Defect etching of germanium
View Patent ↗The present invention provides an etching solution for revealing defects in a germanium layer, a method for revealing defects in a germanium layer using such an etching solution and to a method for making such an etching solution. The etching solution according to embodiments of the present invention is able to exhibit an etch rate of between 4 nm·min −1 and 450 nm·min −1 , which makes it suitable to be used for revealing defects in a thin layer of germanium, i.e. in a layer of germanium with a thickness of between 20 nm and 10 μm, for example between 20 nm and 2 μm, between 20 nm and 1 μm or between 20 nm and 200 nm.
1. A method for revealing defects in a germanium layer or a III-V semiconductor layer, the method comprising immersing a substrate comprising the germanium layer or the III-V semiconductor layer in an etching solution consisting essentially of
(i) a Ce 4 ′ oxidizing agent or a MnO4 − oxidizing agent; and
(ii) a solvent.
2. The method of claim 1 , wherein the germanium layer or the III-V semiconductor layer has a thickness between 20 nm and 2 μm.
3. The method of claim 1 , wherein the etching solution exhibits an etch rate of between 4 nm/min and 450 nm/min.
4. The method of claim 3 , wherein the etching solution exhibits an etch rate between 4 nm/min and 200 nm/min.
5. The method of claim 1 , wherein immersing the substrate comprising the germanium layer in the etching solution is for between 1.5 minutes and 10 minutes.
6. The method of claim 1 , wherein the solvent is water.
7. The method of claim 1 , wherein the etching solution consists essentially of the Ce 4+ oxidizing agent and the solvent.
8. The method of claim 7 , wherein Ce 4+ oxidizing agent is present in a concentration of between 0.01 mol/L and 1 mol/L.
9. The method of claim 8 , wherein Ce 4+ oxidizing agent concentration is less than 0.4 mol/L.
10. The method of claim 1 , wherein the etching solution consists essentially of the MnO4 − oxidizing agent and the solvent.
11. The method of claim 10 , wherein the MnO4 − oxidizing agent is present in a concentration of between 0.01 mol·L −1 and 0.6 mol·L −1 .
12. The method of claim 1 , wherein the substrate comprises a germanium layer.
13. The method of claim 1 , wherein the substrate comprises a III-V semiconductor layer.
14. The method of claim 13 , wherein the III-V semiconductor layer comprises GaAs, InP, GaInAs, or GaInP.
15. The method of claim 1 wherein the etching solution consists essentially of the solvent and a Ce 4+ oxidizing agent selected from the group consisting of cerium ammonium nitrate ((NH 4 ) 2 Ce(NO 3 ) 6 ), ammonium cerium sulphate (Ce(NH 4 ) 4 (SO 4 ) 4 ) and cerium sulphate (Ce( 8 O 4 ) 2 ).
16. The method of claim 1 wherein the etching solution consists essentially of the solvent and a MnO 4 − oxidizing agent selected from the group consisting of potassium permanganate, magnesium permanganate, sodium permanganate and cesium permanganate.