Organic light emitting display device and method of fabricating the same
View Patent ↗An organic light emitting display device (OLED) and a method of fabricating the same. The OLED includes: a substrate; a thin film transistor on the substrate and including a source electrode and a drain electrode; a first insulating layer on the substrate; a second insulating layer on the first insulating layer and including a trench; a via hole formed in the trench over the first and second insulating layers and exposing a portion of the source electrode or the drain electrode; a first electrode in the trench and connected to one of the source electrode and the drain electrode through the via hole; a pixel defining layer on the first electrode and having an opening exposing the first electrode; an organic layer in the opening and having at least an organic emission layer; and a second electrode on an entire surface of the substrate having the organic layer.
1. A method of fabricating an OLED, comprising:
forming a thin film transistor comprising source and drain electrodes on a substrate;
forming a first insulating layer on the substrate;
forming a second insulating layer on the first insulating layer;
etching an upper surface of the second insulating layer so as not to expose the first insulating layer, thereby forming a trench in the second insulating layer;
etching the first and second insulating layers to form a via hole extending from a bottom of the trench and exposing a portion of one of the source electrode and the drain electrode;
forming a first electrode in the trench that is connected to the exposed portion of one of the source electrode and the drain electrode though the via hole, the upper surface of the first electrode being disposed at or below a plane of the upper surface of the second insulating layer;
forming a pixel defining layer comprising an opening exposing the first electrode in the trench;
forming an organic layer comprising at least an organic emission layer in the opening; and
forming a second electrode on an entire surface of the substrate comprising the organic layer.
2. The method according to claim 1 , wherein the trench is formed to a depth of ½ to 3/2 the thickness of the first electrode.
3. The method according to claim 1 , wherein the first insulating layer comprises an organic layer.
4. The method according to claim 1 , wherein the second insulating layer comprises an inorganic layer.
5. The method according to claim 1 , wherein forming the pixel defining layer comprises:
forming an inorganic first pixel defining layer comprising an opening on the first electrode; and
forming an organic second pixel defining layer on the first pixel defining layer.
6. The method according to claim 5 , wherein the second pixel defining layer is formed on the first pixel defining layer to fill the via hole and surround an edge of the first electrode and a periphery of the via hole.
7. The method according to claim 5 , wherein the first pixel defining layer is formed to a thickness of 500 to 1000 Å, and the second pixel defining layer is formed to a thickness of 1000 to 3000 Å.
8. The method according to claim 1 , wherein the forming of the organic emission layer comprises a Laser Induced Thermal Imaging (LITI) method.
9. The method according to claim 1 , wherein the forming of the thin film transistor comprises:
depositing a buffer layer on the substrate;
depositing an amorphous silicon layer on the buffer layer,
crystallizing the amorphous silicon layer using Excimer Laser Annealing (ELA), Sequential Lateral Solidification (SLS), Metal Induced Crystallization (MIC) or Metal Induced Lateral Crystallization (MILC); and
patterning the crystallized silicon layer to form a polycrystalline silicon layer.