Semiconductor device including first and second semiconductor elements
A semiconductor device includes a first semiconductor element including a first pn junction between a first terminal and a second terminal. The semiconductor device further includes a semiconductor element including a second pn junction between a third terminal and a fourth terminal. The semiconductor element further includes a semiconductor body including the first semiconductor element and the second semiconductor element monolithically integrated. The first and third terminals are electrically coupled to a first device terminal. The second and fourth terminals are electrically coupled to a second device terminal. A temperature coefficient α 1 of a breakdown voltage V br1 of the first pn junction and a temperature coefficient α 2 of a breakdown voltage V br2 of the second pn junction have a same algebraic sign and satisfy 0.6×α 1 <α 2 <1.1×α 1 at T=300 K, wherein V br2 <V br1 .
1. A semiconductor device, comprising:
a first semiconductor element including a first pn junction between a first terminal and a second terminal;
a second semiconductor element including a second pn junction between a third terminal and a fourth terminal;
a semiconductor body including the first semiconductor element and the second semiconductor element monolithically integrated; and wherein
the first and third terminals are electrically coupled to a first device terminal;
the second and fourth terminals are electrically coupled to a second device terminal; and
a temperature coefficient α 1 of a breakdown voltage V br1 of the first pn junction and a temperature coefficient α 2 of a breakdown voltage V br2 of the second pn junction have a same algebraic sign and satisfy 0.6×α 1 <α 2 <1.1×α 1 at T=300K, wherein V br2 <V br1 .
2. The semiconductor device of claim 1 , wherein
the first semiconductor element is a trench field effect transistor cell and the first pn junction includes a first body region of a first conductivity type and a first drift region of a second conductivity type different from the first conductivity type;
the first body region adjoins a first trench structure at a first side of the first body region and the first body region adjoins a second trench structure at a second side of the first body region opposite to the first side;
the second semiconductor element is a sense cell and the second pn junction includes a second body region of the first conductivity type and a second drift region of the second conductivity type; and
the second body region adjoins a third trench structure at a first side of the second body region and the second body region adjoins a fourth trench structure at a second side of the second body region opposite to the first side.
3. The semiconductor device of claim 2 , wherein the second body region is electrically coupled to a gate electrode of at least one of the first and second trench structures.
4. The semiconductor device of claim 2 , wherein a difference between the first breakdown voltage V br1 of the first pn junction and the second breakdown voltage V br2 of the second pn junction is in a range between 50% to 600% of a threshold voltage of the trench field effect transistor.
5. The semiconductor device of claim 2 , wherein each one of the first and second trench structures includes a trench that is filled with an insulating material.
6. The semiconductor device of claim 2 , wherein a width of the first body region is larger than the width of the second body region.
7. The semiconductor device of claim 2 , wherein a width of the first body region is smaller than the width of the second body region.
8. The semiconductor device of claim 2 , wherein a depth of each one of the first and second trench structures is smaller than a depth of each one of the third and fourth trench structures.
9. The semiconductor device of claim 2 , wherein a width of each one of the first and second trench structures is smaller than a width of each one of the third and fourth trench structures.
10. The semiconductor device of claim 2 , wherein a depth of each one of the first and second trench structures is larger than a depth of each one of the third and fourth trench structures.
11. The semiconductor device of claim 2 , wherein a width of each one of the first and second trench structures is larger than a width of each one of the third and fourth trench structures.
12. The semiconductor device of claim 2 , further comprising a shielding region of the first conductivity type that is arranged within the drift region and adjoins a bottom side of each one of the third and fourth trench structures.
13. The semiconductor device of claim 2 , wherein a first distance between a bottom side of the first body region to a top side of the first body region at a surface of a semiconductor body of the first and second semiconductor elements is smaller than a second distance between a bottom side of the second body region to a top side of the second body region at the surface of the semiconductor body.
14. The semiconductor device of claim 2 , wherein
a trench field effect transistor cell array includes a first plurality of the field effect transistor cells;
a second plurality of the sense cells is spread over an area of the trench field effect transistor cell array; and
the first plurality is larger than the second plurality.
15. The semiconductor device of claim 2 , wherein
each one of the first and second trench structures includes a gate electrode and at least one field electrode that is arranged below the gate electrode; and further comprising
an electric insulator between the gate electrode and the at least one field electrode.
16. The semiconductor device of claim 1 , wherein
the first semiconductor element is a superjunction array cell and the first pn junction includes a first p-type pillar region and a first n-type pillar region;
the second semiconductor element is a superjunction sense cell and the second pn junction includes a second p-type pillar region and a second n-type pillar region; and wherein
the first and the second semiconductor elements differ in at least one of a lateral dimension of their p-type pillar region and their n-type pillar region.
17. The semiconductor device of claim 1 , wherein
the first semiconductor element is a transistor cell and the first pn junction includes a first body region of a first conductivity type and a first drift region of a second conductivity type different from the first conductivity type;
the second semiconductor element is a sense cell and the second pn junction includes a second body region of the first conductivity type and a second drift region of the second conductivity type; and wherein
a first distance between a bottom side of the first body region to a top side of the first body region at a surface of a semiconductor body of the first and second semiconductor elements is smaller than a second distance between a bottom side of the second body region to a top side of the second body region at the surface of the semiconductor body.
18. The semiconductor device of claim 1 , wherein
the first semiconductor element is a transistor cell and the first pn junction includes a first body region of a first conductivity type and a first drift region of a second conductivity type different from the first conductivity type;
the second semiconductor element is a sense cell and the second pn junction includes a second body region of the first conductivity type and a second drift region of the second conductivity type; and wherein
a width of the first body region differs from a width of the second body region.
19. The semiconductor device of claim 1 , wherein
the first semiconductor element is a first diode and the first pn junction includes a first anode region of a first conductivity type and a first cathode region of a second conductivity type different from the first conductivity type; and
the second semiconductor element is a second diode and the second pn junction includes a second anode region of the first conductivity type and a second cathode region of the second conductivity type.
20. The semiconductor device of claim 19 , further comprising
a transistor including a first load terminal, a second load terminal and a control terminal; and wherein
the first and second load terminals of the transistor and the first semiconductor element are connected in parallel.
21. The semiconductor device of claim 20 , wherein
the transistor is an n-type field effect transistor;
the first load terminal is a drain;
the second load terminal is a source;
the control terminal is a gate; and
the second anode region is electrically coupled to the gate.
22. The semiconductor device of claim 19 , wherein the first breakdown voltage V br1 of the first pn junction and the second breakdown voltage V br2 of the second pn junction satisfy 0<(V br1 −V br2 )/V br1 <0.2.
23. The semiconductor device of claim 19 , wherein
the first anode region includes a first p-type impurity and the second anode region includes the first p-type impurity; and
the first cathode region includes a first n-type impurity and the second cathode region includes the first n-type impurity; and wherein
a lateral concentration profile of at least one of the first p-type impurity in the first anode region, the first p-type impurity in the second anode region, the first n-type impurity in the first cathode region, and the first n-type impurity in the second cathode region is corrugated and includes maxima and minima.
24. The semiconductor device of claim 19 , wherein
the second semiconductor diode includes at least one of
a second p-type impurity in the second anode region that is absent in the first anode region, or
a second n-type impurity in the second cathode region that is absent in the first cathode region.
25. The semiconductor device of claim 19 , wherein
the first diode is an electrostatic discharge protection device including an anode area of at least 4000 μm 2 .