METHOD FOR FORMING NOZZLE CHAMBER OF INKJET PRINTHEAD
A method for forming a nozzle chamber of an inkjet printhead includes the steps of depositing a sacrificial layer on a wafer substrate; etching the sacrificial layer to define a deposition area for forming sidewalls of the nozzle chamber; depositing a structural layer over the sacrificial layer and into the deposition area; etching the structural layer to define an ink ejection port and a plurality of etchant holes, the etchant holes being etched to a dimension for facilitating the establishment of sufficient surface tension across the etchant hole to restrict egress of ink therethrough from the nozzle chamber; and etching away the sacrificial layer using a sacrificial etchant, the sacrificial etchant being applied to the sacrificial layer via the etchant holes.
1 . A method for forming a nozzle chamber of an inkjet printhead the method comprising:
depositing a sacrificial layer on a wafer substrate;
etching the sacrificial layer to define a deposition area for forming sidewalls of the nozzle chamber;
depositing a structural layer over the sacrificial layer and into the deposition area;
etching the structural layer to define an ink ejection port and a plurality of etchant holes, the etchant holes being etched to a dimension for facilitating the establishment of sufficient surface tension across the etchant hole to restrict egress of ink therethrough from the nozzle chamber; and
etching away the sacrificial layer using a sacrificial etchant, the sacrificial etchant being applied to the sacrificial layer via the etchant holes.
2 . A method according to claim 1 , further comprising a step of thinning portions of the structural layer via an etching process to define a nozzle rim around the ink ejection port.
3 . A method according to claim 2 , wherein the step of thinning etches portions of the structural layer by 1 micron.