Magnetic recording head and system having optical waveguide core and/or cladding of an alloyed oxide material

1. An apparatus, comprising:

a near field transducer positioned towards a media-facing surface side;

a primary waveguide for delivering light to the near field transducer;

a secondary waveguide positioned near the primary waveguide and configured for receiving light from a light source and transferring at least some of the light received thereby to the primary waveguide; and

a gap layer positioned between the primary waveguide and the secondary waveguide;

wherein the secondary waveguide comprises an oxide of at least one of Ta, Ti, Zr, and Nb alloyed with an oxide of at least one of Si and Al.

2. The apparatus as recited in claim 1 , further comprising a cladding material that at least partially surrounds each of the primary and secondary waveguides, wherein the primary waveguide is primarily TaOx, where x is in a range of 2.5 to 2.7; wherein the second waveguide is primarily TaSiOx where a Ta/(Ta+Si) atomic ratio thereof is in a range of 0.3 to 0.7 and x is in a range of 2 to 2.7; wherein the thin gap layer and cladding material are both primarily AlOx where x is in the range of 1.4-1.7.

3. The apparatus as recited in claim 1 , wherein the primary waveguide is not exposed directly to light from the light source.

4. The apparatus as recited in claim 1 , wherein the primary waveguide has a tapered cross sectional profile, sides of the primary waveguide tapering together towards an end of the primary waveguide positioned farthest from the near field transducer.

5. The apparatus as recited in claim 1 , wherein a core of the primary waveguide has a higher index of refraction than the secondary waveguide.

6. The apparatus as recited in claim 1 , wherein the primary waveguide is spaced from the secondary waveguide by between 0 nanometers and about 200 nanometers.

7. The apparatus as recited in claim 1 , further comprising a separation layer between the primary waveguide and the secondary waveguide, wherein the separation layer comprises AlOx or an oxide of at least one of Ta, Ti, Zr and Nb alloyed with an oxide of at least one of Si and Al.

8. The apparatus as recited in claim 7 , wherein the separation layer comprises the oxide of at least one of Ta, Ti, Zr and NU alloyed with the oxide of at least one of Si and Al, wherein a composition of the separation layer is different than the composition of the secondary waveguide.

9. The apparatus as recited in claim 7 , wherein the primary waveguide does not have a graded structure.

10. The apparatus as recited in claim 1 , wherein the primary waveguide includes a core, a cladding portion at least partially surrounding the core, and an intermediate layer between the core and the cladding portion, the intermediate layer comprising an oxide of at least one of Ta, Ti, Zr and Nb alloyed with an oxide of at least one of Si and Al, wherein the core has a higher index of refraction than the cladding portion and the intermediate layer, wherein the intermediate layer has a higher index of refraction than the cladding portion.

11. The apparatus as recited in claim 10 , further comprising a separation layer between the primary waveguide and the secondary waveguide, wherein the separation layer comprises an oxide of at least one of Ta, Ti, Zr and Nb alloyed with an oxide of at least one of Si and Al.

12. The apparatus as recited in claim 1 , further comprising:

a magnetic head having the near field transducer;

a magnetic medium;

a drive mechanism for passing the magnetic medium over the magnetic head;

and a controller electrically coupled to the magnetic head for controlling operation of the magnetic head.

13. A method for forming the apparatus as recited in claim 1 , wherein the secondary waveguide is formed by co-sputtering the at least one of Ta, Ti, Zr and Nb and the at least one of Si and Al in the presence of oxygen.

14. A method for forming the apparatus as recited in claim 1 , wherein the secondary waveguide is formed by sputtering a single target comprising an alloy of the at least one of Ta, Ti, Zr and Nb and the at least one of Si and Al in the presence of oxygen.

15. A method for forming the apparatus as recited in claim 1 , wherein the primary waveguide comprises an oxide of at least one of Ta, Ti, Zr and Nb alloyed with an oxide of at least one of Si and Al, wherein the primary waveguide is formed at least in part by co-sputtering the at least one of Ta, Ti, Zr and Nb and the at least one of Si and Al in the presence of oxygen.

16. A method for forming the apparatus as recited in claim 1 , wherein the primary waveguide comprises an oxide of at least one of Ta, Ti, Zr and Nb alloyed with an oxide of at least one of Si and Al, wherein the primary waveguide is formed at least in part by sputtering a single target comprising an alloy of the at least one of Ta, Ti, Zr and Nb and the at least one of Si and Al in the presence of oxygen.

17. An apparatus, comprising:

a near field transducer positioned towards a media-facing surface side; and

a primary waveguide for illumination of the near field transducer, the primary waveguide comprising an oxide of at least one of Ta, Ti, Zr and Nb alloyed with an oxide of at least one of Si and Al.

18. The apparatus as recited in claim 17 , wherein the primary waveguide is exposed on a flex side thereof directly to light from a light source.

19. The apparatus as recited in claim 18 , wherein the primary waveguide does not have a graded structure.

20. The apparatus as recited in claim 18 , wherein the primary waveguide has a tapered shape such that a cross sectional area of the primary waveguide near the flex side is less than a cross sectional area of the primary waveguide near the near field transducer.

21. The apparatus as recited in claim 17 , wherein the primary waveguide includes a core, a cladding portion at least partially surrounding the core, and an intermediate layer between the core and the cladding portion, the intermediate layer comprising an oxide of at least one of Ta, Ti, Zr and Nb alloyed with an oxide of at least one of Si and Al, wherein the core has a higher index of refraction than the cladding portion and the intermediate layer, wherein the intermediate layer has a higher index of refraction than the cladding portion.

22. The apparatus as recited in claim 17 , further comprising:

a magnetic head having the near field transducer;

a magnetic medium;

a drive mechanism for passing the magnetic medium over the magnetic head;

and a controller electrically coupled to the magnetic head for controlling operation of the magnetic head.

23. A method for forming the apparatus as recited in claim 17 , wherein the primary waveguide is formed by co-sputtering the at least one of Ta, Ti, Zr and Nb and the at least one of Si and Al in the presence of oxygen.

24. A method for forming the apparatus as recited in claim 17 , wherein the primary waveguide is formed by sputtering a single target comprising an alloy of the at least one of Ta, Ti, Zr and Nb and the at least one of Si and Al in the presence of oxygen.

25. An apparatus, comprising:

a near field transducer positioned towards a first side; and

a primary waveguide for illumination of the near field transducer, the primary waveguide having a first end near a flex side and a second end near the near field transducer,

wherein the primary waveguide has a tapered shape such that a cross sectional area of the first end of the primary waveguide is less than a cross sectional area of the second end of the primary waveguide;

wherein the primary waveguide comprises an oxide of at least one of Ta, Ti, Zr, and Nb alloyed with an oxide of at least one of Si and Al.