Micro electro-mechanical sensor (MEMS) fabricated with ribbon wire bonds
View Patent ↗A micro electro-mechanical sensor is provided. The micro electro-mechanical sensor includes a substrate, and a conducting plane disposed on the substrate. A conducting via is disposed on the substrate, such as adjacent to the conducting plane. A plurality of ribbon conductors are disposed over the conducting plane and electrically connected to the conducting via, such that the plurality of ribbon conductors form a transducer array in combination with the conducting plane, such as through capacitive coupling that changes in response to changes in the physical shape of the plurality of ribbons.
1. A method of manufacturing a micro electro-mechanical sensor comprising;
forming a conducting plane on a substrate;
forming a conducting via on the substrate;
forming a plurality of active devices between segments of the conducting via; and
bonding a plurality of metallic ribbon conductors to the conducting via, wherein the plurality of metallic ribbon conductors are disposed over the conducting plane.
2. The method of claim 1 wherein bonding the plurality of metallic ribbon conductors to the conducting via comprises wedge bonding the plurality of metallic ribbon conductors to the conducting via.
3. The method of claim 1 wherein forming the conducting via on the substrate comprises forming two conducting vias on the substrate.
4. The method of claim 3 wherein forming two the conducting vias on the substrate further comprises forming a plurality of active devices between segments of the conducting vias.
5. The method of claim 1 further comprising forming an insulating layer over the conducting plane.
6. A method of manufacturing a device comprising;
forming a conducting plane on a substrate;
forming a conducting via on the substrate;
bonding a conductor to the conducting via, wherein the conductor is disposed over the conducting plane; and
forming an active device that is electrically coupled to the conductor.
7. The method of claim 6 wherein bonding the conductor to the conducting via comprises wedge bonding the conductor to the conducting via.
8. The method of claim 6 wherein forming the conducting via on the substrate comprises forming a plurality of conducting vias on the substrate.
9. The method of claim 6 wherein forming the conducting via on the substrate further comprises forming a plurality of active devices between segments of the conducting via.
10. The method of claim 6 further comprising forming an insulating layer over the conducting plane.
11. The method of claim 6 further comprising forming an air gap between the conductor and the conducting plane.
12. The method of claim 6 further comprising forming a bus structure coupled to the active device.
13. A method of manufacturing a device comprising;
forming a conducting plane on a substrate;
forming an active device on the substrate;
electrically coupling a conductor to the active device, wherein the conductor is disposed over the conducting plane so as to form an air gap.
14. The method of claim 13 wherein electrically coupling the conductor to the active device comprises wedge bonding the conductor.
15. The method of claim 13 comprising forming a conducting via on the substrate.
16. The method of claim 15 wherein forming the conducting via on the substrate further comprises forming a plurality of active devices between segments of the conducting via.
17. The method of claim 13 further comprising forming an insulating layer over the conducting plane.
18. The method of claim 13 further comprising forming a bus structure coupled to the active device.
19. The method of claim 1 wherein bonding the plurality of metallic ribbon conductors to the conducting via comprises:
placing first metallic ribbon conductors on the conducting via;
bonding the first metallic ribbon conductors to the conducting via; and
placing second metallic ribbon conductors on the conducting via after bonding the first metallic ribbon conductors.
20. The method of claim 13 wherein electrically coupling the conductor to the active device comprises electrically coupling the conductor to the active device after placing the conductor over the conducting plane and forming an air gap between the conductor and the conducting plane.