IP Library Granted Patent US 8,377,737
Granted Patent B1
US 8,377,737 · App. 13/308,367 · Granted Feb 19, 2013

Methods of short wavelength laser scribing of a thin film photovoltaic device

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Quick Facts
Patent No.
US 8,377,737
App. No.
13/308,367
Granted
Feb 19, 2013
Kind
B1
Abstract

Methods for isolating thin film photovoltaic cells on a superstrate are provided. The method includes focusing a laser beam onto a first surface of the superstrate to remove a thin film stack positioned on a second surface of the superstrate, and directing the laser beam across the first surface of the superstrate to form an isolation scribe that is substantially free from the thin film stack. The thin film stack can include a transparent conductive oxide layer on the second surface, an n-type window layer on the transparent conductive oxide layer, and an absorber layer on the n-type window layer. The laser beam can have a laser wavelength of about 370 nm or less, and/or can have a laser wavelength such that the transparent conductive oxide layer absorbs at least about 80% of the laser beam at the laser wavelength.

Claims (24)

1. A method of isolating thin film photovoltaic cells on a superstrate, the method comprising:

focusing a laser beam onto a first surface of the superstrate to remove a thin film stack positioned on a second surface of the superstrate, the laser beam having a laser wavelength of about 375 nm or less, wherein the thin film stack comprises a transparent conductive oxide layer comprising a cadmium tin oxide on the second surface, an n-type window layer on the transparent conductive oxide layer, and an absorber layer comprising cadmium telluride on the n-type window layer; and,

directing the laser beam across the first surface of the superstrate to form an isolation scribe that is substantially free from the thin film stack.

2. The method as in claim 1 , wherein the laser beam has a laser wavelength of about 330 nm to about 370 nm.

3. The method as in claim 1 , wherein the laser beam has a laser wavelength of about 345 nm to about 360 nm.

4. The method as in claim 1 , wherein the laser beam has a laser wavelength of about 355 nm.

5. The method as in claim 1 , wherein the superstrate comprises a borosilicate glass.

6. The method as in claim 5 , wherein the superstrate has a thickness of about 0.5 mm to about 2.5 mm.

7. The method as in claim 1 , wherein the transparent conductive oxide layer has at least 80% absorption of the laser beam at the laser wavelength.

8. The method as in claim 1 , wherein the transparent conductive oxide layer has about 85% to about 95% absorption of the laser beam at the laser wavelength.

9. The method as in claim 1 , wherein the n-type window layer comprises cadmium sulfide.

10. The method as in claim 1 , wherein the thin film stack further comprises a resistive transparent buffer layer between the transparent conductive oxide layer and the n-type window layer.

11. The method as in claim 10 , wherein the resistive transparent buffer layer comprises a zinc tin oxide.

12. The method as in claim 1 , further comprising:

filling the scribe line with a nonconductive material.

13. A method of isolating thin film photovoltaic cells on a superstrate, the method comprising:

focusing a laser beam having a laser wavelength onto a first surface of the superstrate to remove a thin film stack positioned on a second surface of the superstrate, wherein the thin film stack comprises a transparent conductive oxide layer on the second surface, an n-type window layer on the transparent conductive oxide layer, and an absorber layer comprising cadmium telluride on the n-type window layer, wherein the transparent conductive oxide layer absorbs at least about 80% of the laser beam at the laser wavelength; and,

directing the laser beam across the first surface of the superstrate to form an isolation scribe that is substantially free from the thin film stack.

14. The method as in claim 13 , wherein the transparent conductive oxide layer absorbs about 85% to about 99% of the laser beam at the laser wavelength.

15. The method as in claim 13 , wherein the transparent conductive oxide layer comprises a cadmium tin oxide.

16. The method as in claim 15 , wherein the laser wavelength is about 330 nm to about 370 nm.

17. The method as in claim 16 , wherein the laser wavelength is about 345 nm to about 360 nm.

18. The method as in claim 16 , wherein the superstrate comprises a borosilicate glass.

19. The method as in claim 18 , wherein the superstrate has a thickness of about 0.5 mm to about 2.5 mm.

Assignments (6)
SECURITY INTEREST Recorded Jul 10, 2023
From: FIRST SOLAR, INC.
To: JPMORGAN CHASE BANK, N.A., AS ADMINISTRATIVE AGENT
Reel/Frame 064237/0462 →
TERMINATION AND RELEASE OF SECURITY INTEREST IN PATENT RIGHTS Recorded Nov 15, 2021
From: JPMORGAN CHASE BANK, N.A.
To: FIRST SOLAR, INC.
Reel/Frame 058132/0566 →
PATENT SECURITY AGREEMENT Recorded Jul 12, 2017
From: FIRST SOLAR, INC.
To: JPMORGAN CHASE BANK, N.A., AS ADMINISTRATIVE AGENT
Reel/Frame 043177/0581 →
CORRECTIVE ASSIGNMENT TO CORRECT THE APPLICATION NUMBER FROM '13/301162' PREVIOUSLY RECORDED ON REEL 032045 FRAME 0657. ASSIGNOR(S) HEREBY CONFIRMS THE CORRECT APPLICATION NUMBER SHOULD BE '13/601162'. Recorded Feb 10, 2014
From: FIRST SOLAR MALAYSIA SDN. BHD.
To: FIRST SOLAR, INC.
Reel/Frame 032239/0005 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jan 14, 2014
From: FIRST SOLAR MALAYSIA SDN. BHD.
To: FIRST SOLAR, INC.
Reel/Frame 032045/0657 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Nov 5, 2013
From: PRIMESTAR SOLAR, INC.
To: FIRST SOLAR MALAYSIA SDN. BHD.
Reel/Frame 031581/0891 →