Chips with high fracture toughness through a metal ring
A microelectronic element is disclosed that includes a semiconductor chip and a continuous monolithic metallic edge-reinforcement ring that covers each of the plurality of edge surfaces of the semiconductor chip and extending onto the front surface. The semiconductor chip may have front and rear opposed surfaces and a plurality of contacts at the front surface and edge surfaces extending between the front and rear surfaces. The semiconductor chip may also embody at least an active device or a passive device.
1. A microelectronic element, comprising:
a semiconductor chip having a front surface, a plurality of contacts at the front surface, an exposed rear surface separated from the front surface by semiconductor material of the chip and by wiring of the chip, and edge surfaces extending between the front and rear surfaces, the semiconductor chip embodying at least one of active devices or passive devices; and
an exposed metallic edge-reinforcement ring covering each of the plurality of edge surfaces, the edge-reinforcement ring defining an outer periphery of the chip.
2. The microelectronic element of claim 1 , wherein the semiconductor chip has at least one defect at least one of the edge surfaces and the edge-reinforcement ring extends into the at least one defect.
3. The microelectronic element of claim 2 , wherein the defect is a crack.
4. The microelectronic element of claim 1 , wherein the edge-reinforcement ring includes at least one metal selected from the group consisting of aluminum, tungsten, nickel, chromium, and copper.
5. A microelectronic package incorporating a microelectronic element as claimed in claim 1 , the microelectronic package having terminals electrically connected with the contacts of the microelectronic element.
6. The microelectronic package of claim 1 , wherein the edge-reinforcement ring extends onto the rear surface.
7. The microelectronic package of claim 1 , wherein an angle between at least one of the edge surfaces and the front surface is greater than 90 degrees.
8. The microelectronic package of claim 1 , wherein an angle between at least one of the edge surfaces and the front surface is less than 90 degrees.
9. A system comprising:
a microelectronic package comprising a substrate and the microelectronic element according to claim 1 , and
one or more other electronic components electrically connected with the microelectronic package.
10. The system as claimed in claim 9 , further comprising a housing, the package and the other electronic components being mounted to the housing.
11. The microelectronic element of claim 1 , wherein the metallic edge-reinforcement ring contacts a semiconductor material within the semiconductor chip.
12. A microelectronic element, comprising:
a semiconductor chip having a front surface, a plurality of contacts at the front surface, an exposed rear surface separated from the front surface by semiconductor material of the chip and by wiring of the chip, and edge surfaces extending between the front and rear surfaces, the semiconductor chip embodying at least one of active devices or passive devices; and
an exposed continuous monolithic metallic edge-reinforcement ring covering each of the plurality of edge surfaces and extending onto the front surface, the edge-reinforcement ring defining an outer periphery of the chip.
13. The microelectronic element of claim 12 , wherein the semiconductor chip has at least one defect at least one of the edge surfaces and the edge-reinforcement ring extends into the at least one defect.
14. The microelectronic element of claim 12 , wherein the edge-reinforcement ring includes at least one metal selected from the group consisting of aluminum, tungsten, nickel, chromium, and copper.
15. A microelectronic package incorporating a microelectronic element as claimed in claim 12 , the microelectronic package having terminals electrically connected with the contacts of the microelectronic element.
16. The microelectronic package of claim 12 , wherein the edge-reinforcement ring extends onto the rear surface.
17. The microelectronic package of claim 12 , wherein an angle between at least one of the edge surfaces and the front surface is greater than 90 degrees.
18. The microelectronic package of claim 12 , wherein an angle between at least one of the edge surfaces and the front surface is less than 90 degrees.
19. The system as claimed in claim 12 , further comprising a housing, the package and the other electronic components being mounted to the housing.
20. The system as claimed in claim 19 , further comprising a housing, the package and the other electronic components being mounted to the housing.
21. A microelectronic element, comprising:
a semiconductor chip having a front surface, a plurality of contacts at the front surface, an exposed rear surface separated from the front surface by semiconductor material of the chip and by wiring of the chip, and edge surfaces extending between the front and rear surfaces, the semiconductor chip embodying at least one of active devices or passive devices;
an exposed metallic edge-reinforcement ring overlying each of the plurality of edge surfaces, the edge-reinforcement ring defining an outer periphery of the chip; and
a dielectric layer separating the edge-reinforcement ring form the plurality of edge surfaces.
22. The microelectronic element of claim 21 , wherein the edge-reinforcement ring overlies the front surface of the chip.
23. The microelectronic element of claim 22 , wherein the edge-reinforcement ring overlies the rear surface of the chip.
24. The microelectronic package of claim 22 , wherein the dielectric layer extends onto the front surface.
25. The microelectronic element of claim 21 , wherein the edge-reinforcement ring includes at least one metal selected from the group consisting of aluminum, tungsten, nickel, chromium, and copper.
26. A microelectronic package incorporating a microelectronic element as claimed in claim 21 , the microelectronic package having terminals electrically connected with the contacts of the microelectronic element.
27. The microelectronic package of claim 21 , wherein the edge-reinforcement ring extends onto the rear surface.
28. The microelectronic package of claim 21 , wherein an angle between at least one of the edge surfaces and the front surface is greater than 90 degrees.
29. The microelectronic package of claim 21 , wherein an angle between at least one of the edge surfaces and the front surface is less than 90 degrees.