IP Library Granted Patent US 8,647,914
Granted Patent B2
US 8,647,914 · App. 13/242,787 · Granted Feb 11, 2014

Solar cell and method of fabricating the same

View Patent ↗
Loading inventors, assignments & file history…
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this patent's details
Quick Facts
Patent No.
US 8,647,914
App. No.
13/242,787
Granted
Feb 11, 2014
Kind
B2
Abstract

A method of fabricating a solar cell includes forming an emitter layer of a second conductive type on a front surface and a back surface of a substrate of a first conductive type opposite to the second conductive type, forming an anti-reflection layer on the front surface of the substrate, partially removing the anti-reflection layer and the emitter layer to form an isolation groove dividing the emitter layer into a plurality of regions, removing a portion of the emitter layer formed on the back surface of the substrate, and forming a passivation layer covering the isolation groove and the back surface of the substrate.

Claims (26)

1. A method of fabricating a solar cell, the method comprising:

preparing a substrate of a first conductive type;

forming an emitter layer of a second conductive type opposite to the first conductive type, on a front surface, and on a back surface opposite the front surface of the substrate;

forming an anti-reflection layer on the front surface of the substrate;

partially removing the anti-reflection layer and the emitter layer on the front surface of the substrate, which forms an isolation groove dividing the emitter layer into a plurality of regions;

removing a portion of the emitter layer formed on the back surface of the substrate; and

forming a passivation layer in the isolation groove and covering the back surface of the substrate.

2. The method of claim 1 , wherein the isolation groove is adjacent to an end of the substrate in a plan view.

3. The method of claim 2 , wherein the forming the isolation groove includes shedding laser beams on the anti-reflection layer and the emitter layer, which removes a portion of the anti-reflection layer and a portion of the emitter layer.

4. The method of claim 3 , wherein the removing the portion of the emitter layer formed on the back surface of the substrate includes etching using the anti-reflection layer as a mask.

5. The method of claim 4 , wherein the etching in the removing the portion of the emitter layer formed on the back surface of the substrate is wet etching.

6. The method of claim 5 , wherein the wet etching in the removing the portion of the emitter layer formed on the back surface of the substrate etches a region of the emitter layer on the front surface of the substrate and adjacent to a region on which the laser beams are shed.

7. The method of claim 1 , further comprising forming a front surface electrode which contacts a portion of the emitter layer formed, on the front surface of the substrate.

8. The method of claim 7 , wherein the forming the front surface electrode comprises:

removing a portion of the anti-reflection layer, which exposes a portion of the emitter layer;

forming metal paste on the exposed portion of the emitter layer; and

curing the substrate including the metal paste, which diffuses a metal of the metal paste.

9. The method of claim 7 , further comprising forming a back surface electrode which contacts the back surface of the substrate, on the back surface of the substrate.

10. The method of claim 9 , wherein the forming the back surface electrode comprises:

removing a portion of the passivation layer, which exposes a portion of the back surface of the substrate;

forming metal paste on the exposed portion of the substrate; and

curing the substrate, which diffuses a metal of the metal paste.

11. The method of claim 1 , wherein the passivation layer comprises at least one of aluminum oxide (AlO x ), aluminum nitride (AlN), silicon oxide (SiO x ), silicon nitride (SiN x ), or silicon oxynitride (SiON).

12. The method of claim 1 , further comprising, before the forming the emitter layer, performing a texturing process on the front surface of the substrate, which forms a convex-concave part on the front surface of the substrate.

13. The method of claim 1 , wherein the forming the emitter layer includes doping the substrate with an impurity of the second conductive type.

14. The method of claim 13 , further comprising removing a dielectric formed in the forming an emitter layer, between the forming an emitter layer and the forming an anti-reflection layer.

Assignments (3)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Nov 5, 2013
From: SAMSUNG DISPLAY CO., LTD.
To: SAMSUNG SDI CO., LTD.
Reel/Frame 031549/0304 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Sep 20, 2012
From: SAMSUNG ELECTRONICS, CO., LTD.
To: SAMSUNG DISPLAY CO., LTD.
Reel/Frame 028999/0398 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Sep 23, 2011
From: SEO, KYOUNG-JIN; KANG, YOON-MOOK; SONG, MIN-CHUL; SUH, DONG-CHUL; SONG, JU-HEE
To: SAMSUNG SDI CO., LTD.; SAMSUNG ELECTRONICS CO., LTD.
Reel/Frame 026960/0187 →