Method of manufacturing semiconductor device and apparatus for manufacturing semiconductor device

1. A method of manufacturing a semiconductor device in which an insulating film is filled between patterns etched into a workpiece structure, comprising:

cleaning etch residues residing between the etched patterns by a first chemical liquid;

rinsing the workpiece structure cleaned by the first chemical liquid by a rinse liquid; and

coating the workpiece structure rinsed by the rinse liquid with a coating liquid for formation of the insulating film;

wherein the cleaning of the etch residues to the coating of the workpiece structure are carried out within the same processing chamber such that a liquid constantly exists between the patterns of the workpiece structure.

2. The method according to claim 1 , further comprising supplying a second chemical liquid to the workpiece structure, after the rinsing and before the coating, and substituting the rinse liquid remaining between the patterns of the workpiece structure with the second chemical liquid.

3. The method according to claim 1 , wherein the first chemical liquid comprises a dilute hydrofluoric acid.

4. The method according to claim 1 , wherein the rinse liquid comprises a purified water.

5. The method according to claim 2 , wherein the second chemical liquid comprises an isopropylalcohol.

6. The method according to claim 5 , wherein the coating liquid comprises a polysilazane solution.

7. The method according to claim 6 , wherein the polysilazane solution comprises a solvent including a third chemical liquid.

8. The method according to claim 7 , further comprising supplying the third chemical liquid to the workpiece structure, after substituting the rinse liquid with the second chemical liquid and before the coating, and substituting the second chemical liquid remaining between the patterns of the workpiece structure with the third chemical liquid.

9. The method according to claim 8 , wherein the third chemical liquid comprises a dibutylether.

10. The method according to claim 1 , further comprising supplying a solution including ozone or hydrogen peroxide, after the cleaning and before the rinsing, to oxidize a surface of the workpiece structure.

11. A method of manufacturing a semiconductor device in which an insulating film is filled between patterns etched into a workpiece structure, comprising:

cleaning etch residues residing between the etched patterns by a first chemical liquid;

rinsing the workpiece structure cleaned by the first chemical liquid by a rinse liquid;

supplying a second chemical liquid to the workpiece structure after the rinsing and substituting the rinse liquid remaining between the patterns with the second chemical liquid; and

coating the workpiece structure with a coating liquid for formation of the insulating film after substituting the rinse liquid remaining between the patterns with the second chemical liquid;

wherein the cleaning of the etch residues to the coating of the workpiece structure are carried out such that a liquid constantly exists between the patterns of the workpiece structure, and wherein N OH /N CH of the second chemical liquid is less than N OH /N CH of the rinse liquid but is greater than N OH /N CH of the coating liquid, where N CH represents a number of CH groups within a single molecule and N OH represents a number of OH groups within a single molecule.

12. The method according to claim 11 , wherein the coating liquid comprises a polysilazane solution.

13. The method according to claim 12 , further comprising supplying a third chemical liquid to the workpiece structure, after substituting the rinse liquid with the second chemical liquid and before the coating, and substituting the second chemical liquid remaining between the patterns with the third chemical liquid,

wherein N OH /N CH of the third chemical liquid is less than N OH /N CH of the second chemical liquid but is equal to or greater than N OH /N CH of the coating liquid.

14. The method according to claim 13 , wherein the second chemical liquid comprises an isopropylalcohol.

15. The method according to claim 14 , wherein the third chemical liquid comprises a dibutylether.

16. The method according to claim 15 , wherein the polysilazane solution comprises a solvent including a dibutylether.

17. The method according to claim 11 , further comprising supplying a solution including ozone or hydrogen peroxide, after the cleaning and before the rinsing, to oxidize a surface of the workpiece structure.