Semiconductor integrated circuit device
View Patent ↗In semiconductor integrated circuit devices for vehicle use, an aluminum pad on a semiconductor chip and an external device are coupled to each other by wire bonding using a gold wire for the convenience of mounting. Such a semiconductor integrated circuit device, however, causes a connection failure due to the interaction between aluminum and gold in use for a long time at a relatively high temperature (about 150 degrees C.). A semiconductor integrated circuit device can include a semiconductor chip as a part of the device, an electrolytic gold plated surface film (gold-based metal plated film) provided over an aluminum-based bonding pad on a semiconductor chip via a barrier metal film, and a gold bonding wire (gold-based bonding wire) for interconnection between the plated surface film and an external lead provided over a wiring board (wiring substrate).
1. A semiconductor integrated circuit device, comprising:
(a) a wiring member having a chip mounting portion and an electrode terminal;
(b) a semiconductor chip mounted over the chip mounting portion of the wiring member and including:
(b1) a pad electrode provided over a device surface of the semiconductor chip;
(b2) an insulating film formed over the device surface and in which an opening is formed such that a part of the pad electrode is exposed from the opening;
(b3) a barrier metal film provided over the part of the pad electrode exposed from the opening; and
(b4) a surface metal film provided over the barrier metal film;
(c) a bonding wire electrically connected to the surface metal film of the semiconductor chip and the electrode terminal of the wiring member; and
(d) a sealing body sealing the semiconductor chip and the bonding wire,
wherein, in plan view, the surface metal film has a rectangular shape with two longer sides and two shorter sides,
wherein, in plan view, the surface metal film is surrounded by a perimeter of the pad electrode, and
wherein, in a cross-sectional view, at each side of the opening in the insulating film, a distance component from an outer edge of the pad electrode to an adjacent edge of the surface metal film along a direction parallel to the device surface of the semiconductor chip is greater than a distance component from the adjacent edge of the surface metal film to an adjacent edge of the opening along the direction parallel to the device surface.
2. The semiconductor integrated circuit device according to claim 1 ,
wherein, in plan view, the semiconductor chip has a quadrangular shape, and
wherein, in plan view, the surface metal film is disposed such that the two shorter sides thereof are substantially parallel to a first side of the semiconductor chip and a direction in which two longer sides thereof extend intersects with a direction in which the first side of the semiconductor chip extends.
3. The semiconductor integrated circuit device according to claim 2 ,
wherein, in plan view, a first shorter side of the two shorter sides of the surface metal film is closer than a second shorter side of the two shorter sides thereof to the first side of the semiconductor chip, and
wherein, in plan view, a connecting part of the bonding wire and the surface metal film is closer to the first shorter side of the surface metal film than to the second shorter side of the surface metal film.
4. The semiconductor integrated circuit device according to claim 3 , wherein, in plan view, a part between the connecting part of the bonding wire and the surface metal film and the second shorter side of the surface metal film is a part which can contact a test probe.
5. The semiconductor integrated circuit device according to claim 3 , wherein, in plan view, a part of the bonding wire crosses the first shorter side of the surface metal film.
6. The semiconductor integrated circuit device according to claim 1 , wherein, in plan view, the pad electrode has rectangular shape with two longer sides and two shorter sides.
7. The semiconductor integrated circuit device according to claim 1 , wherein, in a cross-section view of the pad electrode, a part of the barrier metal film contacts a part of a top surface of the insulating film around the opening.
8. The semiconductor integrated circuit device according to claim 7 , wherein, in the cross-section view of the pad electrode, a width of the barrier metal film is greater than a width of the opening.
9. The semiconductor integrated circuit device according to claim 8 , wherein, in the cross-section view of the pad electrode, a width of the surface metal film is same as the width of the barrier metal film.
10. The semiconductor integrated circuit device according to claim 9 , wherein, in the cross-section view of the pad electrode, the width of the surface metal film is narrower than a width of the pad electrode.
11. The semiconductor integrated circuit device according to claim 1 ,
wherein the pad electrode includes aluminum as a principal component,
wherein the surface metal film includes gold as a principal component, and
wherein the bonding wire includes copper as a principal component.
12. The semiconductor integrated circuit device according to claim 1 ,
wherein the bonding wire is electrically connected to the surface metal film of the semiconductor chip via a ball portion of the bonding wire, and
wherein, in plan view, the ball portion is located within a perimeter of the surface metal film.
13. The semiconductor integrated circuit device according to claim 1 ,
wherein the electrode terminal is a lead, and
wherein a part of the electrode terminal projects from the sealing body.
14. The semiconductor integrated circuit device according to claim 1 ,
wherein a seed metal film is disposed between and in contact with the barrier metal film and the surface metal film, and
the seed metal film is composed of a material different from that of the barrier and surface metal films.
15. The semiconductor integrated circuit device according to claim 1 , wherein a connecting part of the bonding wire that contacts the surface metal film is offset from a center of the surface metal film with respect to a direction parallel to said two shorter sides, such that, in plan view, at least a portion of the connecting part is outside of the opening in the insulating film.
16. The semiconductor integrated circuit device according to claim 15 , wherein the connecting part of the bonding wire contacts the surface metal film and the insulating film.