REACTOR LID ASSEMBLY FOR VAPOR DEPOSITION
Embodiments of the invention generally relate to apparatuses for chemical vapor deposition (CVD) processes. In one embodiment, a reactor lid assembly for vapor deposition is provided which includes a first showerhead assembly and an isolator assembly disposed next to each other on a lid support, and a second showerhead assembly and an exhaust assembly disposed next to each other on the lid support, wherein the isolator assembly is disposed between the first and second showerhead assemblies and the second showerhead assembly is disposed between the isolator assembly and the exhaust assembly.
1 .- 49 . (canceled)
50 . A reactor lid assembly for vapor deposition, comprising:
a first showerhead assembly and an isolator assembly disposed next to each other on a lid support; and
a second showerhead assembly and an exhaust assembly disposed next to each other on the lid support, wherein the isolator assembly is disposed between the first and second showerhead assemblies and the second showerhead assembly is disposed between the isolator assembly and the exhaust assembly.
51 . The reactor lid assembly of claim 50 , wherein the lid support comprises a material selected from the group consisting of steel, stainless steel, 300 series stainless steel, iron, nickel, chromium, molybdenum, aluminum, alloys thereof, and combinations thereof.
52 . The reactor lid assembly of claim 50 , wherein the isolator assembly or the exhaust assembly has a width which is substantially the same or greater than the width of the process path.
53 . The reactor lid assembly of claim 50 , wherein the isolator assembly or the exhaust assembly has a width which is substantially the same or greater than the width of the first or second showerhead assembly.
54 . The reactor lid assembly of claim 50 , wherein the first showerhead assembly, the isolator assembly, the second showerhead assembly, and the exhaust assembly independently have a rectangular geometry.
55 . The reactor lid assembly of claim 50 , wherein the first showerhead assembly and the second showerhead assembly have a square geometry.
56 . A reactor lid assembly for vapor deposition, comprising:
a first showerhead assembly, an isolator assembly, a second showerhead assembly, and an exhaust assembly consecutively and linearly disposed next to each other on a lid support, wherein the isolator assembly is disposed between the first and second showerhead assemblies and the second showerhead assembly is disposed between the isolator assembly and the exhaust assembly.
57 . A reactor lid assembly for vapor deposition, comprising:
a first showerhead assembly, an isolator assembly, a second showerhead assembly, and an exhaust assembly consecutively and linearly disposed next to each other on a lid support; and
a temperature regulation system comprising at least one fluid passageway extending throughout the lid support and at least one inlet and at least one outlet coupled to and in fluid communication with the fluid passageway.