Stocker apparatus and substrate treating apparatus
A stocker apparatus and method have openers for receiving FOUPs acting as containers each for storing a plurality of substrates, to feed and collect the substrates to/from a substrate treating apparatus main body, a transport mechanism for holding and transporting the FOUPs, and racks arranged above the openers for receiving the FOUPs. The racks include an incoming rack for receiving the FOUPs from an external transport device, an outgoing rack for delivering the FOUPs to the external transport device, and a mid-treatment storage rack for keeping an empty FOUP after the substrates are fed therefrom. The openers include a feed-only opener for feeding the substrates, and a collect-only opener for collecting the substrates.
1. A method of controlling a stocker apparatus connected to a single substrate type substrate treating apparatus main body, for improved handling of empty FOUPs,
the stocker apparatus having:
openers for receiving FOUPs acting as containers each for storing a plurality of substrates, to feed and collect the substrates to and from the single substrate type substrate treating apparatus main body for performing a predetermined treatment of substrates, the openers including a feed-only opener for feeding the substrates, and a collect-only opener for collecting the substrates,
a transport mechanism for holding and transporting the FOUPs,
a control device for controlling at least the FOUP transport mechanism, and
racks arranged above the openers for receiving the FOUPs, the racks including an incoming rack for receiving the FOUPs from an external transport device, an outgoing rack for delivering the FOUPs to the external transport device, and a mid-treatment storage rack for keeping an empty FOUP after the substrates are fed therefrom,
said method comprising using the control device for controlling the transport mechanism, wherein:
when the substrates have been emptied from a FOUP at the feed-only opener, then the transport mechanism transports the empty FOUP from the feed-only opener to the collect-only opener, only when no FOUP is present on the collect-only opener, and
when the empty FOUP is not transported to the collect-only opener because of a FOUP present on the collect-only opener, the transport mechanism transports the empty FOUP to the mid-treatment storage rack; and then transports the empty FOUP to the collect-only opener from the mid-treatment storage rack when the collect-only opener has become vacant, and
after the transport mechanism has transported the empty FOUP to the collect-only opener, the treated substrates are then collected back into the FOUP.
2. The method of controlling the stocker apparatus according to claim 1 , wherein the racks further include a pre-treatment storage rack for keeping a FOUP storing substrates to be treated, the method further comprising the control device controlling the transport mechanism, wherein:
the transport mechanism transports the FOUP storing the substrates to be treated and placed on the incoming rack to the feed-only opener only when no FOUP is present on the feed-only opener, and
when the FOUP storing the substrates to be treated and placed on the incoming rack is unable to be transported to the feed-only opener because of a FOUP present on the feed-only opener, the transport mechanism transports the FOUP storing the substrates to be treated and placed on the incoming rack to the pre-treatment storage rack; and then transports to the feed-only opener the FOUP storing the substrates to be treated and transported to the pre-treatment storage rack, when the feed-only opener is vacant.
3. The method of controlling the stocker apparatus according to claim 2 , wherein:
the step of transporting the FOUP storing the substrates to be treated and placed on the incoming rack to one of the feed-only opener and the pre-treatment storage rack is executed to determine whether a different FOUP is present on the feed-only opener; and
the step of transporting to the feed-only opener the FOUP storing the substrates to be treated and transported to the pre-treatment storage rack is executed to determine whether the feed-only opener is vacant.
4. The method of controlling the stocker apparatus according to claim 2 , wherein the FOUP storing the substrates to be treated and placed on the incoming rack, when unable to be transported to the feed-only opener, is transported directly to the pre-treatment storage rack among the outgoing rack, the pre-treatment storage rack, the mid-treatment storage rack and the collect-only opener.
5. The method of controlling the stocker apparatus according to claim 2 , wherein the racks further include a post-treatment storage rack for keeping a FOUP having collected treated substrates, the method further comprising:
transporting the FOUP having collected the treated substrates and placed on the collect-only opener to the outgoing rack when no FOUP is present on the outgoing rack, and transporting the FOUP having collected the treated substrates to the post-treatment storage rack when the FOUP having collected the treated substrates is unable to be transported to the outgoing rack because of a different FOUP present on the outgoing rack; and
transporting to the outgoing rack the FOUP having collected the treated substrates and transported to the post-treatment storage rack when the outgoing rack is vacant after the FOUP having collected the treated substrates is transported to the post-treatment storage rack.
6. The method of controlling the stocker apparatus according to claim 5 , wherein:
the step of transporting the empty FOUP on the feed-only opener to one of the collect-only opener and the mid-treatment storage rack is executed to determine whether a different FOUP is present on the collect-only opener;
the step of transporting to the collect-only opener the empty FOUP transported to the mid-treatment storage rack is executed to determine whether the collect-only opener is vacant;
the step of transporting the FOUP storing the substrates to be treated and placed on the incoming rack to one of the feed-only opener and the pre-treatment storage rack is executed to determine whether a different FOUP is present on the feed-only opener;
the step of transporting to the feed-only opener the FOUP storing the substrates to be treated and transported to the pre-treatment storage rack is executed to determine whether the feed-only opener is vacant;
the step of transporting the FOUP having collected the treated substrates and placed on the collect-only opener to one of the outgoing rack and the post-treatment storage rack is executed to determine whether a different FOUP is present on the outgoing rack; and
the step of transporting to the outgoing rack the FOUP having collected the treated substrates and transported to the post-treatment storage rack is executed to determine whether the outgoing rack is vacant.
7. The method of controlling the stocker apparatus according to claim 5 , wherein:
the empty FOUP, when unable to be transported to the collect-only opener, is transported directly to the mid-treatment storage rack among the incoming rack, the outgoing rack, the pre-treatment storage rack, the mid-treatment storage rack and the post-treatment storage rack;
the FOUP storing the substrates to be treated and placed on the incoming rack, when unable to be transported to the feed-only opener, is transported directly to the pre-treatment storage rack among the outgoing rack, the pre-treatment storage rack, the mid-treatment storage rack, the post-treatment storage rack and the collect-only opener; and
the FOUP having collected the treated substrates, when unable to be transported to the outgoing rack, is transported directly to the post-treatment storage rack among the incoming rack, the pre-treatment storage rack, the mid-treatment storage rack, the post-treatment storage rack and the feed-only opener.
8. The method of controlling the stocker apparatus according to claim 1 , wherein the racks further include a post-treatment storage rack for keeping a FOUP having collected treated substrates, the method further comprising the control device controlling the transport mechanism, wherein:
the transport mechanism transports the FOUP having collected the treated substrates and placed on the collect-only opener to the outgoing rack only when no FOUP is present on the outgoing rack, and
when the FOUP having collected the treated substrates is unable to be transported to the outgoing rack because of a FOUP present on the outgoing rack, the transport mechanism transports the FOUP having collected the treated substrates to the post-treatment storage rack; and then transports to the outgoing rack the FOUP having collected the treated substrates and transported to the post-treatment storage rack, when the outgoing rack is vacant.
9. The method of controlling the stocker apparatus according to claim 8 , wherein:
the step of transporting the FOUP having collected the treated substrates and placed on the collect-only opener to one of the outgoing rack and the post-treatment storage rack is executed to determine whether a different FOUP is present on the outgoing rack; and
the step of transporting to the outgoing rack the FOUP having collected the treated substrates and transported to the post-treatment storage rack is executed to determine whether the outgoing rack is vacant.
10. The method of controlling the stocker apparatus according to claim 8 , wherein the FOUP having collected the treated substrates, when unable to be transported to the outgoing rack, is transported directly to the post-treatment storage rack among the incoming rack, the mid-treatment storage rack, the post-treatment storage rack and the feed-only opener.
11. The method of controlling the stocker apparatus according to claim 1 , wherein:
the step of transporting the empty FOUP on the feed-only opener to one of the collect-only opener and the mid-treatment storage rack is executed to determine whether a different FOUP is present on the collect-only opener; and
the step of transporting to the collect-only opener the empty FOUP transported to the mid-treatment storage rack is executed to determine whether the collect-only opener is vacant.
12. The method of controlling the stocker apparatus according to claim 1 , wherein the empty FOUP, when unable to be transported to the collect-only opener, is transported directly to the mid-treatment storage rack among the incoming rack, the outgoing rack and the mid-treatment storage rack.
13. The method of controlling the stocker apparatus according to claim 1 , wherein
the transport mechanism transports the empty FOUP to the collect-only opener before the substrates having received a predetermined treatment with the substrate treating apparatus main body are sent out from the substrate treating apparatus main body.
14. A method of controlling a substrate treating apparatus having a single substrate type substrate treating apparatus main body for performing a predetermined treatment of substrates, and a stocker apparatus connected to the substrate treating apparatus main body, for improved handling of empty FOUPs,
the stocker apparatus having:
openers for receiving FOUPs acting as containers each for storing a plurality of substrates, to feed and collect the substrates to and from the single substrate type substrate treating apparatus main body, the openers including a feed-only opener for feeding the substrates, and a collect-only opener for collecting the substrates,
a transport mechanism for holding and transporting the FOUPs,
a control device for controlling at least the FOUP transport mechanism, and
racks arranged above the openers for receiving the FOUPs, the racks including an incoming rack for receiving the FOUPs from an external transport device, an outgoing rack for delivering the FOUPs to the external transport device, and a mid-treatment storage rack for keeping an empty FOUP after the substrates are fed therefrom,
said method comprising using the control device for controlling the transport mechanism, wherein:
when the substrates have been emptied from a FOUP at the feed-only opener, then the transport mechanism transports the empty FOUP from the feed-only opener to the collect-only opener, only when no FOUP is present on the collect-only opener, and
when the empty FOUP is not transported to the collect-only opener because of a FOUP present on the collect-only opener, the transport mechanism transports the empty FOUP to the mid-treatment storage rack; and then transports the empty FOUP to the collect-only opener from the mid-treatment storage rack when the collect-only opener has become vacant, and
after the transport mechanism has transported the empty FOUP to the collect-only opener, the treated substrates are then collected back into the FOUP.
15. The method of controlling the substrate treating apparatus according to claim 14 , wherein:
the step of transporting the empty FOUP on the feed-only opener to one of the collect-only opener and the mid-treatment storage rack is executed to determine whether a different FOUP is present on the collect-only opener; and
the step of transporting to the collect-only opener the empty FOUP transported to the mid-treatment storage rack is executed to determine whether the collect-only opener is vacant.
16. The method of controlling the substrate treating apparatus according to claim 14 , wherein the empty FOUP, when unable to be transported to the collect-only opener, is transported directly to the mid-treatment storage rack among the incoming rack, the outgoing rack and the mid-treatment storage rack.
17. The method of controlling the substrate treating apparatus according to claim 14 , wherein
the transport mechanism transports the empty FOUP to the collect-only opener before the substrates having received a predetermined treatment with the substrate treating apparatus main body are sent out from the substrate treating apparatus main body.
18. The method of controlling the substrate treating apparatus according to claim 14 , wherein
the substrate treating apparatus main body includes an indexer mechanism configured to feed the substrates from the FOUP and collect the substrates into the empty FOUP, the control device of the substrate treating apparatus controls the transport mechanism and the indexer mechanism, and
the control device controls the indexer mechanism to feed the substrate from the FOUP to the substrate treating apparatus main body, such feeding being via the feed-only opener, and to collect the substrates into the empty FOUP from the substrate treating apparatus main body, such collecting being via the collect-only opener.
19. The method of controlling the substrate treating apparatus according to claim 14 , wherein
the substrate treating apparatus main body includes an indexer mechanism configured to feed the substrates from the FOUP and collect the substrates into the empty FOUP,
the control device of the substrate treating apparatus controls the transport mechanism and the indexer mechanism, and
the control device controls the indexer mechanism so that when the substrates are to be fed from the FOUP to the substrate treating apparatus main body, they are fed via the feed-only opener, and when the substrates are to be collected into the empty FOUP from the substrate treating apparatus main body, they are collected via the collect-only opener.