Laser induced thermal imaging mask, laser irradiation apparatus including the same, and method of manufacturing organic light emitting device by using the same
View Patent ↗Provided are a laser induced thermal imaging (LITI) mask, a laser irradiation apparatus including the LITI mask, and a method of manufacturing an organic light emitting device by using the LITI mask. The LITI mask including an opening corresponding to a pixel region and an opening corresponding to an edge of a pixel is used to form an organic layer in an upper portion of a substrate of an organic light emitting device, thereby transferring the organic layer to an edge of the pixel region.
1. A method of manufacturing an organic light emitting device, the method comprising:
providing an acceptor substrate including a first electrode and a pixel defining layer defining a pixel, the first electrode being exposed through an opening of the pixel defining layer;
disposing a donor film on an upper portion of the acceptor substrate;
disposing a mask on the donor film, the mask having an opening that includes a first opening and a second opening, the second opening being separated from the first opening with a shielding portion of the mask disposed between the first opening and the second opening, the first opening covering the pixel, the shielding portion of the mask disposed between the first opening and the second opening covering a portion of the pixel defining layer formed at an edge of the pixel, the second opening covering another portion of the pixel defining layer formed at the edge of the pixel; and
forming an organic layer by applying a laser beam to the mask and transferring a transfer material of the donor film onto the first electrode.
2. The method of claim 1 , wherein the opening of the mask comprises another second opening, the first opening disposed between the second opening and said another second opening, said another second opening being separated from the first opening with another shielding portion of the mask disposed between the first opening and said another second opening.
3. The method of claim 2 , wherein the second opening includes a plurality of slits.
4. The method of claim 2 , wherein the second opening is longer than the first opening in the direction in which the laser beam is scanned.
5. The method of claim 1 , wherein a laser dose per unit area, which is transmitted to the edge of the pixel, is higher than a laser dose per unit area, which is transmitted to the pixel.
6. The method of claim 1 , wherein the disposing of the donor film on the upper portion of the acceptor substrate comprises laminating the donor film on the acceptor substrate.
7. The method of claim 1 , wherein the donor film comprises:
a base film;
a light to heat conversion (LTHC) layer to be formed in one surface of the base film, to absorb light, and to convert the light into heat; and
a transfer layer formed in one surface of the LTHC layer by using the transfer material.
8. The method of claim 7 , wherein the transfer layer is one single layer or one or more multilayers selected from the group consisting of a hole injecting layer (HIL), a hole transporting layer (HTL), an electroluminescent layer (ELL), a hole blocking layer (HBL), an electron transporting layer (ETL), and an electron injecting layer (EIL).
9. The method of claim 1 , wherein the disposing of the mask comprises disposing the mask to directly contact the donor film or to be spaced apart from the donor film.
10. The method of claim 1 , further comprising forming a second electrode on the organic layer.
11. The method of claim 1 , wherein the laser beam is a linear laser beam.