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App. No. 13/307,341 · Confirmation No. 4663

METHOD OF FORMING ATO WITH HIGH THROUGHPUT AND ELLIPSOMETRY DIAGNOSTIC METHOD FOR THE TCO PROCESS

Abandoned -- Failure to Respond to an Office Action View Publication ↗
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2015-10-19 ABN Abandonment 2 View
2015-04-13 CTFR Final Rejection 11 View
2015-04-13 FWCLM Index of Claims 1 View
2015-04-13 SRFW Search information including classification, databases and other search related notes 1 View
2015-01-23 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2015-01-23 CLM Claims 3 View
2015-01-23 REM Applicant Arguments/Remarks Made in an Amendment 3 View
2015-01-23 N417 Electronic Filing System Acknowledgment Receipt 2 View
2015-01-23 WFEE Fee Worksheet (SB06) 1 View
2014-10-24 CTNF Non-Final Rejection 8 View
2014-10-24 892 List of references cited by examiner 1 View
2014-10-24 FWCLM Index of Claims 1 View
2014-10-24 SRNT Examiner's search strategy and results 1 View
2014-10-24 SRNT Examiner's search strategy and results 2 View
2014-10-24 1449 List of References cited by applicant and considered by examiner 4 View
2014-10-24 SRFW Search information including classification, databases and other search related notes 1 View
2014-10-09 CTRS Requirement for Restriction/Election 6 View
2014-10-09 BIB Bibliographic Data Sheet 1 View
2014-10-09 ELC. Response to Election / Restriction Filed 1 View
2014-10-09 N417 Electronic Filing System Acknowledgment Receipt 2 View
2013-07-24 IDS Information Disclosure Statement (IDS) Form (SB08) 4 View
2013-07-24 N417 Electronic Filing System Acknowledgment Receipt 2 View
2013-05-30 NTC.PUB Notice of Publication 1 View
2011-12-16 WFEE Fee Worksheet (SB06) 1 View
2011-12-16 APP.FILE.REC Filing Receipt 3 View
2011-11-30 ADS Application Data Sheet 5 View
2011-11-30 OATH Oath or Declaration filed 2 View
2011-11-30 DRW.NONBW Drawings-other than black and white line drawings 9 View
2011-11-30 SPEC Specification 18 View
2011-11-30 CLM Claims 3 View
2011-11-30 ABST Abstract 1 View
2011-11-30 WFEE Fee Worksheet (SB06) 2 View
2011-11-30 N417 Electronic Filing System Acknowledgment Receipt 3 View
2011-11-30 SCORE Placeholder sheet indicating presence of supplemental content in Supplemental Complex Repository for Examiners(SCORE) 1 View
0001-01-03 DRW.SUPP Drawings-black and white line and/or other drawings — View
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Quick Facts
App. No.
13/307,341
Filed
2011-11-30
Pub. No.
US20130136851A1
Art Unit
1756