Method of manufacturing semiconductor light emitting device
View Patent ↗There is provided a method of manufacturing a semiconductor light emitting device, the method including: forming a light emitting structure by sequentially growing an n-type nitride semiconductor layer, an active layer, and a p-type nitride semiconductor layer on a substrate; forming a transparent electrode on the p-type nitride semiconductor layer through a sputtering process; and forming a nitrogen gas atmosphere in an interior of a reaction chamber in which the sputtering process is performed, prior to or during the sputtering process. In the case of the semiconductor light emitting device obtained according to embodiments of the invention, a deterioration phenomenon in electrode characteristics caused due to a nitrogen vacancy may be minimized in manufacturing a transparent electrode through a sputtering process to thereby allow for the provision of a transparent electrode having significantly improved electrical characteristics.
1. A method of manufacturing a semiconductor light emitting device, the method comprising:
forming a light emitting structure by sequentially growing an n-type nitride semiconductor layer, an active layer, and a p-type nitride semiconductor layer on a substrate;
forming a transparent electrode on the p-type nitride semiconductor layer through a sputtering process; and
forming a nitrogen gas atmosphere in an interior of a reaction chamber in which the sputtering process is performed, prior to or during the sputtering process,
wherein the transparent electrode includes a first part thereof formed in the nitrogen gas atmosphere and a second part thereof formed in a state in which a supply of nitrogen gas is interrupted.
2. The method of claim 1 , wherein the transparent electrode is made of a transparent conductive oxide.
3. The method of claim 1 , wherein nitrogen particles are emitted from the p-type nitride semiconductor layer during the sputtering process, such that a nitrogen vacancy is generated in the p-type nitride semiconductor layer.
4. The method of claim 3 , wherein nitrogen gas in the interior of the reaction chamber fills the nitrogen vacancy.
5. The method of claim 1 , wherein in the transparent electrode, after the first part thereof is formed in the nitrogen gas atmosphere, the second part thereof is formed in the state in which a supply of nitrogen gas is interrupted.
6. The method of claim 5 , wherein after the transparent electrode entirely covers an upper surface of the p-type nitride semiconductor layer, the supply of nitrogen gas to the interior of the reaction chamber is interrupted.
7. The method of claim 1 , wherein the p-type nitride semiconductor layer is formed of p-type GaN.
8. The method of claim 1 , further comprising:
exposing a portion of the n-type nitride semiconductor layer by removing a part of the light emitting structure;
forming a first electrode on the n-type nitride semiconductor layer having the exposed portion; and
forming a second electrode on the transparent electrode.
9. The method of claim 1 , further comprising:
forming a transparent electrode on the n-type nitride semiconductor layer.
10. The method of claim 9 , wherein the transparent electrode formed on the n-type nitride semiconductor layer is formed through a sputtering process.
11. The method of claim 10 , wherein after the sputtering process, an area of the n-type nitride semiconductor layer disposed under the transparent electrode has a nitrogen vacancy concentration higher than that of other areas thereof.
12. The method of claim 9 , further comprising forming an n-type electrode and a p-type electrode on upper portions of the transparent electrodes formed on the n-type and p-type nitride semiconductor layers, respectively.
13. The method of claim 12 , wherein the n-type and p-type electrodes are made of a material including aluminum (Al).
14. The method of claim 12 , wherein the n-type and p-type electrodes are made of the same material.
15. The method of claim 12 , wherein the n-type and p-type electrodes are simultaneously formed.