Mechanical switch with a curved bilayer background
View Patent ↗An apparatus includes a mechanical switch. The mechanical switch includes a bilayer with first and second stable curved states. A transformation of the bilayer from the first state to the second state closes the switch.
1. A method of manufacturing a mechanical switch, comprising:
forming a stressed bilayer over a top surface of a substrate such that a connector physically connects a part of the bilayer to the substrate; and
releasing the bilayer by removing a sacrificial material layer located between the bilayer and the top surface; and wherein:
the released bilayer is transformable between a first stable curved state and a second stable curved state, the bilayer flexed along an axis in the first state and flexed along a different, non-parallel axis in the second state, and
the bilayer is capable of remaining in the first stable curved state and capable of remaining in the second stable curved state in the absence of a control force.
2. The method of claim 1 , further comprising:
forming an array of electrodes along the top surface, the electrodes being fixed to the substrate and being interposed between the bilayer and the substrate.
3. The method of claim 1 , wherein the forming a bilayer includes forming a layer of polysilicon.
4. The method of claim 3 , the forming a bilayer includes forming an array of stops, the stops being along one surface of the bilayer.
5. The method of claim 3 , wherein the forming a bilayer includes etching at least one of the layers of the bilayer to have a polygonal shape.
6. The method of claim 1 , wherein the connector forms a conducting path between a conducting layer of the bilayer and the substrate.