Method of manufacturing organic light emitting display apparatus, and organic light emitting display apparatus manufactured by using the method
View Patent ↗A method of manufacturing an organic light emitting display device and an organic light emitting display device manufactured using the method, which are suitable for manufacturing large-sized display devices on a mass scale and can be used for high-definition patterning. The method includes consecutively forming organic layers on a substrate on which a plurality of panels are arranged parallel to each other; forming a second electrode on the organic layers, for each of the panels; forming a passivation layer on the second electrode on each of the panels to cover the second electrode; and removing a part of the organic layers that exists between the passivation layer on the second electrode of one of the panels and the passivation layer on the second electrode of an adjacent one of the panels.
1. A method of manufacturing an organic light emitting display device, the method comprising:
consecutively forming organic layers on a substrate on which a plurality of panels are arranged side by side;
forming a second electrode on the organic layers, for each of the panels;
forming a passivation layer on the second electrode on each of the panels to cover the second electrode, the organic layers between the panels being exposed between the passivation layers on respective said panels; and
removing a part of the organic layers that exists between the passivation layer on the second electrode of one of the panels and the passivation layer on the second electrode of an adjacent one of the panels,
wherein the passivation layer is larger than the second electrode so as to completely cover the second electrode.
2. The method of claim 1 , wherein the removing of the part of the organic layers comprises removing the part of the organic layers that exists in a region where the passivation layer is not fanned, by using the passivation layer as a mask.
3. The method of claim 1 , wherein the removing of the part of the organic layers comprises removing the part of the organic layers by performing chemical etching in which plasma comprising oxygen is used.
4. The method of claim 1 , wherein each of the panels comprises a circuit region and a pixel region, and the second electrode and the passivation layer are formed in the pixel region.
5. The method of claim 4 , wherein the removing of the part of the organic layers comprises removing an organic material deposited in the circuit region.
6. The method of claim 1 , wherein the passivation layer comprises Alq3(Tris(8-hydroxyquinolinato)aluminum).
7. The method of claim 1 , wherein during the consecutive forming of the organic layers, an organic layer deposition apparatus is spaced from the substrate, and deposition is performed on the substrate while the substrate and the organic layer deposition apparatus are moving relative to each other, wherein the organic layer deposition apparatus comprises a deposition source for emitting a deposition material, a deposition source nozzle unit located at a side of the deposition source and comprising a plurality of deposition source nozzles arranged in a first direction, a patterning slit sheet located opposite to the deposition source nozzle unit and comprising a plurality of patterning slits arranged in the first direction, and a barrier plate assembly comprising a plurality of barrier plates that are arranged in the first direction between the deposition source nozzle unit and the patterning slit sheet and that partition the space between the deposition source nozzle unit and the patterning slit sheet into a plurality of sub-deposition spaces.
8. The method of claim 7 , wherein each of the plurality of barrier plates extends in a second direction that is substantially perpendicular to the first direction, in order to partition the space between the deposition source nozzle unit and the patterning slit sheet into the plurality of sub-deposition spaces.
9. The method of claim 7 , wherein the barrier plate assembly comprises a first barrier plate assembly comprising a plurality of first barrier plates, and a second barrier plate assembly comprising a plurality of second barrier plates.
10. The method of claim 9 , wherein each of the first barrier plates and. each of the second barrier plates extend in a second direction that is substantially perpendicular to the first direction, in order to partition the space between the deposition source nozzle unit and the patterning slit sheet into the plurality of sub-deposition spaces.
11. The method of claim 7 , wherein the patterning slit sheet of the organic layer deposition apparatus is smaller than the substrate.
12. The method of claim 1 , wherein an organic layer deposition apparatus is separated from the substrate, and deposition is performed on the substrate while the substrate and the organic layer deposition apparatus are moving relative to each other, wherein the organic layer deposition apparatus comprises a deposition source for emitting a deposition material, a deposition source nozzle unit located at a side of the deposition source and comprising a plurality of deposition source nozzles arranged in a first direction, and a patterning slit sheet located opposite to the deposition source nozzle unit and comprising a plurality of patterning slits arranged in a second direction that is substantially perpendicular to the first direction.
13. The method of claim 12 , wherein the plurality of deposition source nozzles tilt at an angle.
14. The method of claim 13 , wherein the plurality of deposition source nozzles comprises deposition source nozzles arranged in two rows formed in the first direction, and the deposition source nozzles in the two rows are tilted to face each other.
15. The method of claim 13 , wherein:
the plurality of deposition source nozzles comprises deposition source nozzles arranged in two rows formed in the first direction;
the deposition source nozzles of one of the rows located at a second side of the patterning slit sheet are arranged to face a first side of the patterning slit sheet; and
the deposition source nozzles of another one of the rows located at the first side of the patterning slit sheet are arranged to face the second side of the patterning slit sheet.
16. The method of claim 12 , wherein the patterning slit sheet of the organic layer deposition apparatus is smaller than the substrate.
17. A method of manufacturing an organic light-emitting display device by using an organic layer deposition apparatus for forming an organic layer on a substrate, the method comprising:
arranging the substrate to be spaced from the organic layer deposition apparatus;
depositing a deposition material discharged from the organic layer deposition apparatus onto the substrate to form an organic layer while the organic layer deposition apparatus and the substrate are moved relative to each other;
forming a plurality of second electrodes on the organic layer so that the second electrodes are separated from each other;
forming a passivation layer on each of the second electrodes to cover each of the second electrodes; and
removing a part of the organic layer that exists between the second electrodes that are separated from each other.
18. The method of claim 17 , wherein the removing of the part of the organic layer between the second electrodes comprises removing the part of the organic layer that exists in a region where the passivation layer is not formed, by using the passivation layer as a mask.
19. The method of claim 17 , wherein the removing of the part of the organic layer between the second electrodes comprises removing the part of the organic layer by performing chemical etching in which plasma comprising oxygen is used.
20. The method of claim 17 , wherein the passivation layer comprises Alq3(Tris(8-hydroxyquinolinato)aluminum).
21. The method of claim 17 , wherein the passivation layer is larger than a corresponding one of the second electrodes so as to completely cover the corresponding one of the second electrodes.