Mask frame assembly for thin film deposition and the manufacturing method thereof
View Patent ↗A mask frame assembly using a plurality of stick-shaped split masks. The mask frame assembly includes a plurality of split masks, each of which includes a deposition pattern corresponding to a unit screen. Each of the split masks is formed of a plurality of partial masks to form the deposition pattern corresponding to a unit screen. Accordingly, the split masks accommodating a pattern corresponding to a large screen may be easily manufactured without an increase in the amount of etching errors.
1. A mask frame assembly for deposition of thin films, the mask frame assembly comprising:
a frame defining a window; and
multiple mask pieces arranged over the window to provide a plurality of unit masks, each unit mask being designed for a deposition pattern corresponding to a single display panel,
wherein the multiple mask pieces comprises a first mask piece and a second mask piece arranged immediately next to the first mask piece, the first mask piece comprising a first mask portion, the second mask piece comprising a second mask portion,
wherein the first mask portion of the first mask piece and the second mask portion of the second mask piece abut each other and in combination provide at least part of one of the plurality of unit masks
wherein the first mask portion comprises a first row of openings, which comprises a first opening, a second opening immediately neighboring the first opening and a first interval between the first and second openings,
wherein the second mask portion comprises a second row of openings, which comprises a third opening, a fourth opening immediately neighboring the third opening and a second interval between the third and fourth openings,
wherein the second opening and the third opening immediately neighbor each other and are separated by a third interval having a length that is substantially the same as that of the first interval.
2. The mask frame assembly of claim 1 , wherein the first and second mask pieces comprises sides opposing each other and bonded to each other using an adhesive.
3. The mask frame assembly of claim 2 , wherein the first mask portion and the second mask portion have a uniform pattern pitch throughout the deposition pattern including a bonding portion of the first mask piece and the second mask piece.
4. The mask frame assembly of claim 3 , wherein the adhesive is an ultraviolet-curing (UV-curing) adhesive.
5. The mask frame assembly of claim 4 , wherein the UV-curing adhesive is coated on upper and lower surfaces of the bonding portion.
6. The mask frame assembly of claim 5 , wherein the sides of the first mask piece and the second mask piece are substantially parallel to each other.
7. The mask frame assembly of claim 3 , wherein the adhesive is a thermosetting adhesive.
8. The mask frame assembly of claim 7 , wherein the thermosetting adhesive is coated on sides of the bonding portion.
9. The mask frame assembly of claim 8 , wherein the sides of the first mask piece and the second mask piece are substantially parallel to each other.