Integrated antenna device module for generating terahertz continuous wave and fabrication method thereof
View Patent ↗The exemplary embodiments of the present invention include forming a photoconductor thin film on a front surface of a substrate; forming a photoconductor thin film pattern by patterning the photoconductor thin film; and forming a metal electrode on the photoconductor thin film pattern.
1. An integrated antenna device module for generating a terahertz continuous wave, comprising:
a photoconductor thin film pattern directly deposited on a front surface of a substrate to generate a terahertz continuous wave;
a metal electrode formed on the photoconductor thin film pattern to apply DC bias voltage to the photoconductor thin film pattern; and
a focusing meta-material lens formed on a rear surface of the substrate to focus the terahertz continuous wave radiated from the photoconductor thin film pattern.
2. The module of claim 1 , wherein the substrate is a high-resistive silicon substrate or an InP substrate.
3. The module of claim 1 , wherein the photoconductor thin film pattern is a polycrystalline InGaAs thin film.
4. The module of claim 1 , wherein the photoconductor thin film pattern is an ion implanted single crystal InGaAs thin film.
5. The module of claim 1 , further comprising a power improvement antenna formed on the substrate in a ring shape in a radiation direction to shield a surface wave and focus radiation energy.
6. The module of claim 1 , further comprising a focusing alignment meta-material lens spaced apart from the focusing meta-material lens to control a focus of the focusing meta-material lens and obtain a three-dimensional image of an object.
7. The module of claim 6 , further comprising a superhemispheric condenser lens formed on the focusing alignment meta-material lens to obtain directivity characteristics of the terahertz continuous wave radiated from the focusing alignment meta-material lens and the three-dimensional image of the object.
8. The module of claim 7 , wherein the superhemispheric condenser lens is made of high-resistive silicon.
9. The module of claim 8 , further comprising a terahertz wave condenser lens spaced apart from the superhemispheric condenser lens to focus the terahertz continuous wave radiated from the superhemispheric condenser lens.
10. The module of claim 1 , further comprising a horn antenna mounted on the focusing meta-material lens to radiate the terahertz continuous wave of the focusing meta-material lens.
11. The module of claim 1 , further comprising:
a focusing alignment meta-material lens spaced apart from the focusing meta-material lens to control a focus of the focusing meta-material lens, thereby controlling a focus so as to obtain a three-dimensional image of an object; and
a horn antenna mounted on the focusing alignment meta-material lens to radiate the terahertz continuous wave radiated from the focusing alignment meta-material lens.