and a capacitor first electrode formed on the substrate; a gate insulating film formed on the substrate, the active layer and the capacitor first electrode; a gate electrode formed on the gate insulating film corresponding to the active layer and a capacitor second electrode formed on the gate insulating film corresponding to the capacitor first electrode; an interlayer insulating film formed on the gate insulating film, the gate electrode, and the capacitor second electrode; and a pixel electrode, a source electrode, and a drain electrode formed on the interlayer insulating film; wherein at least one of the source electrode and the drain electrode is formed on the pixel electrode. A method of fabricating the TFT array substrate is also disclosed.
1. A thin-film transistor (TFT) array substrate, comprising:
a substrate;
an active layer and a capacitor first electrode formed on the substrate;
a gate insulating film formed on the substrate, the active layer and the capacitor first electrode;
a gate electrode formed on the gate insulating film corresponding to the active layer;
a capacitor second electrode formed on the gate insulating film corresponding to the capacitor first electrode;
an interlayer insulating film formed on the gate insulating film, the gate electrode and the capacitor second electrode; and
a pixel electrode, a source electrode and a drain electrode formed on the interlayer insulating film; wherein
at least one of the source electrode and the drain electrode is formed on the pixel electrode; and
the gate electrode comprises a first gate electrode film, a second gate electrode film and a third gate electrode film stacked sequentially on the gate insulating film.
2. The TFT array substrate of claim 1 , wherein the gate electrode and the capacitor second electrode have different thicknesses.
3. The TFT array substrate of claim 1 , wherein widths of the second gate electrode film and the third gate electrode film are narrower than a width of the first gate electrode film.
4. The TFT array substrate of claim 1 , wherein the first gate electrode film is made of one of Ti, Ta and Cr, the second gate electrode film is made of one of Al, an Al alloy, Ag, an Ag alloy, Cu and a Cu alloy, and the third gate electrode film is made of one of Mo and an Mo alloy.
5. The TFT array substrate of claim 1 , wherein the capacitor first electrode is formed by implanting impurity ions into polysilicon.
6. The TFT array substrate of claim 5 , wherein the capacitor second electrode contains the impurity ions implanted into the polysilicon to form the capacitor first electrode.
7. The TFT array substrate of claim 1 , wherein the pixel electrode is formed on the interlayer insulating film so as to be in direct contact with the interlayer insulating film.
8. The TFT array substrate of claim 7 , wherein the drain electrode is formed on the pixel electrode so as to be in direct contact with the pixel electrode.
9. The TFT array substrate of claim 7 , wherein the source electrode is formed on the pixel electrode so as to be in direct contact with the pixel electrode.
10. The TFT array substrate of claim 1 , wherein the capacitor second electrode is made of a same film as the first gate electrode film.
11. The TFT array substrate of claim 10 , wherein the capacitor second electrode has a thickness equal to a thickness of the first gate electrode film.
12. The TFT array substrate of claim 10 , further comprising a pad formed on the gate insulating film, wherein the pad is made of a same film as the first gate electrode film.