Conductive line structure and the method of forming the same
View Patent ↗The conductive line structure of a semiconductor device including a base; at least one patterned conductive layer formed over the base; a conductive line formed over the at least one patterned conductive layer; a protection layer that encompasses the top surface and sidewall of the conductive line to prevent undercut generated by etching. The structure further comprises an underlying layer under the conductive line. The underlying layer includes Ni, Cu or Pt. The conductive line includes gold or copper. The at least one patterned conductive layer includes at least Ti/Cu. The protection layer includes electro-less plating Sn, Au, Ag or Ni.
1. A method of forming conductive line structure of semiconductor device, comprising:
providing a base;
forming at least one conductive layer over said base;
patterning a photo-resist pattern over said at least one conductive layer to expose a top layer of said at least one conductive layer;
etching said top layer of said at least one conductive layer;
forming an underlying layer over said etched at least one conductive layer;
forming a conductive line over said underlying layer;
stripping said photo-resist pattern;
forming a protection layer to encompass the top surface and sidewall of said conductive line to prevent undercut generated by etching.
2. The method of claim 1 , wherein said underlying layer includes Ni, Au or Pt.
3. The method of claim 1 , wherein said conductive line includes gold.
4. The method of claim 1 , wherein said conductive line includes copper.
5. The method of claim 1 , wherein said conductive line is formed by electro-plating.
6. The method of claim 1 , wherein said at least one patterned conductive layer includes Ti/Cu/Ti.
7. The method of claim 2 , wherein said at least one patterned conductive layer is formed by sputter.
8. The method of claim 1 , wherein said protection layer is formed by electro-less plating Sn.
9. The method of claim 1 , wherein said protection layer is formed by electro-less plating Au.
10. The method of claim 1 , wherein said protection layer is formed by electro-less plating Ag.
11. The method of claim 1 , wherein said protection layer is formed by electro-less plating Ni.