Methods of forming gates of semiconductor devices
Methods of forming gates of semiconductor devices are provided. The methods may include forming a first recess in a first substrate region having a first conductivity type and forming a second recess in a second substrate region having a second conductivity type. The methods may also include forming a high-k layer in the first and second recesses. The methods may further include providing a first metal on the high-k layer in the first and second substrate regions, the first metal being provided within the second recess. The methods may additionally include removing at least portions of the first metal from the second recess while protecting materials within the first recess from removal. The methods may also include, after removing at least portions of the first metal from the second recess, providing a second metal within the second recess.
1. A method of forming a gate of a semiconductor device, the method comprising:
forming first and second dummy gate electrodes on first and second regions of a substrate, respectively;
forming gate spacers on opposing sidewalls of each of the first and second dummy gate electrodes;
forming an interlayer dielectric film on the gate spacers and on the first and second dummy gate electrodes to provide an n-type transistor in the first region and a p-type transistor in the second region;
forming first and second recesses in the first and second regions, respectively, by removing the first and second dummy gate electrodes;
forming a high-k layer by providing a high dielectric constant material in the first and second recesses and on the interlayer dielectric film;
forming a first sacrificial layer on the high-k layer, the first sacrificial layer substantially filling the first and second recesses;
selectively removing the first sacrificial layer from the second recess while at least a portion of the first sacrificial layer remains in the first recess;
providing a first metal within the second recess; and
after providing the first metal within the second recess, removing the first sacrificial layer from the first recess and providing a second metal substantially filling the first and second recesses.
2. The method of claim 1 , wherein forming the first and second recesses comprises removing the first and second dummy gate electrodes by performing at least one of wet etching and dry etching.
3. The method of claim 1 , wherein selectively removing the first sacrificial layer from the second recess comprises:
providing a mask layer on the first sacrificial layer in the first and second regions;
removing the mask layer from the second region using a photolithography process to expose the first sacrificial layer in the second recess; and
removing the exposed first sacrificial layer from the second recess.
4. The method of claim 3 , wherein removing the exposed first sacrificial layer comprises etching the first sacrificial layer in the second recess by performing at least one of wet etching and dry etching.
5. The method of claim 1 , further comprising:
forming a second sacrificial layer on the first metal to substantially fill the second recess.
6. The method of claim 5 , wherein the second sacrificial layer includes a same material as the first sacrificial layer.
7. The method of claim 1 , further comprising:
before providing the second metal, removing a portion of the first metal from the second recess; and
after removing the portion of the first metal, providing the second metal on a remaining portion of the first metal within the second recess.
8. A method of forming a gate of a semiconductor device, the method comprising:
forming a first recess in a first substrate region having a first conductivity type and forming a second recess in a second substrate region having a second conductivity type;
forming a high-k layer in the first and second recesses;
forming a sacrificial layer on the high-k layer, the sacrificial layer substantially filling the first and second recesses;
removing the sacrificial layer from the second recess while at least a portion of the sacrificial layer remains in the first recess;
after removing the sacrificial layer form the second recess, providing a first metal on the high-k layer in the first and second substrate regions, the first metal being provided within the second recess while at least a portion of the sacrificial layer remains in the first recess;
removing at least portions of the first metal from the second recess while protecting materials within the first recess from removal; and
after removing the at least portions of the first metal from the second recess, removing the sacrificial layer form the first recess and providing a second metal within the second recess to substantially fill the first and second recesses, wherein the second metal is provided on a remaining portion of the first metal within the second recess.