THIN FILM TRANSISTOR SUBSTRATE AND METHOD OF MANUFACTURING THE SAME
A thin film transistor display substrate and a method of manufacturing the same are provided. The thin film transistor substrate includes a gate electrode formed on a display substrate, an active layer formed on the gate electrode to overlap with the gate electrode and including polycrystalline silicon, a first ohmic contact layer formed on the active layer, a second ohmic contact layer formed on the first ohmic contact layer, and a source electrode and a drain electrode each formed on the second ohmic contact layer.
1 . A thin film transistor substrate comprising:
a gate electrode formed on a display substrate;
an active layer formed on the gate electrode to overlap with the gate electrode, the active layer including polycrystalline silicon;
a first ohmic contact layer formed on the active layer;
a second ohmic contact layer formed on the first ohmic contact layer; and
a source electrode and a drain electrode each formed on the second ohmic contact layer.
2 . The thin film transistor substrate of claim 1 , wherein the first ohmic contact layer and the second ohmic contact layer each include silicon, and a band gap of the first ohmic contact layer is smaller than a band gap of the second ohmic contact layer.
3 . The thin film transistor substrate of claim 2 , wherein a band gap of the active layer is smaller than a band gap of the first ohmic contact layer.
4 . The thin film transistor substrate of claim 3 , wherein the band gap of the first ohmic contact layer is from approximately 1.1 eV to approximately 1.5 eV.
5 . The thin film transistor substrate of claim 2 , wherein the first ohmic contact layer has a crystallinity higher than that of the second ohmic contact layer.
6 . The thin film transistor substrate of claim 5 , wherein the first ohmic contact layer comprises doped microcrystalline silicon.
7 . The thin film transistor substrate of claim 6 , wherein the second ohmic contact layer comprises doped amorphous silicon.
8 . The thin film transistor substrate of claim 1 , wherein the first ohmic contact layer has a crystallinity higher than that of the second ohmic contact layer.
9 . The thin film transistor substrate of claim 8 , wherein the first ohmic contact layer comprises doped microcrystalline silicon.
10 . The thin film transistor substrate of claim 8 , wherein the second ohmic contact layer comprises doped amorphous silicon.
11 . A method of manufacturing a thin film transistor substrate, comprising:
forming a gate electrode on a display substrate;
sequentially depositing, on the gate electrode, a gate insulating film, a polycrystalline silicon film, a doped first silicon film and a doped second silicon film;
forming an active layer by patterning the polycrystalline silicon film; and
forming first and second ohmic contact layers by patterning the doped first silicon film and the doped second silicon film so as to expose a portion of the active layer.
12 . The method of claim 11 , wherein a band gap of the first ohmic contact layer is larger than a band gap of the active layer, and is smaller than a band gap of the second ohmic contact layer.
13 . The method of claim 12 , wherein the band gap of the first ohmic contact layer is from approximately 1.1 eV to approximately 1.5 eV.
14 . The method of claim 12 , wherein said sequentially depositing further comprises forming the polycrystalline silicon film by depositing an amorphous silicon film on the gate insulating film and crystallizing the amorphous silicon film by annealing.
15 . The method of claim 14 , wherein the annealing is annealing with a laser beam.
16 . The method of claim 11 , wherein the first ohmic contact layer has a crystallinity higher than that of the second ohmic contact layer.
17 . The method of claim 16 , wherein the first ohmic contact layer comprises doped microcrystalline silicon.
18 . The method of claim 16 , wherein the second ohmic contact layer comprises doped amorphous silicon.
19 . The method of claim 16 , wherein said sequentially depositing further comprises forming the polycrystalline silicon film by depositing an amorphous silicon film on the gate insulating film and crystallizing the amorphous silicon film by annealing.
20 . The method of claim 19 , wherein the annealing is annealing with a laser beam.