Exposure device, photo-mask, and method for manufacturing liquid crystal display
View Patent ↗The present invention is directed to an exposure apparatus and photo-mask, and method for manufacturing liquid crystal display using the same. An exposure apparatus according to an exemplary embodiment of the present invention provides an exposure apparatus which includes: a first photo-mask comprising a plurality of transmission parts; and a second photo-mask comprising a plurality of transmission parts, the first photo-mask and the second photo-mask comprising an overlapping region where the first photo-mask and the second photo-mask are partially overlapped, wherein at least one transmission part included in at least one of the first photo-mask and the second photo-mask in the overlapping region comprises a semi-transmission section, and a transmittance of the semi-transmission section is greater than or equal to 0% and less than 100%.
1. An exposure apparatus, comprising:
a first photo-mask comprising a light blocking layer and transmission parts disposed in the light blocking layer and through which light is transmitted, the transmission parts being arranged in a first direction and separated from each other; and
a second photo-mask comprising a light blocking layer and transmission parts disposed in the light blocking layer and through which light is transmitted, the transmission parts being arranged in the first direction and separated from each other, the first photo-mask and the second photo-mask comprising an overlapping region where a plurality of the transmission parts of each of the first photo-mask and the second photo-mask are overlapped with each other,
wherein:
the overlapped transmission parts comprise semi-transmission sections each comprising a semi-transmission layer; and
a ratio of an area occupied by the semi-transmission section in each of the overlapped transmission parts is gradually increased or decreased for different transmission parts along the first direction.
2. The exposure apparatus of claim 1 , wherein an irradiation region of a transmission part of the first photo-mask and an irradiation region of a transmission part of the second photo-mask are overlapped in the overlapping region.
3. The exposure apparatus of claim 2 , wherein a sum of effective transmittances of the overlapping transmission parts is 70-120% of an effective transmittance of a transmission part outside the overlapping region.
4. The exposure apparatus of claim 3 , wherein the ratio of the area occupied by the semi-transmission section of each of the overlapped transmission parts is in a range of 0 to 100%.
5. The exposure apparatus of claim 3 , wherein lengths of the overlapped transmission parts gradually decrease or increase along the first direction.
6. The exposure apparatus of claim 5 , wherein
a transmittance of the semi-transmission section in at least one transmission part in the overlapping region is constant along the first direction.
7. The exposure apparatus of claim 5 , wherein
a transmittance of the semi-transmission section in at least one transmission part in the overlapping region is gradually decreased or increased along the first direction.
8. The exposure apparatus of claim 1 , wherein the overlapped transmission parts each further comprise a full transmission section having a transmittance of about 100%.
9. The exposure apparatus of claim 1 , wherein at least one of the first photo-mask and the second photo-mask further comprises a substrate upon which the blocking layer and the semi-transmission layers are disposed.
10. An exposure apparatus, comprising:
a first photo-mask comprising a light blocking layer and transmission parts disposed in the light blocking layer and through which light is transmitted, the transmission parts being arranged in a first direction and separated from each other; and
a second photo-mask comprising a light blocking layer and transmission parts disposed in the light blocking layer and through which light is transmitted, the transmission parts being arranged in the first direction and separated from each other, the first photo-mask and the second photo-mask comprising an overlapping region where a plurality of the transmission parts of each of the first photo-mask and the second photo-mask are overlapped with each other,
wherein:
the overlapped transmission parts comprise semi-transmission sections each comprising a semi-transmission layer;
the overlapped transmission parts each is totally occupied by the semi-transmission section; and
a transmittance of the semi-transmission layer in each of the overlapped transmission parts gradually increases or decreases for different transmission parts along the first direction.
11. The exposure apparatus of claim 10 , wherein the transmittance of at least one of the semi-transmission sections is 50%.
12. An exposure apparatus, comprising:
a first photo-mask comprising a light blocking layer and transmission parts disposed in the light blocking layer and through which light is transmitted, the transmission parts being arranged in a first direction and separated from each other; and
a second photo-mask comprising a light blocking layer and transmission parts disposed in the light blocking layer and through which light is transmitted, the transmission parts being arranged in the first direction and separated from each other, the first photo-mask and the second photo-mask comprising an overlapping region where a plurality of the transmission parts of each of the first photo-mask and the second photo-mask are overlapped with each other,
wherein:
the overlapped transmission parts comprise semi-transmission sections each comprising a semi-transmission layer;
the overlapped transmission parts each is totally occupied by the semi-transmission section; and
lengths of the overlapped transmission parts gradually decrease or increase along the first direction.
13. The exposure apparatus of claim 12 , wherein
a transmittance of the semi-transmission section in at least one transmission part in the overlapping region is constant along the first direction.
14. A method for manufacturing a liquid crystal display with an exposure apparatus having a first photo-mask and a second photo-mask, the method comprising:
coating an alignment layer comprising a photo-reactive alignment material on a substrate; and
irradiating light to the alignment layer through the first photo-mask and the second photo-mask,
wherein:
the first photo-mask comprises a light blocking layer and transmission parts disposed in the light blocking layer and through which light is transmitted, the transmission parts being arranged in a first direction and separated from each other; and
the second photo-mask comprises a light blocking layer and transmission parts disposed in the light blocking layer and through which light is transmitted, the transmission parts being arranged in the first direction and separated from each other, the first photo-mask and the second photo-mask comprising an overlapping region where a plurality of the transmission parts of each of the first photo-mask and the second photo-mask are overlapped with each other,
wherein:
the overlapped transmission parts comprise semi-transmission sections each comprising a semi-transmission layer; and
a ratio of an area occupied by the semi-transmission section in each of the overlapped transmission parts is gradually increased or decreased for different transmission parts along the first direction.
15. A method for manufacturing a liquid crystal display with an exposure apparatus having a first photo-mask and a second photo-mask, the method comprising:
coating an alignment layer comprising a photo-reactive alignment material on a substrate; and
irradiating a first light beam and a second light beam, having different irradiation directions from each other, through the transmission parts of the first portion and the transmission parts of the second portion onto the alignment layer, respectively,
wherein:
the first photo-mask comprises a light blocking layer and transmission parts disposed in the light blocking layer and through which light is transmitted, the transmission parts being arranged in a first direction and separated from each other; and
the second photo-mask comprises a light blocking layer and transmission parts disposed in the light blocking layer and through which light is transmitted, the transmission parts being arranged in the first direction and separated from each other, the first photo-mask and the second photo-mask comprising an overlapping region where a plurality of the transmission parts of each of the first photo-mask and the second photo-mask are overlapped with each other,
wherein:
the overlapped transmission parts comprise semi-transmission sections each comprising a semi-transmission layer;
the overlapped transmission parts each is totally occupied by the semi-transmission section; and
a transmittance of the semi-transmission layer in each of the overlapped transmission parts gradually increases or decreases for different transmission parts along the first direction.