Load port apparatus
View Patent ↗To prevent an overload from being imposed on a door drive mechanism when driving a door increased in weight due to upsizing so that reproducibility of a stop position of the door can be ensured, provided is a load port apparatus in which the door drive mechanism for driving the door in a direction perpendicular to an opening-portion forming plane is constituted by: a rotary cylinder capable of pivoting a cam follower from an angle of 0° to an angle of 180°; and a slider including a cam groove capable of housing the cam follower within a plane perpendicular to a rotational axis of the rotary cylinder, the cam groove extending in a vertical direction, and in which the door is supported by the slider.
1. A load port apparatus, which is to be mounted to an attached surface of a semiconductor processing apparatus to form an opening portion for insertion and removal of an object-to-be-processed, and which opens and closes a lid of a pod as a sealed container arranged on an outside of the semiconductor processing apparatus with respect to the attached surface so that the object-to-be-processed is insertable into and removable from an inside of the pod through the opening portion, the load port apparatus comprising:
a mount table on which the pod is to be placed;
a door which is capable of holding the lid of the pod in a state of being placed on the mount table, the door opening and closing the opening portion from an interior side of the semiconductor processing apparatus with respect to the attached surface; and
a door drive mechanism which supports the door and causes the door to open and close the opening portion,
wherein the door drive mechanism comprises:
a slider which is movable along a predetermined trace and supports the door, the slider comprising a cam groove extending in a direction in which the cam groove intersects, at a predetermined intersection angle, a straight line connecting one end portion and another end portion of the predetermined trace, and
a drive source of a pneumatic rotary cylinder which supports a cam follower engaging with the cam groove and causes the cam follower to rotate within a predetermined angle range about a rotational center which is a rotational axis arranged at a position spaced apart from the cam follower, and
wherein the rotational axis of the drive source faces the slider,
the cam groove intersects with the predetermined trace,
an operation of the cam follower within the predetermined angle caused by the pneumatic rotary cylinder forms an upwardly convex trace in which the cam follower moves within the cam groove from a lower end of the cam groove to a upper end of the cam groove, and from the upper end of the cam groove to the lower end of the cam groove, and
the cam follower positions at the lower end of the cam groove in a vertical direction which is a lower end of the predetermined trace when the cam follower is located at both ends of the predetermined angle range.
2. A load port apparatus according to claim 1 , wherein, at both ends of the predetermined angle range, the predetermined intersection angle comprises a right angle, and tangential lines of a trace of the rotation of the cam follower are orthogonal to the straight line connecting the one end portion and the another end portion of the predetermined trace.
3. A load port apparatus according to claim 1 ,
wherein the slider and the drive source of the door drive mechanism constitute a first door drive unit for driving the door in a direction perpendicular to the attached surface, and
wherein the door drive mechanism further comprises a second door drive unit which supports the first door drive unit and drives the first door drive unit in a direction different from the direction in which the first door drive unit drives the door.
4. A load port apparatus, which is to be mounted to an attached surface of a semiconductor processing apparatus to form an opening portion for insertion and removal of an object-to-be-processed, and which opens and closes a lid of a pod as a sealed container arranged on an outside of the semiconductor processing apparatus with respect to the attached surface so that the object-to-be-processed is insertable into and removable from an inside of the pod through the opening portion, the load port apparatus comprising:
a mount table on which the pod is to be placed;
a door which is capable of holding the lid of the pod in a state of being placed on the mount table, the door opening and closing the opening portion from an interior side of the semiconductor processing apparatus with respect to the attached surface; and
a door drive mechanism which supports the door and causes the door to open and close the opening portion,
wherein the door drive mechanism comprises:
a slider which is movable in a horizontal direction and supports the door, the slider comprising a cam groove extending in a vertical direction; and
a drive source constituted by a pneumatic rotary cylinder which comprises a cam follower engaging with the cam groove and causes the cam follower to rotate within a predetermined angle range about a rotational center which is a rotational axis arranged at a position different from a position of the cam follower, and
wherein the predetermined angle range comprises a range from a horizontal angle of 0° to a horizontal angle of 180° through a vertical, upper angle of 90° with respect to the rotational axis,
an operation of the cam follower within the predetermined angle caused by the pneumatic rotary cylinder forms an upwardly convex trace in which the cam follower moves within the cam groove from a lower end of the cam groove to a upper end of the cam groove, and from the upper end of the cam groove to the lower end of the cam groove,
the cam groove intersects with a trace of the operation of the cam follower, and
the cam follower positions at the lower end of the cam groove in a vertical direction which is a lower end of the trace of the operation when the cam follower is located at both ends of the horizontal angle of 0° and the horizontal angle of 180° of the predetermined angle range.
5. A load port apparatus according to claim 4 , further comprising a rotary-cylinder-position adjustment mechanism capable of adjusting a position of the rotary cylinder along an advancing-and-retracting direction of the door.
6. A load port apparatus according to claim 4 , wherein, at both ends of the predetermined angle range, an extending direction of the cam groove and tangential lines of a trace of the rotation of the cam follower are orthogonal to an operating direction of the slider at a time when the door drive mechanism causes the door to open and close the opening portion.
7. A load port apparatus according to claim 4 ,
wherein the slider and the drive source of the door drive mechanism constitute a first door drive unit for driving the door in a direction perpendicular to the attached surface, and
wherein the door drive mechanism further comprises a second door drive unit which supports the first door drive unit and drives the first door drive unit in a direction different from the direction in which the first door drive unit drives the door.