Abrasive article with array of composite polishing pads
A polishing article with a plurality of polishing pads adapted to polish a substrate. Gimbal structures are attached to the polishing pads that permit the polishing pads to move independently along at least a pitch axis and a roll axis. Stems supported by preload flexures apply preloads through dimple structures to the polishing pads. A plurality of stand-offs provide fixed boundary conditions between the preload and the gimbal structures. Recesses allow for the preload flexures to move vertically.
1. A polishing assembly for use with a polishing pad to polish a substrate, the polishing assembly comprising:
a plurality of pivoting flexures with flexibility in a direction transverse to a plane defined by the substrate;
a plurality of polishing elements each attached via preload member to the pivoting flexures applying a desired pressure in the transverse direction with respect to the polishing pad in order to contact and polish the substrate, the pivoting flexures permitting the polishing elements to move independently along at least a pitch and roll axis;
a recess that allows for displacement of the preload member relative to the pivoting flexures; and
a plurality of stand-offs that provide fixed boundary conditions between the preload member and the pivoting flexures.
2. A polishing article adapted to polish a substrate, the polishing article comprising:
a plurality of polishing pads;
pivoting flexures attached to the polishing pads adapted to permit the polishing pads to move independently along at least a pitch axis and a roll axis;
preload members supported by preload structure, the preload members positioned to apply preloads through dimple structures to the polishing pads;
a plurality of stand-offs that provide fixed boundary conditions between the preload and the pivoting flexure structures; and
recesses that allows for the preload structure to move vertically.
3. The polishing article of claim 2 wherein the pivoting flexure comprise one of a gimbal mechanism, an elastomeric material, a polymeric film with a plurality of areas of weakness bonded to the abrasive members, or a combination thereof.
4. The polishing article of claim 2 comprising abrasive features located at an interface of the polishing pads and the substrate, the abrasive features polishing the substrate during motion of the polishing article relative to the substrate.
5. The polishing article of claim 4 wherein the abrasive features comprise one or more of an abrasive material attached to the polishing pads, a slurry of free abrasive particles located at the interface with the substrate, or a combination thereof.
6. The polishing article of claim 2 wherein the polishing pads comprise an array of polishing pads, the array comprising a circular array, a rectangular array, an off-set pattern, or a random pattern.
7. The polishing article of claim 2 wherein the polishing pads comprise one or more fluid bearing features configured to generate lift forces during motion of the polishing article relative to the substrate.
8. The polishing pad of claim 7 wherein the fluid bearing features comprise abrasive composites.
9. The polishing article of claim 7 wherein the lift force comprises one of aerodynamic lift or hydrodynamic lift.
10. The polishing article of claim 2 wherein the polishing pads comprise at least one of topography following or topography removing.
11. The polishing pad of claim 2 wherein the preload structure comprise spring members.
12. A polishing pad, comprising:
a plurality of pivoting flexures with flexibility in a direction transverse to a plane defined by a polishing plane;
a plurality of polishing elements each attached via preload members to a the pivoting flexures applying a desired pressure in the transverse direction with respect to the polishing pad in order to contact and polish a workpiece, the pivoting flexures permitting the polishing elements to move independently along at least a pitch and roll axis;
a recess that allows for displacement of the preload member; and
a plurality of stand-offs that provide fixed boundary conditions between the preload member and the pivoting flexures.