Method of manufacturing pre-sintered Si-mixture granule for porous sintered reaction-bonded silicon nitride, porous pre-sintered granule manufactured by the method, and method of manufacturing porous sintered reaction-bonded silicon nitride
View Patent ↗The present invention relates to a method of manufacturing a porous pre-sintered granule for a sintered reaction-bonded silicon nitride, to which a pressure forming technology can be applied to obtain a porous sintered reaction-bonded silicon nitride having high porosity and having a structure in which macropores and micropores coexist with each other, and to a porous pre-sintered granule manufactured by the method. The method includes the steps of: granulating a raw material comprising silicon and sintering additives including yttrium, aluminum and at least one alkali earth metal compound; and pre-sintering the granulated raw material at a temperature of 1300˜1375° C. under an inert atmosphere. According to the present invention, a porous pre-sintered granule for porous sintered reaction-bonded silicon nitride, which can increase the air permeability and trapping efficiency by controlling the size of a pore channel such that macropores and micropores coexist, can be manufactured.
1. A method of manufacturing a porous sintered reaction-bonded silicon nitride, comprising the steps of:
granulating a raw material comprising silicon and sintering additive including yttrium, aluminum, and at least one alkali earth metal compound;
pre-sintering the granulated raw material at a temperature of 1300˜1375° C. under an inert atmosphere to prepare porous granules;
forming a compact with the porous granules;
nitriding the compact under a nitridation atmosphere; and
sintering the nitrided compact at a temperature of 1700˜1900° C. under a nitrogen atmosphere.
2. The method of manufacturing a porous sintered reaction-bonded silicon nitride according to claim 1 , wherein the sintering additive is included in the raw material in an amount of 2˜5 wt % based on an amount required for the complete nitridation of silicon.
3. The method of manufacturing a porous sintered reaction-bonded silicon nitride according to claim 1 , wherein the alkali earth metal is calcium (Ca).
4. A method of manufacturing a porous sintered reaction-bonded silicon nitride, comprising the steps of:
granulating a raw material comprising silicon and a sintering additive including yttrium, aluminum, and at least one alkali earth metal compound;
pre-sintering the granulated raw material at a temperature of 1300˜1375° C. under an inert atmosphere to prepare porous granules, the porous granules having a yield strength of 10 MPa or more;
forming a compact with the porous granules;
nitriding the compact at 1350˜1450° C. for 2˜10 hours under a nitridation atmosphere; and
sintering the nitrided compact at a temperature of 1700˜1900° C. under a nitrogen atmosphere, wherein a shrinkage of the nitrided compact after the sintering is less than 6%.
5. The method of manufacturing a porous sintered reaction-bonded silicon nitride according to claim 4 , wherein the sintering additive is included in the raw material in an amount of 2˜5 wt % based on an amount required for the complete nitridation of silicon.
6. The method of manufacturing a porous sintered reaction-bonded silicon nitride according to claim 4 , wherein the alkali earth metal is calcium (Ca).
7. The method of manufacturing a porous sintered reaction-bonded silicon nitride according to claim 4 , wherein the shrinkage of the nitrided compact after the sintering is less than 4%.