Method of manufacturing thin film transistor
View Patent ↗A thin film transistor includes a gate electrode, a first insulating layer on the gate electrode, a semiconductor layer on the gate electrode and separated from the gate electrode by the first insulating layer, the semiconductor layer including a channel region corresponding to the gate electrode, a source region, and a drain region, a hydrogen diffusion barrier layer on the semiconductor layer, the hydrogen diffusion barrier layer covering the channel region and exposing the source and drain regions, and a second insulation layer on the source and drain regions and on the hydrogen diffusion barrier layer, such that the hydrogen diffusion barrier layer is between the second insulation layer and the channel region.
1. A method of manufacturing a thin film transistor, comprising:
forming a semiconductor layer having a portion overlying a gate electrode and having extending portions that extend laterally beyond the gate electrode, the gate electrode being insulated from the semiconductor layer;
forming a hydrogen diffusion barrier layer on the portion of the semiconductor layer that overlies the gate electrode, the hydrogen diffusion barrier layer exposing the extending portions of the semiconductor layer;
forming a hydrogen-containing layer on the portion of the semiconductor layer that overlies the gate electrode and on the extending portions of the semiconductor layer; and
processing the hydrogen-containing layer to diffuse hydrogen from the hydrogen-containing layer into the extending portions of the semiconductor layer.
2. The method as claimed in claim 1 , wherein:
the hydrogen-containing layer is an insulating layer having contact holes that expose the extending portions of the semiconductor layer, and
the contact holes are formed in the insulating layer after the insulating layer is processed to diffuse hydrogen into the extending portions of the semiconductor layer.
3. The method as claimed in claim 1 , wherein processing the hydrogen-containing layer to diffuse hydrogen from the hydrogen-containing layer into the extending portions of the semiconductor layer results in a concentration of hydrogen atoms in the extending portions that is larger than a concentration of hydrogen atoms in the portion overlying the gate electrode.
4. The method as claimed in claim 3 , wherein the semiconductor layer includes an oxygen-containing compound semiconductor.
5. The method as claimed in claim 1 , wherein the hydrogen diffusion barrier layer includes one or more of a nitride, a carbide, or a ternary compound having a metal as a component thereof.
6. The method as claimed in claim 5 , wherein the hydrogen diffusion barrier layer includes one or more of: titanium nitride, tantalum nitride, tungsten nitride, titanium carbide, tantalum carbide, a ternary compound of titanium, silicon, and nitrogen, a ternary compound of tantalum, silicon, and nitrogen, or a ternary compound of tungsten, boron, and nitrogen.
7. The method as claimed in claim 1 , wherein processing the hydrogen-containing layer to diffuse hydrogen from the hydrogen-containing layer into the extending portions of the semiconductor layer includes heat treating.
8. The method as claimed in claim 1 , wherein the hydrogen-containing layer is an insulating layer and the semiconductor layer includes an oxygen-containing compound semiconductor.
9. The method as claimed in claim 8 , wherein the oxygen-containing compound semiconductor is zinc oxide.
10. The method as claimed in claim 8 , wherein the oxygen-containing compound semiconductor includes zinc oxide doped with one or more of gallium, indium, or tin.
11. A method of manufacturing a thin film transistor, comprising:
forming a semiconductor layer on a gate electrode and separated from the gate electrode by a first insulating layer, the semiconductor layer including a channel region corresponding to the gate electrode, a source region, and a drain region;
a hydrogen diffusion barrier layer on the semiconductor layer, the hydrogen diffusion barrier layer covering the channel region and exposing the source and drain regions; and
forming a hydrogen-containing layer on the source and drain regions and on the hydrogen diffusion barrier layer, such that the hydrogen diffusion barrier layer is between the hydrogen-containing layer and the channel region; and
processing the hydrogen-containing layer to diffuse hydrogen from the hydrogen-containing layer into the source and drain regions.
12. The method as claimed in claim 11 , wherein the hydrogen-containing layer is an insulating layer and the semiconductor layer includes an oxygen-containing compound semiconductor.
13. The method as claimed in claim 12 , wherein the oxygen-containing compound semiconductor is zinc oxide.
14. The method as claimed in claim 12 , wherein the oxygen-containing compound semiconductor includes zinc oxide doped with one or more of gallium, indium, or tin.