Memory element and memory device
View Patent ↗A memory element and a memory device having the stable switching characteristics with the characteristics of data retention remaining favorable are provided. The memory element includes a first electrode, a memory layer, and a second electrode in this order. The memory layer includes an ion source layer provided on the second electrode side, a resistance change layer provided between the ion source layer and the first electrode, and a barrier layer provided between the resistance change layer and the first electrode, and having conductivity higher than that of the resistance change layer.
1. A memory element, comprising:
a first electrode, a memory layer, and a second electrode in this order,
wherein,
the memory layer includes
(i) an ion source layer provided on the second electrode side,
(ii) a resistance change layer provided between the ion source layer and the first electrode, resistance of the resistance change layer changing in response to an insertion thereinto or an extraction therefrom of ions from the ion source layer in response to an application of voltage or current signals to the first and second electrodes, and
(iii) a barrier layer, and
the barrier layer is between the resistance change layer of the memory layer and the first electrode and is in contact with the resistance change layer, the barrier layer having a conductivity higher than that of the resistance change layer.
2. The memory element according to claim 1 , wherein the conductivity of the barrier layer is 10 times or more but 200 times or less that of the conductivity of the resistance change layer.
3. The memory element according to claim 1 , wherein the barrier layer contains an oxide or nitride of titanium (Ti), hafnium (Hf), vanadium (V), niobium (Nb), tantalum (Ta), chromium (Cr), molybdenum (Mo), or zirconium (Zr).
4. The memory element according to claim 1 , wherein the ion source layer includes one or more of silicon (Si), zirconium (Zr), and aluminum (Al), and one or more metallic elements of copper (Cu), silver (Ag), germanium (Ge), zinc (Zn), zirconium (Zr), titanium (Ti), hafnium (Hf), vanadium (V), niobium (Nb), tantalum (Ta), chromium (Cr), molybdenum (Mo), and tungsten (W).
5. The memory element according to claim 4 , wherein a change of resistance value occurs by formation of a low-resistance section including the metallic element in the resistance change layer in response to the application of the voltage signal to the first and second electrodes.
6. The memory element according to claim 4 , wherein the ion source layer further includes one or more of sulfur (S), selenium (Se), and tellurium (Te).
7. The memory element according to claim 1 , wherein the ion source layer includes one or more of silicon (Si), zirconium (Zr), and aluminum (Al).
8. The memory element according to claim 7 , wherein the ion source layer further includes one or more of sulfur (S), selenium (Se), and tellurium (Te).
9. A memory device, comprising:
a plurality of memory elements each including a first electrode, a memory layer, and a second electrode in this order; and
a pulse application section for applying a voltage or current pulse selectively to the memory elements to write to or read from the memory elements,
wherein,
the memory layer includes
(i) an ion source layer provided on the second electrode side,
(ii) a resistance change layer provided between the ion source layer and the first electrode, resistance of the resistance change layer changing in response to an insertion thereinto or an extraction therefrom of ions from the ion source layer in response to the application of the voltage or current pulse to the first and second electrodes, and
(iii) a barrier layer, and
the barrier layer is between the resistance change layer of the memory layer and the first electrode and is in contact with the resistance change layer, the barrier layer having a conductivity higher than that of the resistance change layer.