Echtant and method for manufacturing display device using the same
View Patent ↗An etchant according to exemplary embodiments of the present invention includes about 0.5 wt % to about 20 wt % of persulfate, about 0.01 wt % to about 2 wt % of a fluorine compound, about 1 wt % to about 10 wt % of inorganic acid, about 0.5 wt % to about 5 wt % of a cyclic amine compound, about 0.1 wt % to about 5 wt % of a chlorine compound, about 0.05 wt % to about 3 wt % of copper salt, about 0.1 wt % to about 10 wt % of organic acid or organic acid salt, and water.
1. An etchant to etch a double layer comprising a lower metal layer comprising titanium or a metal comprising titanium, and an upper layer comprising copper or a metal comprising copper, the etchant comprising:
about 0.5 wt % to about 20 wt % of persulfate,
about 0.01 wt % to about 2 wt % of a fluorine compound,
about 1 wt % to about 10 wt % of an inorganic acid,
about 0.5 wt % to about 5 wt % of a cyclic amine compound,
about 0.1 wt % to about 5 wt % of a chlorine compound,
about 0.05 wt % to about 3 wt % of a copper salt,
about 0.1 wt % to about 10 wt % of an organic acid or an organic acid salt, and water,
wherein the etchant produces a CD skew rate of from 0.5 μm to 1 μm when etching the upper metal layer and the lower metal layer.
2. The etchant of claim 1 , wherein the persulfate comprises at least one compound selected from potassium persulfate, sodium persulfate, or ammonium persulfate.
3. The etchant of claim 1 , wherein the fluorine compound comprises at least one compound selected from ammonium fluoride, sodium fluoride, potassium fluoride, ammonium bifluoride, sodium bifluoride, or potassium bifluoride.
4. The etchant of claim 1 , wherein the inorganic acid comprises at least one compound selected from a nitric acid, a sulfuric acid, a phosphoric acid, or a perchloric acid.
5. The etchant of claim 1 , wherein the cyclic amine compound comprises at least one compound selected from 5-aminotetrazole, imidazole, indole, purine, pyrazole, pyridine, pyrimidine, pyrrole, pyrrolidine, or pyrroline.
6. The etchant of claim 1 , wherein the chlorine compound comprises at least one compound selected from hydrochloric acid, sodium chloride, potassium chloride, or ammonium chloride.
7. The etchant of claim 1 , wherein, the copper salt comprises at least one compound selected from copper nitrate, copper sulfate, or copper ammonium phosphate.
8. The etchant of claim 7 , wherein:
the organic acid comprises at least one compound selected from acetic acid, butanoic acid, citric acid, formic acid, gluconic acid, glycolic acid, malonic acid, oxalic acid, pentanic acid, sulfobenzoic acid, sulfosuccinic acid, sulfophthalic acid, salicylic acid, sulfosalicylic acid, benzoic acid, lactic acid, glyseric acid, succinic acid, malic acid, tartaric acid, isocitric acid, propenic acid, iminodiacetic acid, or ethylenediaminetetraacetic acid; and
the organic acid salt comprises at least one compound selected from potassium salts, sodium salts, or ammonium salts of the compound selected from acetic acid, butanoic acid, citric acid, formic acid, gluconic acid, glycolic acid, malonic acid, oxalic acid, pentanic acid, sulfobenzoic acid, sulfosuccinic acid, sulfophthalic acid, salicylic acid, sulfosalicylic acid, benzoic acid, lactic acid, glyseric acid, succinic acid, malic acid, tartaric acid, isocitric acid, propenic acid, iminodiacetic acid, or ethylenediaminetetraacetic acid.
9. A method for manufacturing a display device, the method comprising:
forming a gate metal layer on an insulation substrate, the gate metal layer comprising a lower gate metal layer comprising titanium or a metal comprising titanium, and an upper metal layer comprising copper or a metal comprising copper;
forming a gate line comprising a gate electrode by etching the gate metal layer by using an etchant;
forming a gate insulating layer on the gate line;
forming an amorphous silicon layer and a data metal layer on the gate insulating layer;
forming a semiconductor, an ohmic contact layer, a data line comprising a source electrode, and a drain electrode by etching the amorphous silicon layer and the data metal layer;
forming a passivation layer on the data line, drain electrode, and semiconductor; and
forming a pixel electrode that is connected to the drain electrode and is disposed on the passivation layer,
wherein the etchant comprises,
about 0.5 wt % to about 20 wt % of persulfate,
about 0.01 wt % to about 2 wt % of a fluorine compound,
about 1 wt % to about 10 wt % of an inorganic acid,
about 0.5 wt % to about 5 wt % of a cyclic amine compound,
about 0.1 wt % to about 5 wt % of a chlorine compound,
about 0.05 wt % to about 3 wt % of a copper salt,
about 0.1 wt % to about 10 wt % of an organic acid or an organic acid salt, and water.
10. The method of claim 9 , wherein the data metal layer comprises a lower data metal layer comprising titanium or a metal comprising titanium and an upper data metal layer comprising copper or a metal comprising copper.
11. The method of claim 10 , wherein the data metal layer is etched by using the etchant.
12. The etchant of claim 11 , wherein the persulfate comprises at least one compound selected from potassium persulfate, sodium persulfate, or ammonium persulfate.
13. The method of claim 12 , wherein the fluorine compound comprises at least one compound selected from ammonium fluoride, sodium fluoride, potassium fluoride, ammonium bifluoride, sodium bifluoride, or potassium bifluoride.
14. The method of claim 13 , wherein the inorganic acid comprises at least one compound selected from a nitric acid, a sulfuric acid, a phosphoric acid or a perchloric acid.
15. The method of claim 14 , wherein the cyclic amine compound comprises at least one compound selected from 5-aminotetrazole, imidazole, indole, purine, pyrazole, pyridine, pyrimidine, pyrrole, pyrrolidine, or pyrroline.
16. The method of claim 15 , wherein the chlorine compound comprises at least one compound selected from hydrochloric acid, sodium chloride, potassium chloride, or ammonium chloride.
17. The method of claim 16 , wherein the copper salt comprises at least one compound selected from copper nitrate, copper sulfate, or copper ammonium phosphate.
18. The method of claim 17 , wherein:
the organic acid comprises at least one compound selected from acetic acid, butanoic acid, citric acid, formic acid, gluconic acid, glycolic acid, malonic acid, oxalic acid, pentanic acid, sulfobenzoic acid, sulfosuccinic acid, sulfophthalic acid, salicylic acid, sulfosalicylic acid, benzoic acid, lactic acid, glyseric acid, succinic acid, malic acid, tartaric acid, isocitric acid, propenic acid, iminodiacetic acid, or ethylenediaminetetraacetic acid; and
the organic acid salt comprises at least one compound selected from potassium salts, sodium salts, and ammonium salts of the compound selected from acetic acid, butanoic acid, citric acid, formic acid, gluconic acid, glycolic acid, malonic acid, oxalic acid, pentanic acid, sulfobenzoic acid, sulfosuccinic acid, sulfophthalic acid, salicylic acid, sulfosalicylic acid, benzoic acid, lactic acid, glyseric acid, succinic acid, malic acid, tartaric acid, isocitric acid, propenic acid, iminodiacetic acid, or ethylenediaminetetraacetic acid.