Nucleation of ultrathin, continuous, conformal metal films using atomic layer deposition and application as fuel cell catalysts
View Patent ↗A method to achieve a conformal ultrathin film of platinum or one of its alloys on a substrate that can be economically used as a heterogeneous catalyst, such as automotive polymer electrolyte membrane (PEM) fuel cell catalyst. The method includes using a hydrogen plasma in platinum atomic layer deposition along with tungsten as a substrate or anchoring adhesive layer to assist platinum nucleation and deposition.
1. A method of producing a fuel cell electrode, said method comprising:
providing a porous carbon-based substrate material that is conductive to a free flow of electrons therethrough; and
nucleating a metal film on said porous substrate material, said nucleating comprising:
providing a layer of metal having a surface energy greater than about 2.5 J/m2 using at least one of ALD, CVD or PVD; and
depositing a continuous, conformal layer of Pt or Pt alloy on the layer of metal using H2 plasma assisted ALD, the layer of Pt or Pt alloy having a thickness of less than about 4 nm such that said continuous, conformal layer of Pt or Pt alloy forms on said porous substrate material to define a catalytic surface of at least one of a fuel cell anode or a fuel cell cathode.
2. The method of claim 1 wherein the layer of metal is W, Re, Ir, Ta, Ru, or Mo.
3. The method of claim 1 wherein providing the layer of metal comprises depositing the layer of metal using H 2 plasma assisted ALD.
4. The method of claim 1 wherein the layer of metal is W.
5. The method of claim 1 further comprising removing metal oxides from the layer of metal.
6. The method of claim 5 wherein removing metal oxides from the layer of metal comprises exposing the layer of metal to a H 2 plasma.
7. The method of claim 1 wherein providing the layer of metal comprises:
providing an oxide substrate;
depositing a layer of metal oxide using ALD on the oxide substrate; and
depositing the layer of metal on the layer of metal oxide.
8. The method of claim 7 wherein the metal oxide is Al 2 O 3 , SiO 2 , or TiO 2 .
9. The method of claim 1 wherein the thickness of the layer of Pt or Pt alloy is less than about 3 nm.
10. The method of claim 1 wherein the thickness of the layer of Pt or Pt alloy is less than about 2.5 nm.
11. A method of producing a fuel cell electrode, said method comprising:
providing a porous carbon-based substrate material that is conductive to a free flow of electrons therethrough; and
nucleating a metal film on said porous substrate material comprising:
providing an oxide surface on said porous substrate material;
depositing a layer of metal oxide using ALD on the oxide surface;
depositing a layer of W on the layer of metal oxide using ALD; and
depositing a continuous, conformal layer of Pt or Pt alloy using at least one of ALD, CVD, or PVD on the layer of W, the layer of Pt or Pt alloy having a thickness of less than about 4 nm.
12. The method of claim 11 wherein depositing a layer of W on the layer of metal oxide comprises depositing the layer of metal using H 2 plasma assisted ALD.
13. The method of claim 11 further comprising removing metal oxides from the layer of W.
14. The method of claim 13 wherein removing metal oxides from the layer of W comprises exposing the layer of W to a H 2 plasma.
15. The method of claim 11 wherein the metal oxide is Al 2 O 3 , SiO 2 , or TiO 2 .
16. The method of claim 11 wherein the thickness of the layer of Pt or Pt alloy is less than about 3 nm.
17. The method of claim 11 wherein the thickness of the layer of Pt or Pt alloy is less than about 2.5 nm.