IP Library Granted Patent US 8,816,319
Granted Patent B1
US 8,816,319 · App. 13/288,268 · Granted Aug 26, 2014

Method of strain engineering and related optical device using a gallium and nitrogen containing active region

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Quick Facts
Patent No.
US 8,816,319
App. No.
13/288,268
Granted
Aug 26, 2014
Kind
B1
Abstract

An optical device has a gallium and nitrogen containing substrate including a surface region and a strain control region, the strain control region being configured to maintain a quantum well region within a predetermined strain state. The device also has a plurality of quantum well regions overlying the strain control region.

Claims (42)

1. An optical device comprising:

a gallium and nitrogen containing substrate including a surface region and a first lattice constant;

a strained region overlying the surface region, the strained region having a second lattice constant, the second lattice constant being larger than the first lattice constant;

a strain control region having a third lattice constant, the third lattice constant being substantially equivalent to the second lattice constant, the strain control region being configured to maintain at least a quantum well region within a predetermined strain state;

an optical confinement region overlying the strain control region; and

a plurality of quantum well regions overlying the optical confinement region, each of the plurality of quantum well regions having a fourth lattice constant, the fourth lattice constant being substantially equivalent to the second lattice constant, whereupon the strain control region has a higher bandgap than the strained region and the quantum well regions.

2. The device of claim 1 wherein:

the strained region is highly strained and functions as an optical confinement layer;

the optical device comprises one of a light emitting diode and a laser device;

the strained region comprises an interface region between the substrate and the stain control region; and

the interface region comprises a plurality of dislocations configured within at least one location of the interface region to relieve strain within the strained region.

3. The device of claim 1 wherein the strained region functions as an optical confinement region.

4. The device of claim 1 wherein:

the surface region is configured in a non-polar orientation or a {20-21} semi-polar orientation;

each of the first lattice constant, the second lattice constant, and the third lattice constant are parallel to a projection of a c-direction;

the first lattice constant and the second lattice constant are characterized by first tilt angle and a second tilt angle different from each other by more than 0.5 degrees.

5. The device of claim 1 wherein the surface region is configured to be in an off-set of a {20-21} orientation and wherein the strained region is at least partially relaxed.

6. The device of claim 1 wherein the plurality of quantum well regions comprises 3 to 7 quantum wells, each of the quantum wells comprising substantially InGaN; and wherein the plurality of quantum well regions range in thickness from 2 nm to 8 nm.

7. The device of claim 1 further comprising:

at least one barrier region sandwiched between a pair of quantum well regions;

each of the barrier regions comprising GaN, InGaN, AlGaN, or AlInGaN; and

each of the barrier regions ranges in thickness from 1.5 nm to 12 nm.

8. The device of claim 1 wherein:

the strained region comprises a low Al content InAlGaN;

the strained region has a thickness ranging from about 40 to about 80 nm with about 12 to about 16% indium content;

the strained region has a thickness ranging from about 70 to about 500 nm with about 8 to about 25% indium content; and

the strained region is doped with an n-type species of at least one of Si or Mg.

9. The device of claim 1 wherein the strain control region comprises GaN, AlGaN, InAlGaN, or low indium content InGaN.

10. The device of claim 1 wherein the strain control region maintains a strain budget within a predetermined range selected to maintain the plurality of quantum wells substantially free from a defect threshold.

11. The device of claim 1 wherein the optical confinement region between the strain control region and the plurality of quantum wells is an SCH region comprised of InGaN or low Al content InAlGaN with a thickness ranging from 10 nm to 100 nm and an indium content ranging from 1% to about 10%.

12. The device of claim 1 wherein the plurality of quantum wells are operable for an emission in a 510 to 550 nm range.

13. The device of claim 1 wherein the plurality of quantum wells are operable for an emission in a 430 to 480 nm range.

14. The device of claim 1 further comprising a strain budget of Q characterizing a cumulative strain characteristic associated with an entire growth structure including at least the plurality of quantum well regions and a contribution from the strain control region; whereupon the strain budget Q is greater than a total strain associated with the entire growth structure excluding the contribution from the strain control region.

15. The device of claim 1 wherein the strain control region is configured to maintain a entire growth structure including the plurality of quantum well regions below a defect threshold, the defect threshold being an upper level of defects within the plurality of quantum well regions tolerable to maintain a desired photoluminescence level and a desired electroluminescence level, the defect threshold being above the upper level of defects within the plurality of quantum well regions without the strain control region.

16. The device of claim 1 wherein:

the strained region comprises a gallium and nitrogen containing material with InGaN overlying the surface region of the substrate;

the plurality of quantum well regions emit electromagnetic radiation characterized by an optical mode spatially disposed at least partially within the quantum well region; and

the gallium and nitrogen containing material is configured with a thickness and an indium content to manipulate a confinement of the optical mode and configured to absorb a stray and/or leakage of the emission of electromagnetic radiation.

17. The method of claim 1 wherein:

the strained region causes the upper strain budget to be greater than the predetermined strain budget;

the predetermined strain budget maintains the plurality of quantum well regions free from defects; and

the step of determining the upper strain budget is for an entire growth structure including the plurality of quantum well regions.

Assignments (3)
CHANGE OF NAME Recorded Mar 15, 2021
From: SORAA LASER DIODE, INC.
To: KYOCERA SLD LASER, INC.
Reel/Frame 056001/0313 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Apr 23, 2014
From: SORAA, INC.
To: SORAA LASER DIODE, INC.
Reel/Frame 032743/0321 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Nov 21, 2011
From: RARING, JAMES W.; POBLENZ, CHRISTIANE
To: SORAA, INC.
Reel/Frame 027268/0214 →