Array substrate, manufacturing method and detecting method thereof, and liquid crystal panel
View Patent ↗An embodiment of the present disclosure provides a method of manufacturing an array substrate, comprising at least a step of forming a TFT pattern in a pixel region and correspondingly forming a TFT testing pattern in a testing region, wherein before forming a passivation layer to cover the pixel region and the testing region, a step of removing a gate insulation layer thin film above a testing line lead in the TFT testing pattern.
1. A detecting method of an array substrate, comprising detecting the electrical characteristic of the TFT testing pattern after forming a TFT testing channel and removing a gate insulation layer thin film on a data line lead in the TFT testing pattern of the testing region,
wherein, detecting the electrical characteristic of the TFT testing pattern comprises:
making a testing probe into contact with the data line lead;
changing the input voltage of the data line lead to obtain the current change information between the source and drain electrodes of the testing region;
determining the electrical characteristic of the TFT testing pattern according to the current change information.
2. A detecting method of an array substrate, comprising detecting an electrical characteristic of a TFT testing pattern after forming a TFT testing channel and removing a gate insulation layer thin film on a testing line lead in the TFT testing pattern of a testing region, wherein, detecting the electrical characteristic of the TFT testing pattern comprises:
making a testing probe into contact with a gate line lead;
changing the input voltage of the gate line lead to obtain the current change information between the source and drain electrodes of the testing region;
determining the electrical characteristic of the TFT testing pattern according to the current change information.