Oxide semiconductor thin film transistor with an aluminum oxide protective film made using a continuous deposition process of aluminum oxide laminated with an aluminum film
View Patent ↗Disclosed herein is a method of manufacturing a thin film transistor having a structure that a gate electrode and an oxide semiconductor layer are disposed with a gate insulating film interposed between the gate electrode and the oxide semiconductor layer, and a source/drain electrode is electrically connected to the oxide semiconductor layer, the method including: continuously depositing an aluminum oxide (Al 2 O 3 ) layer as a protective film and an aluminum (Al) layer in this order on any of the source/drain electrode, the gate insulating film, and the oxide semiconductor layer by using sputtering.
1. A method of manufacturing a thin film transistor having a gate insulating film interposed between a gate electrode and an oxide semiconductor layer, and a source/drain electrode layer electrically connected to the oxide semiconductor layer, the method comprising:
forming the gate electrode on a substrate;
forming the oxide semiconductor layer on the gate insulating film;
forming the source/drain electrode layer on the oxide semiconductor layer;
after forming the source/drain electrode layer, forming a protective film, utilizing a sputtering method, on one or more of the source/drain electrode layer, the gate insulating film, and the oxide semiconductor layer, wherein the protective film is formed by continuously depositing an aluminum oxide layer on the one or more of the source/drain electrode layer, the gate insulating film, and the oxide semiconductor layer, and continuously depositing an aluminum layer on the aluminum oxide layer and selectively removing at least a portion of the aluminum layer.
2. The method of manufacturing the thin film transistor according to claim 1 , wherein after the aluminum deposited on the aluminum oxide layer is selectively removed, another oxide aluminum layer having a lower oxygen concentration than that of the aluminum oxide layer remains on the aluminum oxide layer.
3. The method of manufacturing the thin film transistor according to claim 1 , wherein
the sputtering method is performed in an ambient containing therein oxygen by using aluminum as a target material when the oxide aluminum layer is deposited; and
the sputtering is performed in an ambient containing therein no oxygen by using the target material used in depositing the aluminum oxide layer when the aluminum layer is deposited.
4. A method of manufacturing a thin film transistor having a gate insulating film interposed between a gate electrode and an oxide semiconductor layer, and a source/drain electrode layer electrically connected to the oxide semiconductor layer, the method comprising:
forming a protective film, utilizing a sputtering method, on one or more of the source/drain electrode layer, the gate insulating film, and the oxide semiconductor layer, wherein the protective film is formed by continuously depositing an aluminum oxide layer on the one or more of the source/drain electrode layer, the gate insulating film, and the oxide semiconductor layer, and continuously depositing an aluminum layer on the aluminum oxide layer,
wherein the sputtering method is performed in an ambient containing therein oxygen by using aluminum as a target material when the aluminum oxide layer is deposited, and
the sputtering method is performed in an ambient containing therein no oxygen by using the target material used in depositing the aluminum oxide layer when the aluminum layer is deposited.
5. The method of manufacturing the thin film transistor according to claim 4 , further comprising:
selectively removing at least a portion of the aluminum layer.
6. The method of manufacturing the thin film transistor according to claim 4 , further comprising removing at least a portion of the aluminum layer deposited on the aluminum oxide layer.
7. The method of manufacturing the thin film transistor according to claim 4 , wherein after a portion of the aluminum deposited on the aluminum oxide layer is removed, another oxide aluminum layer having a lower oxygen concentration than that of the aluminum oxide layer remains on the aluminum oxide layer.
8. A method of manufacturing a thin film transistor having a gate insulating film between a gate electrode and an oxide semiconductor layer, and a source/drain electrode layer electrically connected to the oxide semiconductor layer, the method comprising:
forming the oxide semiconductor layer on a substrate;
forming the gate insulating film on at least a portion of the oxide semiconductor layer;
after forming the gate insulating film, forming a protective film, utilizing a sputtering method, on one or more of the gate insulating film and the oxide semiconductor layer, wherein the protective film is formed by continuously depositing an aluminum oxide layer on the one or more of the gate insulating film and the oxide semiconductor layer, and continuously depositing an aluminum layer on the aluminum oxide layer, wherein the sputtering method is performed in an ambient containing therein oxygen by using aluminum as a target material when the aluminum oxide layer is deposited, and the sputtering method is performed in an ambient containing therein no oxygen by using the target material used in depositing the aluminum oxide layer when the aluminum layer is deposited;
forming an interlayer insulating film on the aluminum layer; and
forming the source/drain electrode on the interlayer insulating film.